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| Number | Title | Issue Date |
| 6958112 | Methods and systems for high-aspect-ratio gapfill using atomic-oxygen generation Methods and systems are provided for depositing silicon oxide in a gap on a substrate. The silicon oxide is formed by flowing a process gas into a process chamber and forming a plasma having an overall ion density of at least 1011 ions/cm3. The... | 10/25/2005 |
| 6951752 | Method for large scale production of virus antigen The present invention provides improved methods of production of viral antigen on a culture of adherent cells bound to a microcarrier, wherein the methods provide for increased viral antigen yield per culture medium volume. The invention is also directed to a cell c... | 10/04/2005 |
| 6808748 | Hydrogen assisted HDP-CVD deposition process for aggressive gap-fill technology A method of depositing a silicon oxide layer over a substrate having a trench formed between adjacent raised surfaces. In one embodiment the silicon oxide layer is formed in a multistep process that includes depositing a first portion of layer over the substrate and... | 10/26/2004 |
| 6803325 | Apparatus for improving barrier layer adhesion to HDP-FSG thin films A method of formation of a damascene FSG film with good adhesion to silicon nitride in an HDP-CVD system. Silane (SiH4), silicon tetrafluoride (SiF4), oxygen (O2) and argon (Ar) are used as the reactant gases. SiH4, SiF | 10/12/2004 |
| 6521292 | Substrate support including purge ring having inner edge aligned to wafer edge The present invention provides exemplary apparatus and methods for processing substrates and for ensuring purge gases reach the substrate edge, including edges of JMF type wafers, to help prevent unwanted deposition thereon. One embodiment provides an app... | 02/18/2003 |
| 6220607 | Thermally conductive conformal media A thermally conductive medium includes a body with a first melting point and phase-changing material encapsulating a portion of the body, with the phase-changing material having a second melting point. The first melting point is greater than the second me... | 04/24/2001 |
| 6162285 | Ozone enhancement unit An apparatus for increasing the ozone concentration in the output of an ozone-generating system is disclosed. The invention reduces the concentration of O.sup.+ ions, which would otherwise react with ozone to form diatomic oxygen, by means of an ionic fi... | 12/19/2000 |
| 6099647 | Methods and apparatus for forming ultra-shallow doped regions using doped silicon oxide films The present invention provides systems, methods and apparatus for high temperature (at least about 500-800° C.) processing of semiconductor wafers. The systems, methods and apparatus of the present invention allow multiple process steps to be performed i... | 08/08/2000 |
| 6051286 | High temperature, high deposition rate process and apparatus for depositing titanium layers The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 Å/minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater ... | 04/18/2000 |
| 6027894 | Nucleic acid adapters containing a type IIs restriction site and methods of using the same The present invention relates to novel methods for sequencing and mapping genetic markers in polynucleotide sequences using Type-IIs restriction endonucleases. The methods herein described result in the "capturing" and determination of specific oligonucle... | 02/22/2000 |
| 5834252 | End-complementary polymerase reaction The present invention is directed to a process for amplifying and detecting any target nucleic acid sequence contained in a nucleic acid or mixture thereof and for assembling large polynucleotides from component polynucleotides, each involving generating ... | 11/10/1998 |
| 5830682 | Preparation of immortalized cells All lines have been prepared from growth suppressor gene deficient animals. The cells include immortalized precursor cells and differentiated cells such as osteoclast precursors, osteoblast precursors, megakaryocytes, osteoclasts, osteoblasts, pancreatic ... | 11/03/1998 |
