The Law Offices of Robert J. Eichelburg - US Patent Attorneys and Agents

Attorney: The Law Offices of Robert J. Eichelburg

Number of patents: 22
Last date: May 22, 2012

Number	Title	Issue Date
8183694	Reversing tone of patterns on integrated circuit and nanoscale fabrication A process to produce an airgap on a substrate having a dielectric layer comprises defining lines by lithography where airgaps are required. The lines' dimensions are shrunk by a trimming process (isotropic etching). The tone of the patterns is reversed by applying a...	05/22/2012
8137893	Chemical trim of photoresist lines by means of a tuned overcoat A new lithographic process comprises reducing the linewidth of an image while maintaining the lithographic process window, and using this process to fabricate pitch split structures comprising nm order (e.g., about 22 nm) node semiconductor devices. The process comp...	03/20/2012
8124485	Molecular spacer layer for semiconductor oxide surface and high-K dielectric stack A process for defining a functional area in a semiconductor device comprising a semiconductor substrate contiguous with a gate dielectric layer whose dielectric constant is higher than silicon oxide and an oxide capping layer positioned on the gate dielectric layer ...	02/28/2012
8093099	Lock and key through-via method for wafer level 3D integration and structures produced A three dimensional device stack structure comprises two or more active device and interconnect layers further connected together using through substrate vias. Methods of forming the three dimensional device stack structure comprise alignment, bonding by lamination,...	01/10/2012
8084193	Self-segregating multilayer imaging stack with built-in antireflective properties A coating process comprises forming a patterned material layer on a substrate using a self-segregating polymeric composition comprising a polymeric photoresistive material and an antireflective coating material. The polymeric photoresistive material and the antirefl...	12/27/2011
8063483	On-chip temperature gradient minimization using carbon nanotube cooling structures with variable cooling capacity An electronic device comprises a die with at least one defined hot-spot area; and at least one defined intermediate temperature area at a temperature lower than the temperature of the hot-spot area. The device also comprises a cooling structure comprising at least o...	11/22/2011
8039194	Photoacid generators for extreme ultraviolet lithography A photoacid generator P+ A− comprises (a) an antenna group P+ comprising atoms with high EUV photoabsorption cross-sections according to FIG. 1 and A− anions; or (b) an antenna group P+ and A−	10/18/2011
7928585	Sprocket opening alignment process and apparatus for multilayer solder decal A process for aligning at least two layers in an abutting relationship with each other comprises forming a plurality of sprocket openings in each of the layers for receiving a sprocket of diminishing diameters as the sprocket extends outwardly from a base, with the ...	04/19/2011
7875408	Bleachable materials for lithography Compositions comprising photobleachable organic materials can be bleached by 193 nm light, and brought back to their original state by stimuli after exposure. (reversible photobleaching). We use these compositions in art-known contrast enhancement layers and as a pa...	01/25/2011
7862982	Chemical trim of photoresist lines by means of a tuned overcoat material A new lithographic process comprises reducing the linewidth of an image while maintaining the lithographic process window, and using this process to fabricate pitch split structures comprising nm order (e.g., about 22 nm) node semiconductor devices. The process comp...	01/04/2011
7855455	Lock and key through-via method for wafer level 3 D integration and structures produced A three dimensional device stack structure comprises two or more active device and interconnect layers further connected together using through substrate vias. Methods of forming the three dimensional device stack structure comprise alignment, bonding by lamination,...	12/21/2010
7842554	VLSI hot-spot minimization using nanotubes The invention relates to a semiconductive device comprising a die with at least one defined hot-spot area lying in a plane on the die and a cooling structure comprising nanotubes such as carbon nanotubes extending in a plane different than the plane of the hot-spot ...	11/30/2010
7790350	Method and materials for patterning a neutral surface A self assembly step for the manufacture of an electronic component comprising, e.g., a semiconductor chip or semiconductor array or wafer comprises forming a block copolymer film placed on a random copolymer film substrate operatively associated with the electronic...	09/07/2010
7780801	Flux composition and process for use thereof The invention relates to a composition of matter comprising a soldering flux, wherein the flux consists essentially of a combination of a fluxing agent and a solvent, and wherein the fluxing agent comprises a keto acid such as levulinic acid or acetylbutyric acid. T...	08/24/2010
7767631	Lubricant compositions and methods A process is disclosed for manufacturing a lubricant composition comprising combining a superabsorbent polymer with a material for decreasing friction between moving surfaces. The superabsorbent polymer absorbs from about 25 to greater than 100 times its weight in w...	08/03/2010
7655379	Ionic, organic photoacid generators for DUV, MUV and optical lithography based on peraceptor-substituted aromatic anions A photoacid generator compound P+A−, comprises an antenna group P+ comprising a cation that generates protons upon interaction with light, and A− comprising a weakly coordinating peracceptor-substituted aromatic anion ...	02/02/2010
7553541	Lubricant compositions and methods A substrate is coated with an essentially water-free composition. The composition includes a superabsorbent polymer that absorbs from about 25 to greater than 100 times its weight in water and a material for lubricating the substrate. The superabsorbent polymer may ...	06/30/2009
7358216	Lubricant compositions and methods A process is disclosed for manufacturing a lubricant composition comprising combining a superabsorbent polymer with a material for decreasing friction between moving surfaces. The superabsorbent polymer absorbs from about 25 to greater than 100 times its weight in w...	04/15/2008
7338926	Lubricant compositions and methods A process is disclosed for manufacturing a lubricant composition comprising combining a superabsorbent polymer with a material for decreasing friction between moving surfaces. The superabsorbent polymer absorbs from about 25 to greater than 100 times its weight in w...	03/04/2008
7138044	Aqueous dispersions of polymerizable reactants and a water incompatible catalyst sorbed on an inorganic particulate carrier and polymers produced thereby Aqueous compositions containing polymerizable components and a water incompatible catalyst for the polymerization reaction sorbed onto an inorganic particulate carrier, polymers produced thereby and articles coated with said polymers are provided. The invention also...	11/21/2006
6734147	Lubricant compositions and methods A process is disclosed for manufacturing a lubricant composition comprising combining a superabsorbent polymer with a material for decreasing friction between moving surfaces. The superabsorbent polymer absorbs from about 25 to greater than 100 times its weight in w...	05/11/2004
6620342	Narrow composition distribution polyvinylidene fluoride RECLT films, processes, articles of manufacture and compositions The disclosure relates to a reversible, electrically controllable light transmission (RECLT) film, article of manufacture composition, process and product produced by the process, comprising a conductive narrow composition distribution polyvinylidene fluo...	09/16/2003

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Attorney: The Law Offices of Robert J. Eichelburg