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| Number | Title | Issue Date |
| 7679842 | High performance catadioptric imaging system A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective... | 03/16/2010 |
| 7672043 | Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form an intermediate ima... | 03/02/2010 |