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| Number | Title | Issue Date |
| 6800833 | Electromagnetically levitated substrate support An apparatus for supporting a substrate and a method for positioning a substrate include a substrate support, a stator circumscribing the substrate support, and an actuator. The actuator is coupled to the stator and adapted to change the elevation of the stator and/... | 10/05/2004 |
| 6789584 | Fluid containment apparatus A method and apparatus for preventing leakage from a fitting coupling a first and second fluid supply line to an environment surrounding the fitting is generally provided. In one embodiment, a containment apparatus includes a body having a first, second and third ap... | 09/14/2004 |
| 5877090 | Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of NH3 or SF6 and HBR and N2 An RIE method and apparatus provides uniform and selective etching through silicon nitride material of a supplied workpiece such as a silicon wafer having silicon oxide adjacent to the SiN. A plasma-maintaining gas that includes N2 having an in... | 03/02/1999 |
| 5418070 | Tri-layer impregnated cathode An impregnated cathode comprising three layers: a very thin emitting surface layer of metal such as an alloy of tungsten with a high fraction of an activating metal of the platinum group to provide low workfunction; an underlying, thin buffer layer of por... | 05/23/1995 |
| 5168532 | Method for improving the dynamic range of an imaging system Disclosed is a method for improving the dynamic resolution of an imaging system. The method employs a dual sampling or exposure technique which samples light from an image intensifier over a long and a short sample interval. When the resulting measurement... | 12/01/1992 |
| 5117445 | Electronically enhanced X-ray detector apparatus The detector of the present invention is suitable for use in a radiation therapy simulator machine. The detector comprises an X-ray image intensifier tube to convert X-rays into photons, a linear array of photodiodes to convert the photons to electrical s... | 05/26/1992 |
| 5097231 | Quasi-passive, non-radioactive receiver protector device A receiver protector device includes a sealed discharge chamber containing one or more pairs of spaced-apart, conical electrodes and an ionizable gas. A field emission array is mounted in the discharge chamber to provide a source of free electrons which a... | 03/17/1992 |
| 5089746 | Production of ion beams by chemically enhanced sputtering of solids A method for producing an ion beam for ion implantation by chemically enhanced bombardment of solids. The method is carried out in a reaction chamber having an anode and cathode and a cathode liner rich in a selected element, namely boron, arsenic, phosph... | 02/18/1992 |
| 5086254 | Microwave excited helium plasma photoionization detector A photoionization detector for detecting effluents from a gas chromatographic column has a microwave induced helium plasma as the photon source. Since the source plasma may be at atmospheric pressure and need not be sealed, energy loss due to transmission... | 02/04/1992 |
| 5083093 | Circuit for coupling energy to pulse forming network or capacitor A pulse forming network or capacitor load is charged to a precise voltage from an energy storing device with a circuit including a transformer having a primary connected in series with a switch and storage device and a secondary connected in series with t... | 01/21/1992 |
| 5083004 | Spectroscopic plasma torch for microwave induced plasmas A spectroscopic plasma torch suitable for use at atmospheric pressure is disclosed. The torch utilizes a microwave induced helium plasma confined in a plasma discharge tube. The plasma is suspended and stabilized by a vortex flow of helium. The torch incl... | 01/21/1992 |
| 5065109 | Electropneumatic band selector A band selector for a klystron includes a cam carrier and a plurality of cam followers. The cam carrier includes a plurality of cams with the cams being arranged in a plurality of rows. Each of the cam followers has a first end adapted to be mounted to a ... | 11/12/1991 |
| 4868843 | Multileaf collimator and compensator for radiotherapy machines In a radiation therapy machine it is desirable to produce irregular radiation field shapes in order to shield critical organs not invaded by the tumor. A system is provided using a multileaf collimator formed of a multiplicity of heavy metal bar leaves dr... | 09/19/1989 |
| 4866344 | High voltage power supply for a microwave electron tube A power supply for helix and collector electrodes of a traveling wave tube is driven by an AC power source having a frequency of at least 500 KHz. The helix supply includes plural, stacked voltage double AC to DC modules responsive to the 500 KHz source. ... | 09/12/1989 |
| 4866343 | Re-entrant double-staggered ladder circuit A slow-wave circuit for a TWT has periodic transverse plates extending across the axial by extending vacuum envelope. An opposed pair of apertures 24, 26 in each plate 20 couple adjacent cavities 28 between plates 20. Coupling apertures 24 in alternate pl... | 09/12/1989 |
| 4851788 | Mode suppressors for whispering gallery gyrotron A gyrotron interaction resonator 29 operating in a TEn1 cavity mode has an array of longitudinal slots 32 in the conductive wall 30. The slots 32 are spaced to couple to the unwanted TEn1 modes and to other modes of differing n and n... | 07/25/1989 |
| 4821305 | Photoelectric X-ray tube The average power capacity of a rotating-anode X-ray generator tube is limited by the slow radiation cooling of the anode. The invention removes this limitation by rotating the entire vacuum envelope so the heat can be conducted directly to the air or to ... | 04/11/1989 |
| 4821165 | High voltage DC power supply A DC power supply for a traveling wave tube having cathode, collector and helix electrodes responds to a DC power source and a high frequency switching source. A switch controlled by the switching source is opened and closed at a fixed frequency and varia... | 04/11/1989 |
| 4801903 | Waveguide loop directional coupler A loop directional RF coupler between a waveguide and coaxial line maintains a high degree of directivity while providing substantially improved coupling values. A conductive loop assembly terminating the coaxial line is accepted into an aperture means de... | 01/31/1989 |
| 4781640 | Basket electrode shaping The invention is a method of manufacture of a cylndrical electrode such as a thermionic cathode comprising an array of helical filaments. The method comprises the step of placing the array, attached to its support electrodes which are fixedly mounted to a... | 11/01/1988 |
| 4777406 | High voltage power supply particularly adapted for a TWT A power supply for helix and collector electrodes of a traveling wave tube is driven by an AC power source having a frequency of at least 500 KHz. The helix supply includes plural, stacked voltage doubler AC to DC modules responsive to the 500 KHz source.... | 10/11/1988 |
| 4774437 | Inverted re-entrant magnetron ion source An ion source for an intense ion beam from a solid source is formed with a cathode around a central anode. A source of magnetic field with closely spaced poles is formed around a central region of the cathode so that the most intense region of the magneti... | 09/27/1988 |
| 4764710 | High-efficiency broad-band klystron In a multi-cavity klystron amplifier tube, the gain-bandwidth product is improved and the amplitude response is made flatter by successive intermediate floating cavities downstream of the input cavity tuned to successively higher frequencies, and the drif... | 08/16/1988 |
| 4752743 | Linearizer for TWT amplifiers The input signal to a TWT amplifier is predistorted in amplitude and phase to the inverse of the amplifier transfer characteristic by an adjustable circuit including a phase linearizing section and an amplitude linearizing section, both in series with the... | 06/21/1988 |
| 4751437 | Wide bandwidth linear motor system A wide bandwidth linear motor system suitable for high performance applications such as driving the tuning plunger of a magnetron oscillator. The linear motor includes a coil assembly with a structure which suppresses secondary resonances, thereby permitt... | 06/14/1988 |
| 4743570 | Method of thermal treatment of a wafer in an evacuated environment In a vacuum chamber wafer treating apparatus a wafer is heated or cooled by introducing a gas at a pressure of approximately 100 to 1000 microns in a region between the wafer and a heating element or heat sink. The gas conducts thermal energy between the ... | 05/10/1988 |
| 4740764 | Pressure sealed waveguide to coaxial line connection A pressure sealed waveguide to coaxial line connection formed with a low cost, non-pressurizable waveguide to coaxial line adapter, an elastomeric sealing boot, and a specially configured mounting seat on a housing which contains a pressurizable waveguide... | 04/26/1988 |
| 4714536 | Planar magnetron sputtering device with combined circumferential and radial movement of magnetic fields A planar magnetron sputtering device has an extended flat circular target source in opposed spaced parallel relationship with a generally flat article to be coated, placed within an evacuated coating chamber. Crossed electric and magnetic fields in the ch... | 12/22/1987 |
| 4689276 | Diamond bonded electronic circuit Diamonds are good thermal conductors and also good insulators. They are thus exceptionally useful as heat-removing supports for small microwave circuit elements which must be electrically insulated from their ultimate heat sink. Bonding diamonds to metall... | 08/25/1987 |
| 4680061 | Method of thermal treatment of a wafer in an evacuated environment Semiconductor wafers are coated with metallic film by supporting the wafers individually adjacent a ring-shaped sputtering source. A vacuum chamber sputter coating apparatus has a number of work stations therein, at least one of which includes the ring-sh... | 07/14/1987 |
| 4622972 | Ultrasound hyperthermia applicator with variable coherence by multi-spiral focusing An ultrasound hyperthermia applicator comprises a plurality of transducers which can be operated in different grouping modes so that the applicator is effectively provided with a variable number of elements having variable effective diameters transmitting... | 11/18/1986 |
| 4593259 | Waveguide load having reflecting structure for diverting microwaves into absorbing fluid A calorimetric load for very high microwave power at very high frequencies is formed by a metallic, cylindrical chamber into which the wave-guide carrying the power opens. Inside the metallic cylinder is a coaxial dielectric cylinder, with a space between... | 06/03/1986 |
| 4582654 | Nebulizer particularly adapted for analytical purposes A nebulizer for analytical purposes includes a needle through which flows a liquid to be nebulized. The liquid flows from the needle onto a diaphragm planar surface that is vibrated in successive pulses. A continuous bridge of the liquid subsists between ... | 04/15/1986 |
| 4578620 | Slow wave circuit for a traveling wave tube A coupled-cavity slow-wave circuit for a millimeter-wave TWT is formed by forming cavities through a metallic bar or half-cavities in a pair of comb-shaped bars. The ends of the cavities are covered by cover members, one of which has a longitudinal groove... | 03/25/1986 |
| 4567368 | Bipolar pulsed electron capture detectors In operating an ECD in constant current mode, two pulses are implemented either to the same electrode or to separate electrodes, thereby dispersing the space charge sheath near the collector electrode and thus enhancing electron extraction at high frequen... | 01/28/1986 |
| 4558256 | Velocity tapering of comb-quad traveling-wave tubes The "comb-quad" slow-wave interaction circuit for a traveling-wave tube consists of a pair of metallic ladders whose rungs cross, the rungs of one ladder passing through the spaces between the rung of the other ladder. The phase velocity of the circuit wave is... | 12/10/1985 |
| 4555646 | Adjustable beam permanent-magnet-focused linear-beam microwave tube A permanent-magnet-focused linear-beam high power millimeter-wave tube is externally adjustable for optimum electron beam optics during initial tube operation. The adjustment is made possible by providing an enlarged cavity within the cathode polepiece wi... | 11/26/1985 |
| 4506190 | Linear beam tube with reflected electron trap Some electrons reflected from the collector of a klystron form a beam current flowing back toward the input end of the tube. This beam is modulated and can carry a regenerate signal which distorts the tube's performance when amplifying a television signal... | 03/19/1985 |
| 4485349 | Stabilized microwave power amplifier system A power amplifier including a klystron is stabilized against variations in output power with a simplified servo-loop system and cooperating temperature compensation. The system is fully solid-state, digital, and includes an operator-presettable initial po... | 11/27/1984 |
| 4480210 | Gridded electron power tube An efficient relatively high-power inductive output linear electron beam tube with broad-band capabilities is disclosed which is density modulated with a grid applying to the beam an RF modulating signal. The grid has a large active area which may be of t... | 10/30/1984 |
