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Attorney: Scheinberg; Michael O.


Number of patents: 182
Last date: May 22, 2012

1          
NumberTitleIssue Date
8183547Dual beam system
A dual beam system provides for operation of a focused ion beam in the presence of a magnetic field from an ultra-high resolution electron lens. The ion beam is deflected to compensate for the presence of the magnetic field. ...
05/22/2012
8182328Method of lottery wagering on real-world events
A method for lottery wagering on real-world events. One method according to an embodiment of the present invention includes selecting a set of variables, each variable representing a time-varying value capable of having a fixed value at a specified time. For each va...
05/22/2012
D659394Personal item organizer
05/15/2012
8170832Measurement and endpointing of sample thickness
A method for Transmission Electron Microscopy (TEM) sample creation. The use of a Scanning Electron Microscope (SEM)—Scanning Transmission Electron Microscope (STEM) detector in the dual-beam focused ion beam (FIB)/SEM allows a sample to be thinned using the FIB, ...
05/01/2012
8170255Enclosure for acoustic insulation of an apparatus contained within said enclosure
An enclosure with a substantial rectangular configuration, adapted to contain an apparatus sensitive to acoustic vibrations, the enclosure comprising walls and acoustic damping material located within the wall, wherein the acoustic damping material comprises at leas...
05/01/2012
8168961Charged particle beam masking for laser ablation micromachining
An improved method for substrate micromachining. Preferred embodiments of the present invention provide improved methods for the utilization of charged particle beam masking and laser ablation. A combination of the advantages of charged particle beam mask fabricatio...
05/01/2012
8168957Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source. ...
05/01/2012
8168948Method of machining a work piece with a focused particle beam
The invention relates to a method for producing high-quality samples for e.g. TEM inspection. When thinning samples with e.g. a Focused Ion Beam apparatus (FIB), the sample often oxidizes when taken from the FIB due to the exposure to air. This results in low-qualit...
05/01/2012
8164059In-chamber electron detector
A secondary particle detector 302 for a charged particle beam system 300 includes a scintillator 304 and a transducer 312, such as a photomultiplier tube, positioned within a vacuum chamber 107. Unlike prior art Everhart-Thornley d...
04/24/2012
8163641System for modifying small structures
A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged part...
04/24/2012
8163145Method and apparatus for controlling topographical variation on a milled cross-section of a structure
An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical v...
04/24/2012
D657474Sample carrier
04/10/2012
8134124Method for creating S/tem sample and sample structure
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
03/13/2012
8124942Plasma igniter for an inductively coupled plasma ion source
A focused ion beam (FIB) system is disclosed, comprising an inductively coupled plasma ion source, an insulating plasma chamber containing the plasma, a conducting source biasing electrode in contact with the plasma and biased to a high voltage to control the ion be...
02/28/2012
8119985Methods and apparatus for statistical characterization of nano-particles
A method and apparatus for determining statistical characteristics of nano-particles includes distributing the nano-particles over a surface and then determining properties of the nano-particles by automatic measurement of multiple particles or by a measurement that...
02/21/2012
8101928Deflection signal compensation for charged particle beam
Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirect...
01/24/2012
8097308Protective layer for charged particle beam processing
A protective layer is applied to a work piece to protect the surface during charged particle beam processing by directing a fluid toward the surface. The surface is preferably not touched by the applicator. Ink jet print-type print heads are suitable applicators. In...
01/17/2012
8095231Graphical automated machine control and metrology
A graphical programming system allows a user to place geometric shapes onto a scaled image, the shape having associated behavior that operates on the image or on the object of which the image is formed. In a preferred embodiment, the shapes are objects in the Visio ...
01/10/2012
8093558Environmental cell for a particle-optical apparatus
The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The envi...
01/10/2012
8087379Localized plasma processing
A method of localized plasma processing improves processing speed and reduces work piece damage compared to charged particle beam deposition and etching. In one embodiment, a plasma jet exits a plasma generating chamber and activates a reactive gas. A jet of plasma ...
01/03/2012
8080791X-ray detector for electron microscope
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large ...
12/20/2011
8076650Multi-source plasma focused ion beam system
The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an induct...
12/13/2011
8071954Hybrid phase plate
The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase pla...
12/06/2011
8065762Hammock arch
A hammock support is provided that includes an arched structure supported by tripod leg supports. The arched support is preferably a truss structure that provides multiple attachment points to support a hammock bed for varying the types, lengths, and heights of hamm...
11/29/2011
8059918High accuracy beam placement for local area navigation
An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing. This invention demonstrates a method where high accuracy navigation to the site of interest within a relatively large local area (e.g. an a...
11/15/2011
8053725Beam quality in FIB systems
Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within a...
11/08/2011
8032463Method and apparatus for increasing charitable donations by providing instantaneous donor recognition
Charitable donations are increased by automatically providing immediate on-line recognition of on-line donors. A list of donors is maintained on a Web page acknowledging the on-line contributions. Donor names on the list can be links to additional information about ...
10/04/2011
8013311Dual beam system
A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not...
09/06/2011
8011259Sample carrier comprising a deformable strip of material folded back upon itself and sample holder
The invention relates to a composite structure of a sample carrier 20 and a sample holder 30 for use in a TEM, for example. The sample carrier is hereby separately embodied from the sample holder. Although such compositions are already known, the known...
09/06/2011
8005875Automatic data transmission in response to content of electronic forms satisfying criteria
Automatic transmission of information is generated when the content of a posted electronic form matches a predefined criteria. An interface allows the user to create a criterion template to specify the match criterion without requiring the user to have the skills of...
08/23/2011
7999225Charged particle source with integrated energy filter
The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 103 eccentrically through a lens 107. As a result of this, energy dispersion will occur in an im...
08/16/2011
7989778Charged-particle optical system with dual loading options
A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has ...
08/02/2011
7987072Defect analyzer
The present invention provides methods, devices, and systems for analyzing defects in an object such as a semiconductor wafer. In one embodiment, it provides a method of characterizing defects in semiconductor wafers during fabrication in a semiconductor fabrication...
07/26/2011
7979217Method and system for spectroscopic data analysis
A method of analyzing spectroscopic data, the method comprising collecting spatially resolved measurement spectroscopic data of a sample for a series of measurements spots, assigning the measurement spots into a predefined set of spectral categories, based on charac...
07/12/2011
7977631Method for obtaining images from slices of specimen
The invention relates to a method for obtaining images from slices of a specimen, the method comprising: repeatedly obtaining an image of the surface layer of the specimen (1) and removing the surface layer of the specimen, thereby bringing the n...
07/12/2011
D638244Drinking straw with retaining extensions
05/24/2011
7917349Combined hardware and software instrument simulator for use as a teaching aid
An improved simulator for an analytical instrument that provides the student with an experience similar to that of operating the actual instrument. In one preferred embodiment, the invention combines real functionality and simulated functionality where at least one ...
03/29/2011
7915584TEM with aberration corrector and phase plate
The invention relates to a TEM with a corrector (330) to improve the image quality and a phase plate (340) to improve contrast. The improved TEM comprises a correction system completely placed between the objective lens and the phase plate, and uses th...
03/29/2011
7906762Compact scanning electron microscope
A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly ...
03/15/2011
7888655Transfer mechanism for transferring a specimen
The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder (40) to a second position in a second holder (10) and/or vice versa, each holder (10, 40) equipped to detachably hold th...
02/15/2011
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