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| Number | Title | Issue Date |
| 7529595 | Method of controlling substrate processing apparatus and substrate processing apparatus It is an object of the present invention to realize, in a coating and developing apparatus including an inspection section, reduction in the startup time, cost reduction, and an improved operating rate of the inspection section. In the present invention, a co... | 05/05/2009 |
| 7528347 | Cooling device and heat treating device using the same A heat treating device (50) has a cooling sleeve that covers a treating vessel (56) and a heater (100). The cooling sleeve has a cylindrical base member (110) and a cooling pipe (112) spirally wound on the outer peripheral surface ... | 05/05/2009 |
| 7527547 | Wafer processing method A method of processing a wafer having a device area in which a plurality of devise are formed and a peripheral excess area surrounding the device area on the front surface, comprising an annular groove forming step for forming an annular groove having a predetermine... | 05/05/2009 |
| D591924 | Arm for wafer transportation for manufacturing semiconductor wafers | 05/05/2009 |
| 7522060 | Graduated sanction/progressive response system and method for automated monitoring, scheduling and notification An integrated, multi-function management system and method that allows criminal justice professionals and criminal justice agencies to enhance the efficiency and quality of their operations. The method includes a unique framework of one or more agency customized pro... | 04/21/2009 |
| 7521339 | GaN single crystal substrate and method of making the same The method of making a GaN single crystal substrate comprises a mask layer forming step of forming on a GaAs substrate 2 a mask layer 8 having a plurality of opening windows 10 disposed separate from each other; and an epitaxial layer growing st... | 04/21/2009 |
| 7521337 | Wafer laser processing method A wafer laser processing method for forming a deteriorated layer along streets in the inside of a wafer having streets formed in a lattice pattern on the front surface, the method comprising: an undulation area deteriorated layer forming step for applying a laser be... | 04/21/2009 |
| 7521098 | Method of processing an organic-film A processing method according to the present invention coats a polar liquid film or forms an inorganic film on a surface of an organic film formed on a substrate as a protective film. The processing method comprises a modifying step of curing an organic film by irra... | 04/21/2009 |
| 7520937 | Thin film forming apparatus and method of cleaning the same The present invention relates to a technique for cleaning a thin film forming apparatus. In a typical embodiment, deposits originating from process gases for forming a thin film and deposited on the inner surface of a reaction tube are removed by etching by supplyin... | 04/21/2009 |
| 7520247 | Animal food and treat dispenser A manually operated dog treat dispensing machine capable of dispensing dog treats one at a time, the dispenser having a rectangular housing with a hinged housing door and hinged capital that serves as a food supply reservoir which is gravity fed into a spring loaded... | 04/21/2009 |
| 7517468 | Etching method The present invention is a method of etching a lower layer film (64) of an organic material formed on a surface layer (61) of a substrate, using an upper layer film (63) of an Si-containing organic material as a mask. A mixed gas containing an N... | 04/14/2009 |
| 7514120 | Precoat film forming method The precoat film forming method of a film forming device having a loading table for loading the object, includes a deposition step of feeding processing gas inside the film forming device and depositing a precoat TiN film on the surface of the loading table and a st... | 04/07/2009 |
| 7514062 | Process for the production of furnace black Process for the production of furnace black by producing a stream of hot combustion gases in a combustion chamber, feeding the hot combustion gases along a flow axis from the combustion chamber through a reactor narrow point into a reaction zone, mixing carbon black... | 04/07/2009 |
| 7512369 | Fixing device A fixing device 6 according to the present invention has an endless-shaped heating belt 8, a first and a second roller 9 and 10 for stretching the heating belt 8, and a pressure roller 11 for nipping paper 2, together... | 03/31/2009 |
| 7510884 | Semiconductor production system and semiconductor production process A semiconductor manufacturing apparatus according to the present invention comprises: a treating unit that treats a substrate to manufacture thereon a semiconductor device; a fluid supplying channel for supplying a fluid required for a treatment of the substrate to ... | 03/31/2009 |
| 7508518 | Particle measuring method and particle measuring apparatus The present invention relates to a particle measuring method for irradiating light to a surface of a substrate to scatter the light so as to measure a condition of particles on the substrate based on the scattered light. The particle measuring method according to th... | 03/24/2009 |
| 7508049 | Semiconductor optical device A semiconductor optical device comprises a first conductive type III-V compound semiconductor layer, a second conductive type III-V compound semiconductor layer, and an active region. The first conductive type III-V compound semiconductor layer is provided on a subs... | 03/24/2009 |
| 7507639 | Wafer dividing method A method of dividing a wafer having devices formed in a plurality of areas sectioned by a plurality of dividing lines, into individual chips along the dividing lines, comprising a deteriorated layer forming step for forming a deteriorated layer by applying a laser b... | 03/24/2009 |
| 7505729 | Cleaning apparatus and electrophotographic image forming apparatus provided therewith A cleaning apparatus 30 is provided with a cleaning roller 33 that is a rotating member, a scraper 35, a partition wall 36, opening/closing members 37, and a discharge screw 38 that is a discharging member. The scraper 35... | 03/17/2009 |
| 7505169 | Image forming apparatus having writing space mode An image forming apparatus in which there can be set a writing space mode in which document images in a preset number are printed on a half of a single paper sheet, thus forming a writing space on the other half of the paper sheet. This image forming apparatus is ar... | 03/17/2009 |
