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Attorney: Pillsbury, Winthrop, Shan Pittman, LLP


Number of patents: 1
Last date: January 27, 2009

NumberTitleIssue Date
7481888Heat treatment jig and heat treatment method for silicon wafer
In this heat treatment jig and method for silicon wafers, a silicon wafer is heat-treated while being mounted on support projections provided on three support arms, having an intervening spacing, protruding from a support frame towards the center. At that time, all ...
01/27/2009
 
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