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| Number | Title | Issue Date |
| 7109083 | Flash memory device and a fabrication process thereof, method of forming a dielectric film A fabrication process of a flash memory device includes microwave excitation of high-density plasma in a mixed gas of Kr and an oxidizing gas or a nitriding gas. The resultant atomic state oxygen O* or hydrogen nitride radicals NH* are used for nitridation or oxidat... | 09/19/2006 |
| 7248404 | Microscope The invention provides a microscope having high utilization efficiency of light from a light source and capable of using a bright, uniform line illumination. The microscope includes a plurality of light sources; a collimator lens that substantially collimates light ... | 07/24/2007 |
