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Attorney: Paul; David J.


Number of patents: 97
Last date: July 10, 2007

1      
NumberTitleIssue Date
7242057Vertical transistor structures having vertical-surrounding-gates with self-aligned features
The present inventions include a vertical transistor formed by defining a channel length of the vertical-surrounding-gate field effect transistor with self-aligning features. The method provides process steps to define the transistor channel length and recess silico...
07/10/2007
7170174Contact structure and contact liner process
A contact structure and a method of forming thereof for semiconductor devices or assemblies are described. The method provides process steps to create a contact structure encompassed by a sacrificial contact medium having an opening therein that is lined with a cond...
01/30/2007
7109113Solid source precursor delivery system
A solid source precursor material is delivered to a deposition chamber in vaporized form by utilizing a solid source precursor delivery system having either single or multiple stations(s) having a collection/delivery reservoir that is an intermediate stage between a...
09/19/2006
7101747Dual work function metal gates and methods of forming
Complementary transistors and methods of forming the complementary transistors on a semiconductor assembly are described. The transistors can be formed from a metal silicon compound deficient of silicon bonding atoms on a dielectric material overlying a semiconducto...
09/05/2006
7091087Optimized flash memory cell
A flash memory comprising floating gate devices being connected to one-another through their source electrodes being self-aligned to their respective gate electrodes, a local tungsten interconnect making a substantially continuous connection to the sources. The flas...
08/15/2006
7049206Device isolation for semiconductor devices
Exemplary embodiments of the present invention disclose a semiconductor assembly having at least one isolation structure formed. The semiconductor assembly comprises: a first trench in a semiconductive substrate; a second trench extending the overall trench depth in...
05/23/2006
7012024Methods of forming a transistor with an integrated metal silicide gate electrode
Methods of forming a transistor having integrated metal silicide transistor gate electrode on a semiconductor assembly are described. The transistor gate is partially fabricated by reacting the metal with epitaxial silicon while residing in a trench to form metal si...
03/14/2006
6982894Three-dimensional magnetic memory array with a minimal number of access conductors therein and methods thereof
A structure and method for forming a magnetic memory having a number N of levels of magnetic memory cells by forming a plurality of levels of magnetic memory cells, each level including at least one magnetic memory core structure having first and second surfaces, fo...
01/03/2006
6974774Methods of forming a contact opening in a semiconductor assembly using a disposable hard mask
Methods to form contact openings and allow the formation of self-aligned contacts for use in the manufacture of semiconductor devices are described. During formation of a multi-layered resist, a hard mask material is introduced beneath an anti-reflective coating to ...
12/13/2005
6924969Silicon nanocrystal capacitor and process for forming same
A storage capacitor plate for a semiconductor assembly having a substantially continuous porous conductive storage plate comprising silicon nanocrystals residing along a surface of a conductive material and along a surface of a coplanar insulative material adjacent ...
08/02/2005
6448133Method to form a DRAM capacitor using low temperature reoxidation
An embodiment of the present invention teaches a capacitor dielectric in a wafer cluster tool for semiconductor device fabrication formed by a method by the steps of: forming nitride adjacent a layer by rapid thermal nitridation; and subjecting the nitrid...
09/10/2002
5591680Formation methods of opaque or translucent films
The present invention develops an opaque or translucent glass film for use in semiconductor fabrication processes, such as in EPROMs or radio frequency integrated circuits. The opaque or translucent film is developed by forming an glass layer while and in...
01/07/1997
5504831System for compensating against wafer edge heat loss in rapid thermal processing
A method for compensating against wafer edge heat loss during rapid thermal processing includes a semiconductor wafer that is exposed to uniform radiant energy across the entire wafer surface. The wafer is exposed by projecting a radiant energy image onto...
04/02/1996
5492597Method of etching WSix films
The present invention teaches a method for etching a tungsten silicide (WSix) film overlying a polysilicon film in an enclosed chamber during a semiconductor fabrication process, by the steps of: providing a patterned mask overlying the WSi
02/20/1996
5474955Method for optimizing thermal budgets in fabricating semconductors
The present invention teaches a method for fabricating semiconductors. The method initially comprises the step of forming a conformal layer superjacent at least two conductive layers. The conformal layer preferably comprises tetraethylorthosilicate ("TEOS...
12/12/1995
5453396Sub-micron diffusion area isolation with SI-SEG for a DRAM array
The present invention is a process for forming diffusion areas and field isolation regions on a silicon substrate, by the steps of: growing a field oxide layer on the surface of the substrate; forming a mask pattern which exposes a plurality of spaced-apa...
09/26/1995
5444408Active pull-up voltage spike reducer
An embodiment of the present invention provides a method to reduce a regulated power source voltage spike during operation of a dynamic random access memory by the steps of: providing a voltage spike reducer enabling pulse via a pulse generator circuit re...
08/22/1995
5425392Method DRAM polycide rowline formation
The present invention teaches a method for reducing sheet resistance in the fabrication of semiconductor wafers. A silicon substrate having a gate oxide layer thereon is provided in a chamber. Subsequently, a polysilicon layer is formed superjacent the ga...
06/20/1995
5418180Process for fabricating storage capacitor structures using CVD tin on hemispherical grain silicon
An embodiment of the present invention depicts a storage capacitor comprising: a bottom plate structure having a hemispherical grain silicon surface; a titanium nitride layer adjacent and coextensive the hemispherical grain silicon; an insulating layer ad...
05/23/1995
5407534Method to prepare hemi-spherical grain (HSG) silicon using a fluorine based gas mixture and high vacuum anneal
The present invention develops a process for forming hemi-spherical grained silicon storage capacitor plates by the steps of: forming a silicon layer over a pair of neighboring parallel conductive lines, the silicon layer making contact to an underlying c...
04/18/1995
5406263Anti-theft method for detecting the unauthorized opening of containers and baggage
A simple trip-wire or magnetic circuit associated with a shipping container monitors continuity, which is detected electrically. Simply, if continuity is disabled by a forced entry of the container, electrical detection means, such as a radio-frequency-id...
04/11/1995
5384284Method to form a low resistant bond pad interconnect
The present invention develops a bond pad interconnect in an integrated circuit device, by forming an aluminum pad; bonding a metal layer (such as copper (Cu), nickel (Ni), tungsten (W), gold (Au), silver (Ag) or platinum (Pt)) or a metal alloy (such as t...
01/24/1995
5376577Method of forming a low resistive current path between a buried contact and a diffusion region
The present invention is a Static Random Access Memory fabrication process for forming a buried contact, by the steps of: patterning a photoresist layer over the field silicon dioxide regions and the spaced apart areas of the substrate, thereby providing ...
12/27/1994
5371701Stacked delta cell capacitor
A stacked delta cell (SDC) capacitor using a modified stacked capacitor storage cell fabrication process. The SDC is made up of polysilicon structure, having an inverted deltoid cross section, located at a buried contact and extending to an adjacent stora...
12/06/1994
5364814Germanium implanted stacked capacitor cell
A method of fabricating a stacked capacitor memory cell having a reduced leakage storage node includes the steps of providing a P-type substrate, forming wordlines on a thin gate oxide layer and a field oxide layer, and forming a first conformal TEOS oxid...
11/15/1994
5362632Barrier process for Ta2 O5 capacitor
The method of the present invention introduces a fabrication method for forming a storage capacitor on a supporting silicon substrate of a semiconductor device, by the steps of: forming a bottom capacitor electrode comprising conductively doped polysilico...
11/08/1994
5361002Voltage compensating CMOS input buffer
The CMOS voltage compensating input buffer circuit of the present invention provides a means to stabilize input level trip points and is comprised of a voltage compensating circuit having an input node and an output drive node coupled to an input buffer. ...
11/01/1994
5361003Adjustable buffer driver
The basic concept of the present invention comprises converting a standard buffer circuit into an adjustable buffer circuit that will in effect reduce the operating speed and power consumption of the IC in which it is constructed. An adjustable buffer cir...
11/01/1994
5354705Technique to fabricate a container structure with rough inner and outer surfaces
The present invention provides a method for forming conductive container structures on a supporting substrate of a semiconductor device, by: forming an insulating layer over parallel conductive lines and existing material on the surface of the supporting ...
10/11/1994
5346587Planarization of a gate electrode for improved gate patterning over non-planar active area isolation
The present invention is a process for providing a planarized transistor gate on a non-planar starting substrate, by depositing a layer of planarized conductive polysilicon material overlying neighboring field oxide isolation regions such that the height ...
09/13/1994
5346836Process for forming low resistance contacts between silicide areas and upper level polysilicon interconnects
A process for forming low resistance contacts between silicide areas and upper level polysilicon interconnect layers including a specific doping technique that provides solid low resistance contacts between a lower level of a silicided area and an upper l...
09/13/1994
5340765Method for forming enhanced capacitance stacked capacitor structures using hemi-spherical grain polysilicon
The present invention develops a container capacitor by forming a conductively doped polysilicon plug between a pair of neighboring parallel conductive word lines; forming a planarized tetra-ethyl-ortho-silicate (TEOS) insulating layer over the parallel c...
08/23/1994
5340763Multi-pin stacked capacitor utilizing micro villus patterning in a container cell and method to fabricate same
The present invention provides production repeatable process to form polysilicon storage node structures using MVP technology. The storage node is formed over word lines beginning with a deposition and planarization of an insulator or composite insulator....
08/23/1994
5336908Input EDS protection circuit
The input ESD protection circuit of the present invention uses a series n+ active area resistor placed in an n-well placed in series with shunt transistor all of which are in parallel with an SCR shunt to ground circuit, thereby providing greater than +/-...
08/09/1994
5334862Thin film transistor (TFT) loads formed in recessed plugs
The invention is directed to a thin film transistor (TFT) fabricated by using a recessed planarized poly plug as the bottom gate and a recessed planarized poly plug for the TFT drain connecting region. The TFT of the present invention can be used in any i...
08/02/1994
5324681Method of making a 3-dimensional programmable antifuse for integrated circuits
The invention is directed to a concept to use a 3-dimensional DRAM capacitor as a one-time non-volatile programming element (programmable antifuse) to make redundancy repair and/or to select other options on a DRAM. The programmable element of the present...
06/28/1994
5323150Method for reducing conductive and convective heat loss from the battery in an RFID tag or other battery-powered devices
The present invention introduces a method of reducing conductive and convective heat loss from the battery unit in battery-powered devices, such as RFID tag devices. Battery heat loss prevention is accomplished by suspending the battery in a vacuum or wit...
06/21/1994
5321649Stacked delta cell capacitor
A stacked delta cell (SDC) capacitor using a modified stacked capacitor storage cell fabrication process. The SDC is made up of polysilicon structure, having an inverted deltoid cross section, located at a buried contact and extending to an adjacent stora...
06/14/1994
5321648Stacked V-cell capacitor using a disposable outer digit line spacer
A stacked v-cell (SVC) capacitor using a modified stacked capacitor storage cell fabrication process. The SVC capacitor is made up of polysilicon structure, having a v-shaped cross-section, located at a buried contact and extending to an adjacent storage ...
06/14/1994
5304506On chip decoupling capacitor
The present invention discloses an on chip decoupling capacitor structure having a first decoupling capacitor with one electrode formed in the conductively doped silicon substrate and a second electrode made of conductively doped polysilicon. The second e...
04/19/1994
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