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| Number | Title | Issue Date |
| 7740815 | Method of treating a gas stream A method of treating a gas stream containing silane or other silicon-containing gas is described, in which the gas stream is conveyed to a liquid ring pump or screw-mechanism pump, to which are also supplied an oxidant for oxidising the silicon-containing gas within... | 06/22/2010 |
| 7685674 | Exhaust gas treatment An attachment (10) for an inlet pipe (14) to a wet scrubber or other device comprises a sleeve (16) having an open end (18) adapted to be detachably connected to a flanged end (12) of the inlet pipe (14). A shaft (30)... | 03/30/2010 |
| 7541061 | Vacuum chamber load lock structure and article transport mechanism A vacuum chamber used for processing articles, such as integrated circuit wafers, display panels, and the like, has a small load lock chamber formed at an opening in a wall of the chamber by a moveable article supporting surface within the chamber and a cover outsid... | 06/02/2009 |
| 7494633 | Gas abatement Apparatus is described for treating an effluent fluid stream from a semiconductor manufacturing process tool. The apparatus comprises a combustion chamber, means for heating the combustion chamber, and a nozzle for injecting the effluent stream into the combustion c... | 02/24/2009 |
| 7470413 | Fluorine removal by ion exchange A method for removing fluorine gas from a selected environment comprises contacting the fluorine gas with water to generate a solution of hydrofluoric acid and contacting the solution of hydrofluoric acid with an ion exchange resin having an active state operative t... | 12/30/2008 |
| 7404698 | Turbomolecular pump with static charge control The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Ele... | 07/29/2008 |
| 7398127 | Systems and methods for facilitating wireless communication between various components of a distributed system The present invention provides systems and methods for facilitating communications between various components of distributed system. Specifically, the systems and methods of the present invention provide a wireless network for linking the various components of manuf... | 07/08/2008 |
| 7392825 | Arrangement for tool equipment An arrangement comprising ancillary equipment mounted to a semiconductor processing tool and service center remote from the semiconductor processing tool minimizing the local space requirements and facilitates easy access for repair. ... | 07/01/2008 |
| 7278831 | Apparatus and method for control, pumping and abatement for vacuum process chambers The present invention is an apparatus and method for controlling pressure, pumping a vacuum and providing abatement for a plurality of vacuum processing chambers. The system may be used in semiconductor manufacture. Multiple vacuum processing chambers are exhausted ... | 10/09/2007 |
| 7276160 | Method and apparatus for metal removal by ion exchange The present invention provides a method for selectively removing metal ions of interest from a solution (12), such as the wastewater from a chemical mechanical polishing process. The method comprises contacting a solution (12) containing solid particle... | 10/02/2007 |
| 7198455 | Vacuum pumping arrangement In a pumping arrangement for a chamber, a regenerative pumping mechanism comprises a rotor and a stator having an annular channel within which rotor blades rotate to urge fluid along the channel. The channel has a stripper, a channel inlet positioned adjacent one en... | 04/03/2007 |
| 7175383 | Regenerative fluid pump and stator for the same A regenerative fluid pump (10) comprises a rotor having rotor blades for compressing fluid on two fluid flow paths, the first of which extends between a first pump inlet (12a) and a first pump outlet (14a), and a second of which ex... | 02/13/2007 |
| 7165458 | Vacuum gauge A thermal conductivity type pressure gauge comprises a gauge head (2) being rotatably mountable in a vessel whose environmental pressure is to be measured and an elongate electrical filament (6) mounted in the gauge head, the gauge head (2) havi... | 01/23/2007 |
| 7140847 | Integrated high vacuum pumping system The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-... | 11/28/2006 |
| 7140833 | Integrated turbo/drag/regenerative pump with counter-rotating turbo blades The present invention relates to vacuum pumps and a method for creating and maintaining a high vacuum. A vacuum pump includes a regenerative section and a turbo-molecular section. A common first rotor carries forward-rotating elements of both the regenerative sectio... | 11/28/2006 |
| 7137274 | System for liquefying or freezing xenon Apparatus for producing liquid or solid xenon comprises a duct 12 having an inlet 14 for receiving gaseous xenon and an outlet 16 for outputting gaseous xenon at a reduced temperature to a nozzle located in a vacuum chamber 60. A housing ... | 11/21/2006 |
| 7097713 | Method for removing a composite coating containing tantalum deposition and arc sprayed aluminum from ceramic substrates A method for removing a metallic layer from the surface of a ceramic substrate, the method including the steps of immersing the metallic coated ceramic substrate in a solution of up to 31% hydrochloric acid for a sufficient time to at least substantially dissolve or... | 08/29/2006 |
| 6977049 | Treatment process for industrial waste stream A process for treating an industrial waste stream containing a borane compound including contacting the industrial waste stream with a resin carrying an oxidation catalyst that is capable of oxidizing the borane compound to boric acid. ... | 12/20/2005 |
| 6955707 | Method of recycling fluorine using an adsorption purification process A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine sourc... | 10/18/2005 |
| 6946838 | NMR measuring system An improvement in a magnetic resonance method for determining at least one property of multiple samples, including introducing multiple samples into the interrogation zone simultaneously; applying a gradient magnetic field to the interrogation zone wherein different... | 09/20/2005 |
