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Attorney: McDermott Will Emery


Number of patents: 1
Last date: May 06, 2008

NumberTitleIssue Date
7369905Method and apparatus for pressure and plasma control during transitions used to create graded interfaces by multi-step PECVD deposition
A method and apparatus are provided for a graded PECVD process that continuously modulates a set of flow and pressure conditions while the plasma power is turned on and a film is being deposited. A feedback mechanism specific to a give deposition recipe is used to g...
05/06/2008
 
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