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| Number | Title | Issue Date |
| 4602359 | Method for determining variations from flatness in the topography of a disc surface A method is provided for determining the magnitude of flatness deviation in high density information discs, such as video discs, manifesting irregularities in playback. Such flatness deviations are known as "orange-peel." A stylus riding over a relatively... | 07/22/1986 |
| 4579454 | Optical profilometer for steep surface contours with significant surface tilt An optical profilometer for surface contours subject to tilt is optically scanned to measure the surface contours. Surface tilt effects are obviated by slitted apertures in the paths of the reflection beams to pass the beams with large surface tilts (on t... | 04/01/1986 |
| 4575636 | Deep ultraviolet (DUV) flood exposure system Apparatus for flood exposing deep ultraviolet (DUV) photoresist material from a xenon lamp source providing pulsed radiation in the DUV range formed into an annular beam by a paraboloid reflector. The radiation beam is substantially collimated with a pref... | 03/11/1986 |
| 4567431 | Method for revealing semiconductor surface damage using surface photovoltage (SPV) measurements The presence of crystallographic damage in a semiconductor surface region is determined by surface photovoltage (SPV) measurements. Deviations from the idealized straight line SPV plot of photon flux (Io) versus reciprocal absorption coefficien... | 01/28/1986 |
| 4560879 | Method and apparatus for implantation of doubly-charged ions An ion implantation apparatus and method are disclosed for reducing contamination of doubly-charged ions by singly-charged ions. A liner, with a grooved or smooth surface, formed of beryllium or graphite reduces secondary electron scattering into the ion ... | 12/24/1985 |
| 4560853 | Positioning and bonding a diamond to a stylus shank A method for positioning a diamond stone in an indented shank is described. A wetting agent put in contact with a diamond draws it upwardly into the indentation in the shank. A brazing material is added to the wetting agent to be drawn into the interface ... | 12/24/1985 |
| 4560274 | Optical alignment for workpiece A method and apparatus for aligning a surface of a pyramidal-shaped workpiece (such as a stylus) with respect to a positioning ring attached to a holder supporting the workpiece. One surface of the workpiece (electrode of the stylus) is exposed to an inci... | 12/24/1985 |
| 4547648 | Apparatus for mounting crystal A thickness monitor useful in deposition or etching reactor systems comprising a crystal-controlled oscillator in which the crystal is deposited or etched to change the frequency of the oscillator. The crystal rests within a thermally conductive metallic ... | 10/15/1985 |
| 4543130 | Megasonic cleaning apparatus and method Cleaning apparatus for cleaning semiconductor wafers and the like in a chamber of cleaning fluid vibrating at ultrasonic (megasonic) frequencies utilizing an electrically energized transducer, such as a piezoelectric crystal, mounted on a conductive foil ... | 09/24/1985 |
| 4541716 | Detection of defects in a circular or spiral diffraction grating Topographical defect detecting apparatus and process for optically inspecting a circular or spiral track surface defining a diffraction grating such as exists on a video disc or optical disc record. Light from a substantially point source illuminates the ... | 09/17/1985 |
| 4526468 | Method for determining the phase of phase transformable light scattering material A method of determining the crystalline or structural quality of phase transformable material such as silicon uses light scattering. The material is exposed to a beam of light of a selected wavelength. Scattered light having an intensity above a threshold... | 07/02/1985 |
| 4523850 | System for positioning a body A system for positioning a body having two opposed edges and having a first axis oriented to pass through the two edges. A beam of light oriented along a second axis orthogonal to the first axis images one or both of the edges onto all or a portion of a p... | 06/18/1985 |
| 4520312 | Method for determining the integrity of passivant coverage over rectifying junctions in semiconductor devices A semiconductor device having a rectifying junction after passivation is exposed to a humid ambient while being tested for humidity-induced leakage currents indicative of passivant defects such as pinholes, cracks, etc. The amplitude of the reverse biased... | 05/28/1985 |
| 4511800 | Optical reflectance method for determining the surface roughness of materials in semiconductor processing This disclosure describes an optical reflectance method for rapid and simultaneous determination of surface roughness and structure of silicon films deposited by chemical vapor deposition. The magnitude of the reflectance of polycrystalline silicon films ... | 04/16/1985 |
| 4507334 | Surface preparation for determining diffusion length by the surface photovoltage method A method of treating the surface of a sample of n-type silicon material in preparation for measurements for determining the minority carrier diffusion length of the material by the surface photovoltage method comprises applying a strong oxidizing agent to... | 03/26/1985 |
| 4502225 | Mechanical scriber for semiconductor devices A mechanical scriber using a scribing tip, such as a diamond, provides controlled scriber forces with a spring-loaded compound lever arrangement. The scribing force and range of scribing depth are adjusted by a pair of adjustable micrometer heads. A semic... | 03/05/1985 |
| 4499853 | Distributor tube for CVD reactor An apparatus for chemically vapor-depositing silicon material on surfaces of a plurality of substrates arranged in a stack that is continuously rotating. A gas distributor formed of a pair of coaxially tubes, in fixed relation with the rotating substrates... | 02/19/1985 |
| 4498775 | Method for detecting distance deviations to a photoresist surface in an optical printer A device for monitoring gap deviations in an optical printer comprises a mask having a plurality of closely-spaced differently-sized apertures. Actinic light passing through the aperture to a photoresist surface develops a pattern of diffraction-induced i... | 02/12/1985 |
| 4498772 | Method to determine the crystalline properties of an interface of two materials by an optical technique Crystalline quality of a semiconductor material at its interface with an insulator is optically evaluated by a reflected light beam scanned in wavelength. The refractive index of the material at or near the interface is determined by calculation from the ... | 02/12/1985 |
| 4490945 | Stylus manufacturing apparatus and method A keel-tipped stylus for playback of video information from a disc record is formed on a lapping disc having a spiral signal track on the land between a spiral lapping groove. The respective pitches of the signal track and groove are different whereby the... | 01/01/1985 |
| 4490668 | Microwave radiator utilizing solar energy A space-oriented apparatus for converting solar energy to microwave energy. The microwave energy is used to generate an RF beam for propagation to the earth. The apparatus is formed into an extended planar sandwich-like structure carrying solar cells on o... | 12/25/1984 |
| 4481616 | Scanning capacitance microscope Variations in topography and material properties of the surface layer of a body are observed in microscopic imaging using a scanning capacitance probe. The acronym SCaM identifying the process and apparatus is derived from the phrase scanning capacitance ... | 11/06/1984 |
| 4457259 | Apparatus for spraying a liquid on a spinning surface A liquid spray apparatus provides predetermined, uniform quantity of liquid (such as photoresist developer) per unit area of surface by a parabolic cam mechanism, arranged to repeatedly reciprocate a nozzle at a predetermined varying linear velocity a plu... | 07/03/1984 |
| 4456879 | Method and apparatus for determining the doping profile in epitaxial layers of semiconductors An apparatus and method for determining the doping profile of an epitaxial layer of a semiconductor as a function of conductivity (or resistivity) vs. distance (depth) includes modifying a d.c. generated current by a focused laser beam modulated at high f... | 06/26/1984 |
| 4454472 | Method and apparatus for determining minority carrier diffusion length in semiconductors Method and apparatus are provided for determining the diffusion length of minority carriers in semiconductor material, particularly amorphous silicon which has a significantly small minority carrier diffusion length using the constant magnitude surface-ph... | 06/12/1984 |
| 4451507 | Automatic liquid dispensing apparatus for spinning surface of uniform thickness An automatic fluid dispensing apparatus for coating to a substantially uniform thickness a rotating surface, such as the surface of a semiconductor wafer, with a viscous liquid, such as a slurry of passivating glass. The wafer rotation rate is related to ... | 05/29/1984 |
| 4450787 | Glow discharge plasma deposition of thin films A glow discharge plasma reactor for deposition of thin films from a reactive RF glow discharge is provided with a screen positioned between the walls of the chamber and the cathode to confine the glow discharge region to within the region defined by the s... | 05/29/1984 |
| 4439855 | Capacitive playback stylus A playback stylus for a capacitive information disc comprising a shank, a dielectric material at one end of the shank, a first conical region of a first angle in an end portion of the dielectric material, a second conical region adjacent to the first coni... | 03/27/1984 |
| 4439854 | Video disc stylus A playback stylus comprising a dielectric support element having a conical end, two flats in the conical end, and a constricted terminal portion defined by side surfaces, shoulders interconnecting the side surfaces and the flats, a prow defined by a first... | 03/27/1984 |
| 4439853 | Capacitive playback stylus A capacitive information disc playback stylus comprising a dielectric support element having in one portion a conical body terminating in a constricted tip. The tip comprises a curved prow surface, a flat electrode surface remote from the prow, shoulders ... | 03/27/1984 |
| 4439245 | Electromagnetic radiation annealing of semiconductor material A beam of electromagnetic radiation such as a pulsed laser beam is used to anneal materials, such as semiconductor materials, without the formation of puddles. Puddles are caused by raising the temperature of the material to its melting temperature by a l... | 03/27/1984 |
| 4433288 | Method and apparatus for determining minority carrier diffusion length in semiconductors Method and apparatus are provided for determining the diffusion length of minority carriers in semiconductor material, particularly amorphous silicon, which has a significantly small minority carrier diffusion length using the constant magnitude surface-p... | 02/21/1984 |
| 4432641 | Visual defect inspection of masks An optical system and method for direct human eye visual inspection of specimens of photoresist coated masks for defects as small as 2 μm. The specimens are uniformly illuminated with a partially coherent sodium light that has very high illuminance and c... | 02/21/1984 |
| 4430149 | Chemical vapor deposition of epitaxial silicon A single chamber continuous chemical vapor deposition (CVD) reactor is described for depositing continuously on flat substrates, for example, epitaxial layers of semiconductor materials. The single chamber reactor is formed into three separate zones by ba... | 02/07/1984 |
| 4429047 | Method for determining oxygen content in semiconductor material The content of oxygen, if any, that is present in a body of essentially monocrystalline semiconductor material is determined by converting by heating all of the oxygen in the body to interstitial form. The oxygen content is measured by infrared beam evalu... | 01/31/1984 |
| 4428165 | Flip-flop grinding method A method for lapping two flats of substantially the same dimensions in an element having a cone-shaped tip. The method includes the steps of contacting a first region of the cone wherein a flat is to be lapped while the cone is in contact with the lapping... | 01/31/1984 |
| 4422763 | Automatic photomask alignment system for projection printing An automatic photomask alignment system for projection printing includes a monochromatic light source, such as a laser, a series of diffraction patterns which are located on a semiconductor wafer in locations where alignments are to be made, at least one ... | 12/27/1983 |
| 4418576 | Apparatus and method for automatically replenishing liquid and measuring the rate of evaporation of a liquid An evaporimeter formed of a capillary tube hydraulically coupled to a sheet of filter paper to form a capillary system establishing hydraulic continuity of liquid between the tube and the surface of the filter paper is automatically replenished with the l... | 12/06/1983 |
| 4418500 | Grinding apparatus An apparatus for grinding two flats of substantially the same dimensions in portions of a conical tip of an element. The apparatus comprises, in combination, a rotatably mounted holding member for holding the element; a rotatably mounted abrasive surface ... | 12/06/1983 |
| 4418407 | Video disc pickup stylus A playback stylus adapted for use in recovering information recorded in an information disc record which acts as a first conductive plate of a capacitor. The stylus includes a body of a first dielectric material having a first dielectric constant, a first... | 11/29/1983 |
