U.S. patents available from 1976 to present.
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Attorney: Jones Volentine, LLC


Number of patents: 126
Last date: August 23, 2011

1        
NumberTitleIssue Date
8003481Method for fabricating a capacitor
A method for forming an HSG (hemispherical grain) layer on a storage electrode of a capacitor formed on a substrate is provided. The method includes a step of introducing a source gas into a reacting chamber to deposit a small amount of HSG nuclei on a conductive la...
08/23/2011
6351285Motion correction device for moving images
A motion correction device for images recorded by a camcorder from incident light having an incident direction. The device comprises at least one of horizontal and vertical component pick-ups. Each component pick-up comprises a converter for converting li...
02/26/2002
6265261Semiconductor device and fabricating method therefor in which a netride layer in a capacitor is formed in a shortened time period
A method of fabricating a semiconductor device includes nitriding a native oxide layer on a pattern of polysilicon layers to be used as the lower electrode of a capacitor in LPCVD equipment at a constant temperature in an environment of ammonia gas. A nit...
07/24/2001
6252815First in first out memory circuit
A first-in, first-out memory circuit includes first and second memory part respectively having first and second address locations each of which has a first word length, a write address counter outputting a write address signal and a memory part selection ...
06/26/2001
6249839Color palette RAM and D/A converter
A color palette RAM 100 according to the present invention, which is provided with a RAM 101 for storing color information, an address register 102 that holds an input address and outputs an address to the RAM 101 and a comparator circuit 103 that compare...
06/19/2001
6244240Rotary positive-displacement scavenging device for rotary vane pumping machine
A rotary vane pumping machine includes a stator and rotor in relative rotation. The rotor has a plurality of radial vanes slots and each one of a corresponding plurality of vanes slides within a radial vane slot of the rotor. Each pair of adjacent vanes d...
06/12/2001
6242366Methods and apparatus for treating a semiconductor substrate
A liquid short-chain polymer of the general formula Ra Si(OH)b or (R)a SiHb (OH)c is deposited on a substrate, where a+b=4 or a+b+c=4, respectively, a, b and c are integers, R is a carbon-containing g...
06/05/2001
6242358Method for etching metal film containing aluminum and method for forming interconnection line of semiconductor device using the same
A method for etching a metal film containing aluminum, using a hard mask, and a method for forming a line of a semiconductor device using the same, are provided. A metal film containing Al is formed on a semiconductor substrate. A hard mask pattern is for...
06/05/2001
6240331Integrated management of semiconductor process data
A method for integrated management of semiconductor process data. The method is capable of easily accessing data generated in one semiconductor fabrication line, and commonly sharing and easily accessing data generated in a plurality of semiconductor fabr...
05/29/2001
6240036Voltage supply circuit in a semiconductor memory device
A voltage supply circuit supplies an operational voltage to plural sense amplifier arrays and includes a plurality of MOS transistors. Each transistor is located between a power supply and one sense amplifier array. A stable operational voltage is supplie...
05/29/2001
6239614Semiconductor integrated circuit device
The present invention comprises first unit cells each including PMOS transistors and NMOS transistors, each transistor having a first threshold voltage, second unit cells each including PMOS transistors and NMOS transistors, each transistor having a secon...
05/29/2001
6239404Plasma processing apparatus
Plasma processing apparatus frequently incorporates an antenna fed from a power supply and in this invention a power supply feeds a conventional matching circuit (10), which in turn is connected to the primary (11) of a transformer (12). The antenna (15) ...
05/29/2001
6236952System and method for automatically creating and transmitting test conditions of integrated circuit devices
Production information for ASIC (Application Specific Integrated Circuit) devices is stored in a database of a remote host system, and data necessary for a test program which controls testers for testing the IC devices are automatically created and transm...
05/22/2001
6236903Multiple reaction chamber system having wafer recognition system and method for processing wafer using same
A multiple reaction chamber system includes a transfer chamber, a load lock chamber connected to the transfer chamber, and a plurality of reaction chambers connected to the transfer chamber. An alignment chamber is connected to the transfer chamber, dispo...
05/22/2001
6235619Manufacturing method for reduced semiconductor memory device contact holes with minimal damage to device separation characteristics
A semiconductor device manufacturing method capable of coping with scale reduction of the semiconductor device and forming contact holes without deteriorating the device separation characteristics is provided. This method has the following steps. First, i...
05/22/2001
6234692Semiconductor device fabricating apparatus with a cover over the wafer surface
An apparatus for fabricating semiconductor devices includes a spin chuck configured for mounting a wafer thereon and operative to rotate the wafer. A nozzle is arranged above the spin chuck, through which a solution is supplied to a surface of the wafer m...
05/22/2001
6234214Method for handling semiconductor wafers in a clean room by wearing dust proof clothing
Dust proof clothing is made of a given fabric structure defined by multiple first fiber groups which are each composed of linear fibers and extend in a first direction, and multiple second fiber groups which are each composed of curved fibers and extend i...
05/22/2001
6233168Non-volatile semiconductor memory capable of reducing parasitic current
A non-volatile semiconductor memory decreases a parasitic current as much as possible without using an electric separation means. This nonvolatile semiconductor storage apparatus has multiple memory cells rows having multiple memory cell transistors M1, M...
05/15/2001
6232228Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the method
A method of manufacturing semiconductor devices is provided, including the formation of a conductive plug and the minimizing of the step-height of an interlayer dielectric layer. An etching composition is also provided for such a manufacturing method. The...
05/15/2001
6230244Memory device with read access controlled by code
Read access to a memory device is controlled by comparing an input control code with a predetermined code stored in the memory device. The comparison is performed inside the memory device, and read access is enabled or disabled according to the result. Th...
05/08/2001
6229118Wafer handling apparatus for transferring a wafer to and from a process chamber
A wafer handling apparatus prevents polymers from sticking to the handler which conveys a wafer into/from a process chamber in which the wafer is treated. The wafer handler has an arm which is rotatably driven and an effector integral with the arm. The wa...
05/08/2001
6228739Pre-treatment method performed on a semiconductor structure before forming hemi-spherical grains of capacitor storage node
A pre-treatment method for improving the growth of hemi-spherical grains (HSGs) on a semiconductor structure by removing etching residue before forming a capacitor storage node having the HSGs. The pre-treatment method includes dry-etching a material laye...
05/08/2001
6228737Method of manufacturing semiconductor device
A plurality of CVD silicon nitride film islands are formed on a lower electrode which is located over a semiconductor substrate. The plurality of CVD silicon nitride film islands are spaced apart from one another to define exposed regions of the lower ele...
05/08/2001
6226563Method for controlling unit process conditions of semiconductor fabricating equipment arranged in a processing line
A method for controlling equipment in a semiconductor fabrication system including automatically receiving operational state data from equipment in a semiconductor fabrication system and determining whether the operational state data corresponding to any ...
05/01/2001
6225932Color palette ram and D/A converter
A color palette RAM 100 according to the present invention, which is provided with a RAM 101 for storing color information, an address register 102 that holds an input address and outputs an address to the RAM 101 and a comparator circuit 103 that compare...
05/01/2001
6225694Semiconductor device
A semiconductor device according to the invention of the present application comprises a substrate having a surface on which interconnections are formed, a semiconductor element connected to the interconnections and mounted on the substrate, and a conduct...
05/01/2001
6223096Elevator system for transferring a wafer boat with automatic horizontal attitude control
An elevator system automatically adjusts the inclination of a wafer boat during the manufacturing of semiconductor devices so that the wafers in the boat are maintained horizontal during their processing. The elevator system includes the wafer boat, a bas...
04/24/2001
6222784Semiconductor memory
A semiconductor memory of wherein the delay of control signals for controlling sense amplifiers is efficiently controlled without extensively changing a currently-used fabricating process. A dummy bit line pair are arranged between desired bit line pairs ...
04/24/2001
6222208Light-emitting diode and light-emitting diode array
A light-emitting diode includes a first semiconductor epitaxial layer of a first conduction type, a second semiconductor epitaxial layer of the first conduction type laminated upon the first semiconductor epitaxial layer and having an energy band gap grea...
04/24/2001
6218725Bipolar transistors with isolation trenches to reduce collector resistance
A bipolar transistor and a method of fabricating the same are provided which are adapted to reduce chip size and production costs. To produce the transistor, a second conductive type well region is formed in a first conductive type semiconductor substrate...
04/17/2001
6216054Method for controlling preventative maintenance cycles of semiconductor fabricating equipment arranged in a processing line
A method for controlling preventative maintenance cycles in a semiconductor fabrication system includes automatically receiving, at a preventative maintenance module (PMM) in data communication with a host computer, operating parameter data from equipment...
04/10/2001
6214751Method for forming thin film in fabricating semiconductor device
A method of forming a thin film on a plurality of wafers stored in a wafer cassette does not require cleaning the reaction chamber(s) after each thin film formation step. The reaction chamber cleaning is performed after the thin film formation process is ...
04/10/2001
6214637Method of forming a photoresist pattern on a semiconductor substrate using an anti-reflective coating deposited using only a hydrocarbon based gas
A method of forming a photoresist pattern having a uniformly fine line width, and a method of manufacturing a semiconductor device using such a photoresist pattern as a mask, include the step of forming an anti-reflective coating (ARC) using only a hydroc...
04/10/2001
6212262Method of performing automatic sales transactions in an advertiser-sponsored telephony system
An advertiser-sponsored telephony system includes an automatic sales transaction option, whereby a telephony user may automatically purchase an advertised product without disconnecting from the advertiser-sponsored telephony system. After hearing a promot...
04/03/2001
6212106Multi-bit match detection circuit
Complementary read signals Bi, /Bi applied to bit line pair 1i, 2i are compared with complementary address signals Ai, /Ai in a comparison unit 10i. The result of the comparison is output to output lines 15i, 16...
04/03/2001
6211017Method of fabricating floating gate EEPROM
Upon opening a tunnel window of an EEPROM having a floating gate, a portion of a conductive layer which serves as a floating gate electrode is cut as an opening and side walls are formed on side portions of the opening. A gate insulating film is removed b...
04/03/2001
6211010Method of forming hemispherical grains on a surface comprising pre-cleaning the surface in-situ with plasma
A method of forming a hemispherical grain includes cleaning a polysilicon layer of a native oxide in-situ in the processing chamber of the HSG growth reactor. Such a native oxide adversely affects the growing of HSGs from seeds during the thermal treatmen...
04/03/2001
6209194Apparatus for loading and unloading semiconductor device packages using servo motors
An automatic loading and unloading apparatus using servo motors allows simultaneous loading and unloading of two or more semiconductor device packages into and from test devices. The loading and unloading apparatus has a feeding mechanism which has a feed...
04/03/2001
6207489Method for manufacturing capacitor of semiconductor memory device having tantalum oxide film
A method for manufacturing a capacitor having a dielectric film formed of a tantalum oxide film. The method includes forming a lower electrode that is electrically connected to an active region of a semiconductor substrate. A pre-treatment film including ...
03/27/2001
6207358Method of stripping a photoresist from a semiconductor substrate using dimethylacetamide or a combination of monoethanolamine and dimethylsulfoxide
In the fabrication of semiconductor devices, a method of forming a fine pattern on a semiconductor substrate includes the steps of exposing and developing a photoresist deposited on a film of a semiconductor substrate in order to remove selected portions ...
03/27/2001
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