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The Quarterly Review ; March edition, 1825
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| Number | Title | Issue Date |
| 8446032 | Hydroelectric power generator and related methods A hydroelectric power generator is capable of generating electrical power from a moving body of water. The power generator comprises a shell comprising a wall having interior and exterior surfaces, and an interior volume. A fixed gear is fixedly attached to the inte... | 05/21/2013 |
| 8439723 | Chemical mechanical polisher with heater and method A chemical mechanical apparatus comprises a polishing platen, a roller pad assembly capable of advancing a polishing pad across the platen, a substrate carrier to press a substrate against the polishing pad, and a heater to heat the substrate to a temperature suffic... | 05/14/2013 |
| 8414357 | Chemical mechanical polisher having movable slurry dispensers and method A chemical mechanical polisher comprises a polishing platen capable of supporting a polishing pad, and first and second substrate carriers that are each capable of holding a substrate against the polishing pad. First and second slurry dispensers, each comprise (i) a... | 04/09/2013 |
| 8382885 | Fluid filtration for substrate processing chamber A filter for filtering a fluid in a substrate processing apparatus comprises first and second stages that are connected to one another. A delivery system provides a vaporized liquid to the filter. The first stage of the filter comprises a basic compound, and the sec... | 02/26/2013 |
| 8343881 | Silicon dioxide layer deposited with BDEAS A silicon dioxide layer is deposited onto a substrate using a process gas comprising BDEAS and an oxygen-containing gas such as ozone. The silicon dioxide layer can be part of an etch-resistant stack that includes a resist layer. In another version, the silicon diox... | 01/01/2013 |
| 8338809 | Ultraviolet reflector with coolant gas holes and method A reflector for an ultraviolet lamp can be used in a substrate processing apparatus. The reflector comprises a centrally positioned longitudinal strip and first and second side reflectors to form a parabolic-type surface. The longitudinal strip and first and second ... | 12/25/2012 |
| 8329575 | Fabrication of through-silicon vias on silicon wafers A through-silicon via fabrication method includes etching a plurality of through holes in a silicon plate. An oxide liner is deposited on the surface of the silicon plate and on the sidewalls and bottom wall of the through holes. A metallic conductor is then deposit... | 12/11/2012 |
| 8293085 | Cartridge having textured membrane A cartridge for an ion exchanging electrochemical cell, the cartridge comprising at least one spiral wound, textured, bipolar ion exchange membrane having (i) an anion exchange layer abutting a cation exchange layer with continuous contact between the anion exchange... | 10/23/2012 |
| 8283237 | Fabrication of through-silicon vias on silicon wafers A through-silicon via fabrication method comprises forming a substrate by bonding the front surface of a silicon plate to a carrier using an adhesive layer therebetween to expose the back surface of the silicon plate. A silicon nitride passivation layer is deposited... | 10/09/2012 |
| 8279577 | Substrate support having fluid channel A support for a substrate processing chamber comprises a chuck having a substrate receiving surface, and a base comprising an upper wall comprising a recessed trench having (i) an attachment face at a first depth, and (ii) a fluid channel at a second depth. A lower ... | 10/02/2012 |
| 8252653 | Method of forming a non-volatile memory having a silicon nitride charge trap layer A flash memory device and methods of forming a flash memory device are provided. The flash memory device includes a doped silicon nitride layer having a dopant comprising carbon, boron or oxygen. The doped silicon nitride layer generates a higher number and higher c... | 08/28/2012 |
| 8226769 | Substrate support with electrostatic chuck having dual temperature zones An electrostatic chuck for receiving a substrate in a substrate processing chamber comprises a ceramic puck having a substrate receiving surface and an opposing backside surface with a plurality of spaced apart mesas. An electrode is embedded in the ceramic puck to ... | 07/24/2012 |
| 8216374 | Gas coupler for substrate processing chamber A gas coupler is capable of conducting gas between a gas component, gas source and substrate processing chamber. The gas coupler comprises a metal block comprising a gas component seating surface having a plurality of gas component coupling ports. The block also has... | 07/10/2012 |
| 8203791 | Image capturing unit and lens assembly A lens module array comprising a spacer plate comprising (i) first and second surfaces, and (ii) an array of lens barrels, each lens barrel comprising (1) a lens opening extending inward from the first surface of the spacer plate, and (2) a sensor cavity extending i... | 06/19/2012 |
| 8198671 | Modification of charge trap silicon nitride with oxygen plasma A flash memory device comprises a substrate comprising silicon with a silicon dioxide layer thereon. A silicon-oxygen-nitrogen layer is on the silicon dioxide layer, and the silicon-oxygen-nitrogen layer comprises a shaped concentration level profile of oxygen throu... | 06/12/2012 |
| 8198180 | Ion implanted substrate having capping layer and method In an ion implantation method, a substrate is placed in a process zone and ions are implanted into a region of the substrate to form an ion implanted region. A porous capping layer comprising dispersed gas pockets is deposited on the ion implanted region. ... | 06/12/2012 |
| 8187416 | Interior antenna for substrate processing chamber An antenna for coupling RF energy to a plasma in a process chamber having a wall comprises a coil having a face exposed to the plasma in the chamber. A plurality of standoffs support the coil at a set spacing from the wall of the process chamber, at least one stando... | 05/29/2012 |
| 8168322 | Thin film battery with protective packaging A battery comprises a substrate comprising a first surface comprising a first battery cell having a first non-contact surface, a pliable dielectric abutting the first non-contact surface, the pliable dielectric comprising a peripheral edge, and a first cap about the... | 05/01/2012 |
| 8134118 | Image capture unit and methods of fabricating a lens array block utilizing electrolysis Methods of forming a lens array block comprising a plurality of lens barrels are provided, including depositing lens barrel material by electrolysis and etching lens barrels from a block of material. Also provided are means of assembling image capturing units or arr... | 03/13/2012 |
| 8130382 | Determining endpoint in a substrate process An endpoint detection method for detecting an endpoint of a process comprises determining a reflectance spectrum of light reflected from a substrate, the light having a wavelength, processing the substrate while light having the wavelength is reflected from the subs... | 03/06/2012 |
| 8114525 | Process chamber component having electroplated yttrium containing coating A component capable of being exposed to a plasma in a process chamber has a structure having an electroplated coating comprising yttrium-containing species. The electroplated coating can include zirconium oxide, or can have an oxide layer thereon. In another embodim... | 02/14/2012 |
| 8114477 | Cleaning of a substrate support A method of fabricating a cleaning wafer capable of cleaning process residues from a substrate support surface is disclosed. The method comprises providing a cleaning disc, and applying a liquid polymer precursor to the cleaning disc by spraying or spin coating the ... | 02/14/2012 |
| 8110086 | Method of manufacturing a process chamber component having yttrium-aluminum coating A method of manufacturing a substrate processing chamber component comprises forming a chamber component comprising a metal alloy comprising yttrium and aluminum, and anodizing an exposed surface of the metal alloy. ... | 02/07/2012 |
| 8090250 | Imaging device with focus offset compensation An imaging device comprises a lens barrel having a lens opening, and a lens positioned in the lens opening of the lens barrel, the lens having an optical center, a focal length F, an aperture diameter D, and an aperture number FN=F/D. An image sensor comp... | 01/03/2012 |
| 8013289 | Lens array block for image capturing unit and methods of fabrication A lens array block comprises a plurality of lens barrels joined to one another form a three-dimensional unitary structure. Each lens barrel comprises a stepped cylindrical chamber having a through hole with an internal profile having first and second steps that are ... | 09/06/2011 |
| 7959780 | Textured ion exchange membranes A textured water-splitting membrane comprises an anion exchange layer abutting a cation exchange layer to form a heterogeneous water-splitting interface therebetween, and a textured surface having a pattern of texture features comprising spaced apart peaks and valle... | 06/14/2011 |
| 7901552 | Sputtering target with grooves and intersecting channels A sputtering chamber has a sputtering target comprising a backing plate and a sputtering plate. The backing plate comprises a backside surface having a plurality of concentric circular grooves and a plurality of arcuate channels which intersect the circular grooves.... | 03/08/2011 |
| 7846579 | Thin film battery with protective packaging A battery comprises a substrate comprising an electrolyte between a pair of conductors, at least one conductor having a non-contact surface. A cap is spaced apart from the non-contact surface of the conductor by a gap having a gap distance dg of from abou... | 12/07/2010 |
| 7862927 | Thin film battery and manufacturing method In a method of fabricating a battery, a substrate is annealed to reduce surface contaminants or even water of crystallization from the substrate. A series of battery component films are deposited on a substrate, including an adhesion film, electrode films, and an el... | 01/04/2011 |
| 7858503 | Ion implanted substrate having capping layer and method In an ion implantation method, a substrate is placed in a process zone and ions are implanted into a region of the substrate to form an ion implanted region. A porous capping layer is deposited on the ion implanted region. The substrate is annealed to volatize at le... | 12/28/2010 |
| 7833401 | Electroplating an yttrium-containing coating on a chamber component A method of forming a component capable of being exposed to a plasma in a process chamber comprises forming a structure comprising a surface and electroplating yttrium, and optionally aluminum or zirconium, onto the surface. Thereafter, the electroplated layer can b... | 11/16/2010 |
| 7824498 | Coating for reducing contamination of substrates during processing A substrate support has a support structure and a coating on the support structure having a carbon-hydrogen network. The coating has a contact surface having a coefficient of friction of less than about 0.3 and a hardness of at least about 8 GPa. The contact surface... | 11/02/2010 |
| 7816205 | Method of forming non-volatile memory having charge trap layer with compositional gradient A flash memory device and method of forming a flash memory device are provided. The flash memory device includes a silicon nitride layer having a compositional gradient in which the ratio of silicon to nitrogen varies through the thickness of the layer. The silicon ... | 10/19/2010 |
| 7813043 | Lens assembly and method of manufacture A lens assembly comprises a spacer plate having first and second surfaces, and an array of lens barrels that each comprise a lens opening extending inward from the first surface of the spacer plate and a sensor cavity extending inward from the second surface of the ... | 10/12/2010 |
| 7780833 | Electrochemical ion exchange with textured membranes and cartridge An electrochemical cell 102 comprises an ion exchange membrane 10 having anion and cation exchange materials. The membrane 10 can have separate anion and cation exchange layers 12, 14 that define a heterogeneous water-splitting interface ... | 08/24/2010 |
| 7705275 | Substrate support having brazed plates and resistance heater A substrate support comprises top, middle and bottom plates which are brazed together. The top plate has a top surface with a plurality of outwardly projecting mesas dispersed across a recessed pocket, a network of recessed grooves, a vacuum port terminating in the ... | 04/27/2010 |
| 7476880 | Writing a circuit design pattern with shaped particle beam flashes A shaped particle beam writing strategy can be used to write a pattern with a particle beam onto a substrate. The pattern comprises a circuit design that is fractured into a plurality of arbitrary polygons. The writing strategy comprises transforming and fracturing ... | 01/13/2009 |
| 7442388 | Phospholipid-based powders for drug delivery Phospholipid based powders for drug delivery applications are disclosed. The powders comprise a polyvalent cation in an amount effective to increase the gel-to-liquid crystal transition temperature of the particle compared to particles without the polyvalent cation.... | 10/28/2008 |
| 7368102 | Pulmonary delivery of aminoglycosides The present invention is directed to the administration of aminoglycosides. In particular, the present invention is directed to compositions and methods for the pulmonary administration of aminoglycosides. According to a preferred embodiment, compositions and method... | 05/06/2008 |
| 7160521 | Treatment of effluent from a substrate processing chamber A substrate processing apparatus has a process chamber and an effluent treatment reactor. The process chamber has a substrate support, a process gas supply, a gas energizer, and an exhaust conduit. The effluent treatment reactor has an effluent inlet to receive effl... | 01/09/2007 |
