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Attorney: Jalall; Laleh


Number of patents: 1
Last date: August 21, 2007

NumberTitleIssue Date
7259109Electrospray and enhanced electrospray deposition of thin films on semiconductor substrates
A method of forming a thin film on a substrate to fabricate a microelectronic device, a microelectronic device comprising a thin film deposited according to the method, and a system comprising the microelectronic device. The thin film may include on of a low k thin ...
08/21/2007
 
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