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Attorney: Harness, Dickey & Pierce, P.L.L.


Number of patents: 1
Last date: January 09, 2007

NumberTitleIssue Date
7160105Temperature controlled vacuum chuck
A temperature controllable vacuum chuck includes a mounting bracket, a porous plate, a heating element, and a temperature sensor. The porous plate is mounted to the mounting bracket and is configured for securing a substrate to the vacuum chuck when air is suctioned...
01/09/2007
 
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