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Attorney: Crowder; Albert M.


Number of patents: 3
Last date: December 03, 1991

NumberTitleIssue Date
5069002Apparatus for endpoint detection during mechanical planarization of semiconductor wafers
An apparatus for detecting a planar endpoint on a semiconductor wafer during mechanical planarization of the wafer. The planar endpoint is detected by sensing a change in friction between the wafer and a polishing surface. This change of friction may be p...
12/03/1991
4696017Quadrature signal generator having digitally-controlled phase and amplitude correction
A digitally-controlled quadrature signal generator is provided having a frequency synthesizer for receiving a digital input signal and in response thereto generating an output signal having a predetermined frequency. The output signal is split to produce ...
09/22/1987
4232059Process of defining film patterns on microelectronic substrates by air abrading
A process is disclosed for delineating a patterned electroconductive coating on a substantially nonconductive substrate. The process can be used on substrates having a thickness in excess of 50 microinches. The process involves forming a substantially con...
11/04/1980
 
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