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| Application No. | Application Title | Issue Date |
| 20110031655 | GAS-ASSISTED LASER ABLATION An improved method for laser processing that prevents material redeposition during laser ablation but allows material to be removed at a high rate. In a preferred embodiment, laser ablation is performed in a chamber filled with high pressure precursor (etchant) gas so t... | 02/10/2011 |
| 20110031394 | HIGH PRESSURE CHARGED PARTICLE BEAM SYSTEM The current invention includes methods and apparatuses for processing, that is, altering and imaging, a sample in a high pressure charged particle beam system. Embodiments of the invention include a cell in which the sample is positioned during high pressure charged par... | 02/10/2011 |
| 20110006208 | Method for Inspecting a Sample The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes 504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed. After placing ... | 01/13/2011 |
| 20110006207 | METHOD FOR S/TEM SAMPLE ANALYSIS An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the prese... | 01/13/2011 |
| 20100327180 | BEAM QUALITY IN FIB SYSTEMS Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an io... | 12/30/2010 |
| 20100316811 | AU-CONTAINING LAYER FOR CHARGED PARTICLE BEAM PROCESSING The invention provides a method for providing an Au-containing layer onto a surface of a work piece, which method comprises:
| |
| 20100308219 | METHOD FOR CREATING S/TEM SAMPLE AND SAMPLE STRUCTURE An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. A novel sample structure and a nov... | 12/09/2010 |
| 20100307602 | System and Method for Processing High Purity Materials Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material... | 12/09/2010 |
| 20100305747 | METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By appl... | 12/02/2010 |
| 20100301211 | DUAL BEAM SYSTEM A dual beam system provides for operation of a focused ion beam in the presence of a magnetic field from an ultra-high resolution electron lens. The ion beam is deflected to compensate for the presence of the magnetic field.... | 12/02/2010 |
| 20100300873 | METHOD FOR CREATING S/TEM SAMPLE AND SAMPLE STRUCTURE An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. A novel sample structure and a nov... | 12/02/2010 |
| 20100294648 | Magnetically Enhanced, Inductively Coupled Plasma Source for a Focused Ion Beam System The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.... | 11/25/2010 |
| 20100276592 | Compact Scanning Electron Microscope A slider bearing for use with an apparatus comprising a vacuum chamber (11). The slider bearing comprises: a base plate (20) in contact with the vacuum chamber (11) at one side, said base plate showing a first through-hole (21) in contact wit... | 11/04/2010 |
| 20100265788 | METHOD AND APPARATUS FOR BLENDING PROCESS MATERIALS An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficienc... | 10/21/2010 |
| 20100258721 | DARK FIELD DETECTOR FOR USE IN AN ELECTRON MICROSCOPE The invention relates to a dark-field detector for an electron microscope. The detector comprises a photodiode for detecting the scattered electrons, with an inner electrode and an outer electrode. As a result of the resistive behaviour of the surface layer the current ... | 10/14/2010 |
| 20100258196 | ARRANGEMENT OF MULTIPLE PUMPS FOR DELIVERY OF PROCESS MATERIALS A method and apparatus for delivering process materials in a bulk delivery system includes a plurality of pumps arranged in series along a material supply line, wherein the capacity of each pump is such that less than all of the pumps operating simultaneously can provid... | 10/14/2010 |
| 20100255213 | Method for Forming Microscopic 3D Structures A method for forming microscopic 3D structures. In the method according to the invention a substrate (105) is placed in a Scanning Electron Microscope (SEM). The SEM is equipped with a Gas Injection System (GIS) (110) for directing a jet of precursor fluid... | 10/07/2010 |
| 20100248805 | Method of Lottery Wagering on a Real World Phased Competition A method for lottery wagering on actual events. The method according to the present invention includes selecting a subset of wagering data DW from a set of pre-qualifying data DPQ prior to, conclusion of a pre-qualifying event of a phased competiti... | 09/30/2010 |
| 20100246993 | METHOD FOR DETERMINING DISTORTIONS IN A PARTICLE-OPTICAL APPARATUS The invention relates to a method of determining the distortions in the projection system of a TEM, and a method of correcting for these aberrations. The aberrations are determined by collecting a large number of images of a sample, the sample slightly displaced between... | 09/30/2010 |
| 20100243889 | FORMING AN IMAGE WHILE MILLING A WORK PIECE Dual beam instruments, comprising a Scanning Electron Microscope (SEM) column for imaging and a Focused Ion Beam (FIB) column for milling, are routinely used to extract samples (lamellae) from semiconductor wafers. By observing the progress of the milling with the SEM c... | 09/30/2010 |
| 20100241277 | SYSTEM FOR MONITORING PROPANE OR OTHER CONSUMABLE LIQUID IN REMOTELY LOCATED STORAGE TANKS An improved apparatus and method for monitoring the levels of propane or other consumable liquid in remotely located storage tanks and coordinating delivery of liquid to those tanks, including an improved method of using the remote monitoring data to identify out-of-ord... | 09/23/2010 |
| 20100239371 | BOAT LIFT An apparatus and method are described for lifting a boat out of water. An improved boat lift having at least one support beam upon which the weight of a boat rests, the support beams having an interior wherein components of a cable drive system are mounted, provides lif... | 09/23/2010 |
| 20100230609 | SAMPLE CARRIER FOR SAMPLE HOLDER The invention relates to a composite structure of a sample carrier 20 and a sample holder 30 for use in a TEM, for example. The sample carrier is hereby separately embodied from the sample holder. Although such compositions are already known, the known com... | 09/16/2010 |
| 20100230590 | Compact Scanning Electron Microscope A compact electron microscope is robust, simple to operate, and preferably requires no special utilities. Imaging can begin shortly after a sample is inserted. A preferred simplified design includes permanent magnets for focusing, lack a vacuum controller and vacuum gau... | 09/16/2010 |
| 20100224592 | CHARGED PARTICLE BEAM PROCESSING Electron-beam-induced chemical reactions with precursor gases are controlled by adsorbate depletion control. Adsorbate depletion can be controlled by controlling the beam current, preferably by rapidly blanking the beam, and by cooling the substrate. The beam preferably... | 09/09/2010 |
| 20100197142 | HIGH SELECTIVITY, LOW DAMAGE ELECTRON-BEAM DELINEATION ETCH A method and apparatus for selective etching a substrate using a focused beam. For example, multiple gases may be used that are involved in competing beam-induced and spontaneous reactions, with the result depending on the materials on the substrate. The gases may inclu... | 08/05/2010 |
| 20100194874 | User Interface for an Electron Microscope A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes t... | 08/05/2010 |
| 20100171037 | COMPACT SCANNING ELECTRON MICROSCOPE A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly redu... | 07/08/2010 |
| 20100159370 | METHOD FOR FORMING MICROSCOPIC STRUCTURES ON A SUBSTRATE The invention relates to a method for forming microscopic structures. By scanning a focused particle beam over a substrate in the presence of a precursor fluid, a patterned seed layer is formed. By now growing this layer with Atomic Layer Deposition or Chemical Vapour D... | 06/24/2010 |
| 20100151679 | SYSTEM FOR MODIFYING SMALL STRUCTURES A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle... | 06/17/2010 |
| 20100148515 | Direct Current Brushless Machine and Wind Turbine System A direct current brushless electric machine is described that comprises a sequence of permanent magnets where the N and S magnetic poles being alternately arranged adjacent to each other, each exerting a magnetic field; phase coils are composed of a group of conductors,... | 06/17/2010 |
| 20100148064 | X-RAY DETECTOR FOR ELECTRON MICROSCOPE Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large soli... | 06/17/2010 |
| 20100138028 | GRAPHICAL AUTOMATED MACHINE CONTROL AND METROLOGY A graphical programming system allows a user to place geometric shapes onto a scaled image, the shape having associated behavior that operates on the image or on the object of which the image is formed. In a preferred embodiment, the shapes are objects in the Visio prog... | 06/03/2010 |
| 20100127190 | CHARGED PARTICLE BEAM MASKING FOR LASER ABLATION MICROMACHINING An improved method for substrate micromachining. Preferred embodiments of the present invention provide improved methods for the utilization of charged particle beam masking and laser ablation. A combination of the advantages of charged particle beam mask fabrication an... | 05/27/2010 |
| 20100116977 | MEASUREMENT AND ENDPOINTING OF SAMPLE THICKNESS An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the th... | 05/13/2010 |
| 20100108907 | CHARGED-PARTICLE OPTICAL SYSTEM WITH DUAL LOADING OPTIONS A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has a lo... | 05/06/2010 |
| 20100108881 | SCANNING TRANSMISSION ELECTRON MICROSCOPE USING GAS AMPLIFICATION A scanning transmission electron microscope operated with the sample in a high pressure environment. A preferred detector uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification.... | 05/06/2010 |
| 20100108506 | METHOD AND APPARATUS FOR CONTROLLING TOPOGRAPHICAL VARIATION ON A MILLED CROSS-SECTION OF A STRUCTURE An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical varia... | 05/06/2010 |
| 20100101672 | FLUID DIVIDER BLOCK SUITABLE FOR USE AT HIGH PRESSURES The invention is a divider block assembly suitable for use at high fluid pressures. Applicant has found that a sufficiently deep counterbored hole allows a mounting bolt to apply the sealing pressure well below the divider block surface, which can reduce or eliminate th... | 04/29/2010 |
| 20100092070 | HIGH ACCURACY BEAM PLACEMENT FOR LOCAL AREA NAVIGATION An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing. This invention demonstrates a method where high accuracy navigation to the site of interest within a relatively large local area (e.g. an area ... | 04/15/2010 |
