Celebrity Inventors
Superstar singer Michael Jackson co-patented a "Method and means for creating anti-gravity illusion" in 1993.
PatentStorm News
Make the Most of Our Site
See this month's Top Inventors and Most Cited Patents.
Stay on top of the latest innovations by subscribing to an RSS feed.
Registered users: Manage your profile.
| Application No. | Application Title | Issue Date |
| 20090211896 | Cathode and Counter-Cathode Arrangement in an Ion Source The present invention relates to ion sources (14) comprising a cathode (20) and a counter-cathode (44) that are suitable for ion implanters (10). Typically, the ion source is held under vacuum and produces ions using a plasma generated within... | 08/27/2009 |
| 20090173894 | Ion implanters The present invention relates to components in an ion implanter that may see incidence of the ion beam, such as a beam dump or a beam stop. Such components will be prone to the ions sputtering material from their surfaces, and sputtered material may become entrained in ... | 07/09/2009 |
| 20090166565 | Ion implanters The present invention relates to components in an ion implanter that may see incidence of the ion beam, such as a beam dump or a beam stop. Such components will be prone to the ions sputtering material from their surfaces, and sputtered material may become entrained in ... | 07/02/2009 |
| 20090108197 | Ion implanters The present invention relates to components in ion implanters having surfaces, such as graphite surfaces, adjacent to the path of the ion beam through the ion implanter. Such surfaces will be prone to sputtering, and sputtered material may become entrained in the ion be... | 04/30/2009 |
| 20090101834 | Ion beam extraction assembly in an ion implanter The present invention relates to an ion beam extraction assembly for use in an ion beam generation apparatus such as those used, for example, in an ion implanter. An ion beam extraction assembly is provided for mounting within an ion beam generating apparatus comprising... | 04/23/2009 |
| 20090095916 | Ion beam guide tube A guide tube for an ion beam in an ion implanter which is located adjacent a semiconductor wafer being implanted has an outwardly tapering central bore, thereby alleviating problems of beam strike as the ion beam passes through the guide tube.... | 04/16/2009 |
| 20090087970 | Method of producing a dopant gas species This invention relates to a method of producing B2H6 (diborane) in semiconductor wafer processing apparatus. In particular, although not exclusively, this invention relates to producing a dopant gas species containing a desired dopant element, and ... | 04/02/2009 |
| 20080197109 | Etch pattern definition using a CVD organic layer as an anti-reflection coating and hardmask A multilayer antireflective hard mask structure is disclosed. The structure comprises: (a) a CVD organic layer, wherein the CVD organic layer comprises carbon and hydrogen; and (b) a dielectric layer over the CVD organic layer. The dielectric layer is preferably a silic... | 08/21/2008 |
| 20080180873 | Securing a substrate to an electrostatic chuck The present invention relates to securing a substrate to an electrostatic chuck to minimise damage to the substrate. In particular, the present invention relates to securing a substrate to an electrostatic chuck provided as part of a substrate scanner in an ion implante... | 07/31/2008 |
| 20080169434 | Method of scanning a substrate in an ion implanter This invention relates to a method of scanning a substrate through an ion beam in an ion implanter to provide uniform dosing of the substrate. The method comprises causing relative motion between the substrate and the ion beam such that the ion beam passes over all of t... | 07/17/2008 |
| 20080169435 | Ion beam monitoring arrangement This invention relates to an ion beam monitoring arrangement for use in an ion implanter where it is desirable to monitor the floating potential across an ion beam used for implantation. The invention provides a ion beam monitoring arrangement comprising a device config... | 07/17/2008 |
| 20080164427 | Ion implanters The present invention relates to components in ion implanters having surfaces adjacent to the path of the ion beam through the ion implanter. Such surfaces will be prone to deposition and the present invention addresses problems associated with delamination of deposited... | 07/10/2008 |
| 20080108215 | INTEGRATED CIRCUIT INTERCONNECT LINES HAVING REDUCED LINE RESISTANCE The present invention provides integrated circuit fabrication methods and devices wherein shunted interconnect lines are formed. The shunted interconnect lines are formed in a dielectric stack comprising (1) a first dielectric layer having dense interconnect lines that ... | 05/08/2008 |
| 20080105968 | INTEGRATED CIRCUIT INTERCONNECT LINES HAVING REDUCED LINE RESISTANCE The present invention provides integrated circuit fabrication methods and devices wherein shunted interconnect lines are formed. The shunted interconnect lines are formed in a dielectric stack comprising (1) a first dielectric layer having dense interconnect lines that ... | 05/08/2008 |
| 20080100917 | BROADBAND IMAGING SYSTEM AND METHOD A method and system are presented for use in imaging broadband light. A plurality of substantially narrowband light components of the broadband light are passed through an array of spectral imaging modules. Each of the spectral imaging modules is configured for imaging ... | 05/01/2008 |
| 20080099690 | MICROSCOPE WITH VACUUM OBJECTIVE A microscope for inspecting a surface in an evacuated volume, including an optical objective assembly which is located in the evacuated volume in proximity to the surface. The assembly is arranged to collect and convey radiation from the surface while focusing the radia... | 05/01/2008 |
| 20080100830 | SYSTEM AND METHOD FOR INSPECTING AN OBJECT USING AN ACOUSTO-OPTIC DEVICE A system and method for inspecting an object. The system includes: a traveling lens acousto-optic device adapted to generate a traveling lens that propagates through an active region of the traveling lens acousto-optic device; a first scanner, adapted to direct a beam o... | 05/01/2008 |
| 20080089617 | FOCUS ERROR CORRECTION SYSTEM AND METHOD A method for focus error corrections. The method includes: determining a focus scheme in response to: a spatial relationship between an upper surface of at least a first portion of a substantially transparent upper layer of an inspected object and between an upper surfa... | 04/17/2008 |
| 20080061251 | Ion beams in an ion implanter The present invention relates to a method of tuning an ion beam in an ion implanter such as may be used in the manufacture of semiconductor devices. There are many operational parameters associated with operation of the ion implanter that influence the ion beam that rea... | 03/13/2008 |
| 20080054193 | Ion beam guide tube The present invention relates to a guide tube for an ion beam in an ion implanter located adjacent a semiconductor wafer. Such guide tubes are provided to confine charged particles used for wafer neutralisation during implantation. According to the invention, a guide tu... | 03/06/2008 |
| 20080048131 | Front plate for an ion source The present invention relates to a front plate for an ion source that is suitable for an ion implanter. The front plate according to the invention comprises obverse and reverse sides, an exit aperture for allowing egress of ions from the ion source that extends substant... | 02/28/2008 |
| 20080023065 | Thin film photovoltaic module wiring for improved efficiency The present invention relates to configuring and wiring together cells in TF PV modules. According to one aspect, cells are fabricated on one plane on a top surface of a substrate, with wiring patterned on a parallel plane, and vias formed to provide connections between... | 01/31/2008 |
| 20080017811 | Beam stop for an ion implanter This invention relates to a beam stop for an ion implanter that provides a measure of the ion beam current incident thereon and that may be used for ion beam optimisation. A beam stop for an ion implanter is provided comprising a charge collector with a segmented surfac... | 01/24/2008 |
| 20070240759 | Stacked thin film photovoltaic module and method for making same using IC processing In a thin-film photovoltaic (TF PV) module, stacked cells provide efficient conversion of solar energy without being afflicted by conventional problems such as current matching between layers. According to one aspect, the module includes separate terminals for the respe... | 10/18/2007 |
| 20070238285 | Method for making an improved thin film solar cell interconnect using etch and deposition process The present invention provides a method of forming interconnects in a photovoltaic module. According to one aspect, a method according to the invention includes processing steps that are similar to those performed in conventional integrated circuit fabrication. For exam... | 10/11/2007 |
| 20070232057 | Method for forming thin film photovoltaic interconnects using self-aligned process Processing steps that are useful for forming interconnects in a photovoltaic module are described herein. According to one aspect, a method according to the invention includes processing steps that are similar to those performed in conventional integrated circuit fabric... | 10/04/2007 |
| 20070227578 | Method for patterning a photovoltaic device comprising CIGS material using an etch process A processing method herein enables patterning a thin-film photovoltaic module into cells and/or sub-cells using an etch process. According to one aspect, an etch mixture is identified that is capable etching through a thin-film material such as CIGS with high selectivit... | 10/04/2007 |
| 20070193881 | Partially suspended rolling magnetron A magnetron scanning and support mechanism in which the magnetron is partially supported from an overhead scanning mechanism through multiple springs coupled to different horizontal locations on the magnetron and partially supported from below at multiple locations on t... | 08/23/2007 |
| 20070127017 | QUALIFICATION OF A MASK A method for qualifying printability of a mask, including performing a first inspection of the mask with an optical assembly at a first numerical aperture of collection (NAC) of radiation from the mask, and determining, in response to the first inspection, a first possi... | 06/07/2007 |
| 20070117397 | Remote plasma pre-clean with low hydrogen pressure A plasma cleaning method particularly useful for removing photoresist and oxide residue from a porous low-k dielectric with a high carbon content prior to sputter deposition. A remote plasma source produces a plasma primarily of hydrogen radicals. The hydrogen pressure ... | 05/24/2007 |
| 20070102116 | Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles A method of controlling surface non-uniformity of a wafer in a polishing operation includes (a) providing a model for a wafer polishing that defines a plurality of regions on a wafer and identifies a wafer material removal rate in a polishing step of a polishing process... | 05/10/2007 |
| 20070099438 | Thin film deposition A system, method and apparatus is capable of producing layers of various materials stacked on one another on a substrate without exposing the substrate to the pressure and contaminants of ambient air until the stack is complete. In one aspect, the stack of layers can in... | 05/03/2007 |
| 20070095650 | Protective offset sputtering Sputtering in a physical vapor deposition (PVD) chamber may, in one embodiment, utilize a target laterally offset from and tilted with respect to the substrate. In another aspect, target power may be reduced to enhance film protection. In yet another aspect, magnetron m... | 05/03/2007 |
| 20070079866 | System and method for making an improved thin film solar cell interconnect In a module of photovoltaic cells, a method of forming the module interconnects includes a single cutting process after the deposition of all active layers. This simplifies the overall process to a set of vacuum steps followed by a set of interconnect steps, and may sig... | 04/12/2007 |
| 20060266833 | System, method and computer software product for inspecting charged particle responsive resist A system, computer software product and a method for evaluating a mask, the method includes the stages of: defining multiple CD measurement target windows; defining multiple pattern recognition windows such that the multiple CD measurements windows do not overlap the mu... | 11/30/2006 |
| 20060261261 | Spot grid array scanning system A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method f... | 11/23/2006 |
| 20060251340 | Method for defect detection and process monitoring based on sem images A morphological operation is applied to an SEM image to obtain a idealized image, and the idealized image is used to detect a defect in a subject of the SEM image. Tile defect is detected by subtraction of the idealized image from the original image Morphological operat... | 11/09/2006 |
| 20060243918 | Raster Frame Beam System For Electron Beam Lithography A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned i... | 11/02/2006 |
| 20060243922 | Raster Frame Beam System For Electron Beam Lithography A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned i... | 11/02/2006 |
| 20060221331 | High Throughput Inspection System and a Method for Generating Transmitted and/or Reflected Images Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are gen... | 10/05/2006 |
