Assignee: Xradia, Inc.

Location: Concord, CA
No. of patents: 31

Number	Title	Issue Date
7974379	Metrology and registration system and method for laminography and tomography A metrology system that uses an imaging system to monitor alignment features on the sample or sample holder of an X-ray laminography or tomography system. the metrology system has the capability to provide both sample shift and sample rotation movement data to a dat...	07/05/2011
7813475	X-ray microscope with switchable x-ray source An x-ray imaging system uses a synchrotron radiation beam to acquire x-ray images and at least one integrated x-ray source. The system has an imaging system including sample stage controlled by linear translation stages, objective x-ray lens, and x-ray sensitive det...	10/12/2010
7800072	Low pass X-ray scintillator system A scintillated CCD detector system for imaging x rays uses x-rays having a photon energy in the range of 1 to 20 keV. The detector differs from existing systems in that it provides extremely high resolution of better than a micrometer, and high detection quantum eff...	09/21/2010
7796725	Mechanism for switching sources in x-ray microscope An x-ray imaging system uses a synchrotron radiation beam to acquire x-ray images and at least one integrated x-ray source. The system has an imaging system including sample stage controlled by linear translation stages, objective x-ray lens, and x-ray sensitive det...	09/14/2010
7787588	System and method for quantitative reconstruction of Zernike phase-contrast images The principle of reciprocity states that full-field and scanning microscopes can produce equivalent images by interchanging the roles of condenser and detector. Thus, the contrast transfer function inversion previously used for images from scanning systems can be ap...	08/31/2010
7561662	X-ray micro-tomography system optimized for high resolution, throughput, image quality A projection x-ray imaging system that possibly utilizes a laboratory-based micro-focused x-ray source is disclosed. Techniques for optimizing the system for high quality, three dimensional image formation with tomographic imaging with the potential for high resolut...	07/14/2009
7535193	Five axis compensated rotating stage A rotating stage assembly performs high precision rotational angle and position error correction by continuous sensing and correcting motor stage assembly errors. It performs these corrections, to adjust for motor environmental and operational errors by sensing and ...	05/19/2009
7499521	System and method for fuel cell material x-ray analysis An imaging technology for fuel cells is based on x-ray microscopy. A metrology system images the electro-chemical interaction areas of solid-oxide fuel cells (SOFC) in-situ. This system takes advantage of both the penetrating power and elemental absorption contrast ...	03/03/2009
7443953	Structured anode X-ray source for X-ray microscopy An x-ray source comprises a structured anode that has a thin top layer made of the desired target material and a thick bottom layer made of low atomic number and low density materials with good thermal properties. In one example, the anode comprises a layer of coppe...	10/28/2008
7414787	Phase contrast microscope for short wavelength radiation and imaging method A phase contrast x-ray microscope has a phase plate that is placed in proximity of and attached rigidly to the objective to form a composite optic. This enables easier initial and long-term maintenance of alignment of the microscope. In one example, they are fabrica...	08/19/2008
7412024	X-ray mammography A digital x-ray phase contrast soft tissue imaging and mammography system offers significant cancer detection sensitivity and a significant improvement in accurate detection and interpretation of mammograms. In addition, the proposed system produces digital mammogra...	08/12/2008
7406151	X-ray microscope with microfocus source and Wolter condenser An x-ray microscope uses a microfocus x-ray source with a focus spot of less than 10 micrometers and a Wolter condenser having a magnification of about four or more for concentrating x-rays from the source onto a sample. A detector is provided for detecting the x-ra...	07/29/2008
7400704	High resolution direct-projection type x-ray microtomography system using synchrotron or laboratory-based x-ray source A projection-based x-ray imaging system combines projection magnification and optical magnification in order to ease constraints on source spot size, while improving imaging system footprint and efficiency. The system enables tomographic imaging of the sample especi...	07/15/2008
7394890	Optimized x-ray energy for high resolution imaging of integrated circuits structures An x-ray imaging system uses particular emission lines that are optimized for imaging specific metallic structures in a semiconductor integrated circuit structures and optimized for the use with specific optical elements and scintillator materials. Such a system is ...	07/01/2008
7388942	X-ray micro-tomography system optimized for high resolution, throughput, image quality A projection x-ray imaging system that possibly utilizes a laboratory-based micro-focused x-ray source is disclosed. Techniques for optimizing the system for high quality, three dimensional image formation with tomographic imaging with the potential for high resolut...	06/17/2008
7365918	Fast x-ray lenses and fabrication method therefor A fabrication process for zone plate lenses is based on controlled thin layer deposition for fabricating structures as small as 2 nanometers (nm) in width, and potentially smaller. The substrate for deposition will take the form of a precision hole, fabricated in a ...	04/29/2008
7365909	Fabrication methods for micro compounds optics Methods for fabricating refractive element(s) and aligning the elements in a compound optic, typically to a zone plate element. The techniques are used for fabricating micro refractive, such as Fresnel, optics and compound optics including two or more optical elemen...	04/29/2008
7297959	Lens bonded X-ray scintillator system and manufacturing method therefor A scintillated CCD detector system for imaging x rays uses x-rays having a photon energy in the range of 1 to 20 keV. The detector differs from existing systems in that it provides extremely high resolution of better than a micrometer, and high detection quantum eff...	11/20/2007
7286640	Dual-band detector system for x-ray imaging of biological samples A digital dual-band detector functions as an imaging platform capable of extracting hard and soft tissue images, for example. The detector has a first detector system comprising a first scintillator for converting x-rays from a sample to an first optical signal, and...	10/23/2007
7268945	Short wavelength metrology imaging system An extreme ultraviolet (EUV) AIM tool for both the EUV actinic lithography and high-resolution imaging or inspection is described. This tool can be extended to lithography nodes beyond the 32 nanometer (nm) node covering other short wavelength radiation such as soft...	09/11/2007
7245696	Element-specific X-ray fluorescence microscope and method of operation An element-specific imaging technique utilizes the element-specific fluorescence X-rays that are induced by primary ionizing radiation. The fluorescence X-rays from an element of interest are then preferentially imaged onto a detector using an optical train. The pre...	07/17/2007
7215736	X-ray micro-tomography system optimized for high resolution, throughput, image quality A projection x-ray imaging system that possibly utilizes a laboratory-based micro-focused x-ray source is disclosed. Techniques for optimizing the system for high quality, three dimensional image formation with tomographic imaging with the potential for high resolut...	05/08/2007
7183547	Element-specific X-ray fluorescence microscope and method of operation An element-specific imaging technique utilizes the element-specific fluorescence X-rays that are induced by primary ionizing radiation. The fluorescence X-rays from an element of interest are then preferentially imaged onto a detector using an optical train. The pre...	02/27/2007
7170969	X-ray microscope capillary condenser system A radiation condenser system for an X-ray microscope allows for the efficient collection and relay of radiation from a source to the sample. It generates a converging hollow cone of radiation that can be used in the imaging of a sample or target using a zone plate l...	01/30/2007
7130375	High resolution direct-projection type x-ray microtomography system using synchrotron or laboratory-based x-ray source A projection-based x-ray imaging system combines projection magnification and optical magnification in order to ease constraints on source spot size, while improving imaging system footprint and efficiency. The system enables tomographic imaging of the sample especi...	10/31/2006
7119953	Phase contrast microscope for short wavelength radiation and imaging method A phase contrast x-ray microscope has a phase plate that is placed in proximity of and attached rigidly to the objective to form a composite optic. This enables easier initial and long-term maintenance of alignment of the microscope. In one example, they are fabrica...	10/10/2006
7095822	Near-field X-ray fluorescence microprobe This invention pertains to an x-ray microprobe that can be placed very close the sample surface. A practical implementation is an x-ray target material integrated to an atomic force microscope (AFM) tip and an electron beam is focused to the target materials to gene...	08/22/2006
7057187	Scintillator optical system and method of manufacture A scintillated CCD detector system for imaging x rays uses x-rays having a photon energy in the range of 1 to 20 keV. The detector differs from existing systems in that it provides extremely high resolution of better than a micrometer, and high detection quantum eff...	06/06/2006
6917472	Achromatic fresnel optics for ultraviolet and x-ray radiation An achromatic Fresnel optic that combines a Fresnel zone plate and a refractive Fresnel lens. The zone plate provides high resolution for imaging and focusing, while the refractive lens takes advantage of the refraction index change properties of appropriate element...	07/12/2005
6914723	Reflective lithography mask inspection tool based on achromatic Fresnel optics A mask blank inspection tool includes an AFO having a diffractive lens and a refractive lens formed on a common substrate. The diffractive lens is a Fresnel zone plate and the refractive lens is a refractive Fresnel lens. The AFO is used to image light from a defect...	07/05/2005
6885503	Achromatic fresnel optics based lithography for short wavelength electromagnetic radiations A lithography apparatus having achromatic Fresnel objective (AFO) that combines a Fresnel zone plate and a refractive Fresnel lens. The zone plate provides high resolution for imaging and focusing, while the refractive lens takes advantage of the refraction index ch...	04/26/2005

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Assignee: Xradia, Inc.