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| Number | Title | Issue Date |
| 8148790 | Thin-film lid MEMS devices and methods Thin film encapsulation devices and methods for MEMS devices and packaging are provided. For a MEMS device encapsulated by a sacrificial layer, a lid layer can be deposited over the MEMS device without touching the MEMS device. The lid layer can be patterned and etc... | 04/03/2012 |
| 8115572 | Tunable matching network circuit topology selection Tunable matching network topologies are disclosed. A network in accordance with the present invention comprises at least one inductor, and at least one tunable capacitor, in parallel with the inductor, wherein the at least one tunable capacitor tunes the at least on... | 02/14/2012 |
| 8059385 | Substrates with slotted metals and related methods Substrates with slotted metals and related methods are provided. According to one aspect, a slotted metal attached to a substrate can include a metal patterned with slots less than or about equal to 2 microns. The slots can result in line widths that are approximate... | 11/15/2011 |
| 7907033 | Tunable impedance matching networks and tunable diplexer matching systems Tunable impedance matching networks and tunable diplexer matching systems are provided. A tunable impedance matching network can include an impedance element connected between first and second nodes for communicating signals between the first and second nodes. For e... | 03/15/2011 |
| 7586164 | Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-m... | 09/08/2009 |
| 7545622 | Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors... | 06/09/2009 |
| 7446628 | Pole-zero elements and related systems and methods According to one aspect, the subject matter described herein includes a tunable duplexer. The tunable duplexer can include a common node for communicating signals comprising a plurality of frequencies. Further, the tunable duplexer can include first and second band ... | 11/04/2008 |
| 7388316 | Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-m... | 06/17/2008 |
| 7385800 | Micro-electro-mechanical system (MEMS) capacitors, inductors, and related systems and methods According to one aspect, the subject matter described herein includes a MEMS fixed capacitor and a method for fabricating the MEMS fixed capacitor. The MEMS fixed capacitor can include a first stationary, capacitive plate on a substrate. Further, the MEMS fixed capa... | 06/10/2008 |
| 7361962 | Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a MEMS variable capacitor is provided. The variable capacitor can include first and second actuation electrodes being spaced ... | 04/22/2008 |
| 7180145 | Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. ... | 02/20/2007 |
| 6897537 | Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods Micro-Electro-Mechanical System (MEMS) Variable Capacitor Apparatus and Related Methods. According to one embodiment, a MEMS variable capacitor is provided. The variable capacitor can include first and second electrodes being spaced apart, and at least one of the el... | 05/24/2005 |
| 6882264 | Electrothermal self-latching MEMS switch and method Electrothermal Self-Latching MEMS Switch and Method. According to one embodiment, a microscale switch having a movable microcomponent is provided and includes a substrate having a stationary contact. The switch can also include a structural layer having a movable co... | 04/19/2005 |
| 6847114 | Micro-scale interconnect device with internal heat spreader and method for fabricating same A micro-scale interconnect device with internal heat spreader and method for fabricating same. The device includes first and second arrays of generally coplanar electrical communication lines. The first array is disposed generally along a first plane, and the second... | 01/25/2005 |
