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| Number | Title | Issue Date |
| 6314635 | Integrated crimp bias apparatus and method The reliability of a gas pressure regulator is ensured through the use of the disclosed integrated crimp bias apparatus and method for biasing and crimping components of a diaphragm subassembly for the regulator. Omission of crimping of the components aft... | 11/13/2001 |
| 6044547 | Integrated crimp bias apparatus The reliability of a gas pressure regulator is ensured through the use of the disclosed integrated crimp bias apparatus and method for biasing and crimping components of a diaphragm subassembly for the regulator. Omission of crimping of the components aft... | 04/04/2000 |
| 6026835 | High Cv bulk process valve, control system and method A high Cv bulk process valve, control system and method convey a process gas or liquid for manufacturing semiconductors through a fluid passage. The fluid passage contains an aerodynamically shaped expansion chamber within which a valve seat and a moveabl... | 02/22/2000 |
| 6003535 | Micro control valve and apparatus and method for making semiconductors with high purity process gas An improved continuously variable micro control valve and an apparatus and a method employing the same for making semiconductors enable a computer to precisely set a driver of the micro control valve such that the accuracy of the control valve in reproduc... | 12/21/1999 |
| 5787925 | Pneumatically servoed gas pressure regulator A pneumatically servoed gas pressure regulator capable of providing a relatively wide range of gas flow rates with precision outlet pressure control includes a dome loaded gas pressure regulator and a pressure sensor controller integrated in a single unit... | 08/04/1998 |
| 5762086 | Apparatus for delivering process gas for making semiconductors and method of using same An apparatus free of polymer material in contact with process gas for delivering process gas for making semiconductors includes a pressure regulator for regulating the pressure of the process gas to be delivered by the apparatus from a supply of pressuriz... | 06/09/1998 |
| 5755428 | Valve having metal-to metal dynamic seating for controlling the flow of gas for making semiconductors A valve having metal-to-metal dynamic seating for controlling the flow of gas includes a valve body having a gas passage extending therethrough, a metal seat extending about the gas passage, a flexible metal diaphragm mounted in the valve so the diaphragm... | 05/26/1998 |
| 5732736 | Pressure regulator with lower outlet pressure drop A fluid pressure regulator and a method of regulating involve configuring a valve and valve seat of the regulator such that as the valve is moved relative to the valve seat from a closed or nearly closed position of a throttled fluid passage in the regula... | 03/31/1998 |
| 5458001 | Gas pressure regulator, diaphragm assembly therefor and method of making same A gas pressure regulator and a diaphragm assembly therefor and a method of assembling the regulator utilizing the diaphragm assembly which enable the precise alignment of a diaphragm and a valve carried thereby with respect to a valve seat for improved re... | 10/17/1995 |
| 5230359 | Supply pressure compensated fluid pressure regulator and method A fluid pressure regulator and method of regulating high pressure fluid from a container such as high pressure gas cylinder, compensate for variation in the supply pressure to the regulator to limit variation in the outlet pressure of the regulator due to... | 07/27/1993 |
| 5039349 | Method and apparatus for cleaning surfaces to absolute or near-absolute cleanliness A method and apparatus for cleaning surfaces to absolute or near-absolute cleanliness involves spraying jets of heated cleaning solution so that it flows over and scrubs the surfaces to be cleaned. The cleaning solution is continuously recirculated and fi... | 08/13/1991 |
| 4702277 | Cylinder valve-regulator A cylinder valve for mounting on a high pressure gas cylinder for remotely controlling the flow of gas from the cylinder. The cylinder valve is resistant to hazardous gases and includes a fluid passage for conveying gas through the cylinder valve from an ... | 10/27/1987 |
| 4471803 | Flow limit shutoff valve A flow limit shutoff valve for automatically shutting off all flow between a source of high-pressure gas and a pressure regulator when that flow exceeds a preset flow rate. The flow to the shutoff valve is metered, resulting in lowering the pressure downs... | 09/18/1984 |
| 4257450 | Pressure-reducing regulator valve for high-pressure gases In a pressure-reducing regulator valve for high-pressure gases, the diaphragm is linked to the movable valve member controlling the flow of gas between the high-pressure inlet and the regulated outlet. The linkage is done through a lost-motion connection ... | 03/24/1981 |
| 3973579 | Apparatus for controlling the ratio of flow of two gases Apparatus for controlling the flow ratio of two gases, such as carbon dioxide and air or oxygen, where the principal gas is subject to flow fluctuations and the second gas is added to it at a ratio which is to be kept constant despite the variations in fl... | 08/10/1976 |
