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Assignee: Varian S.p.A.


Location: Leini, Turin, IT
No. of patents: 2

NumberTitleIssue Date
7354254Compact vacuum pump
A compact turbomolecular vacuum pump (1) is driven by a cup-type motor (8). The cup-shaped rotor of the motor is preferably integrated into the pump rotor (14) and may define corresponding pumping stages, for instance Holweck stages, wherein the...
04/08/2008
7334481Pressure sensor with improved vibrating microassembly and optical detection system
A pressure sensor made of a wafer with a pair of parallel silicon layers and a silicon oxide layer there between, comprises a vibrating microassembly formed as a silicon beam, which is arranged in a plane perpendicular to the silicon layers and fastened to a support...
02/26/2008
 
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