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Assignee: VTI Technologies Oy


Location: Vantaa, FI
No. of patents: 20

NumberTitleIssue Date
8176779Vibrating micro-mechanical sensor of angular velocity
Embodiments of the invention relate to measuring devices used in measuring angular velocity and, more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to an embodiment of the invention is adapted to measu...
05/15/2012
8124435Method for manufacturing a microelectromechanical component, and a microelectromechanical component
The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention...
02/28/2012
8104343Vibrating micromechanical sensor of angular velocity
The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of ...
01/31/2012
8102224Micromechanical resonator
The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator in which t...
01/24/2012
7982291Method for manufacturing a microelectromechanical component, and a microelectromechanical component
The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention...
07/19/2011
7962309Method and device for measuring the progress of a moving person
The invention relates to measuring devices to be used in physical measuring, and more particularly, to a method and a device for measuring the progress of a moving person. In the solution according to the invention the quantities describing the progress of the movin...
06/14/2011
7932568Microelectromechanical component
The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention...
04/26/2011
7716983Capacitive acceleration sensor
The invention relates to measuring devices used in the measuring of acceleration and, more specifically, to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention contains a movable electrode (5) supported at an...
05/18/2010
7682861Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensor
The present invention relates to measuring devices used in measuring physical quantities, such as acceleration, angular acceleration, or angular velocity, and, more precisely, to micromechanical motion sensors. The area, in the wafer plane, of a motion sensor compon...
03/23/2010
7555950Capacitive sensor and a method for manufacturing the capacitive sensor
The present invention relates to measuring devices for use in physical measuring, and in particular to capacitive sensors. In the sensor according to the invention, the shape of the stationary electrode (3), (4), (12), (17-20), (
07/07/2009
7516038Method for the mircomechanical measurement of acceleration and a micromechanical acceleration sensor
The invention relates to measurement devices used in the measurement of acceleration, and more specifically, to micromechanical acceleration sensors. The invention seeks to offer an improved method for the measurement of acceleration directed to three or two dimensi...
04/07/2009
7454971Oscillating micro-mechanical sensor of angular velocity
The invention relates to measuring devices used in measuring angular velocity, and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensor of angular velocity according to the present invention seismic masses (1), (2
11/25/2008
7426863Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor
The present invention relates to measuring devices used in measuring acceleration and, more precisely, to capacitive acceleration sensors. The object of the invention is to provide an improved method of manufacturing a capacitive acceleration sensor, and to provide ...
09/23/2008
7398683Capacitive acceleration sensor
The invention relates to measuring devices used in the measurement of acceleration and, more specifically, to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention contains a movable electrode (5) of the accele...
07/15/2008
7340955Capacitive acceleration sensor arrangement
The present invention relates to measuring devices used in measuring acceleration, and, more specifically, to capacitive acceleration sensors. The improved sensor arrangement of the invention enables reliable and effective measuring of acceleration, in small capacit...
03/11/2008
7325451Oscillating micro-mechanical sensor of angular velocity
The present invention relates to measuring devices used in measuring angular velocity and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensors of angular velocity according to the present invention, at least one pair of ele...
02/05/2008
7302857Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction
A method of manufacturing a sensor including forming an insulating layer on top of a conductive substrate, and forming a conducting electrode on top of the insulating layer. Further, the insulating layer is formed to include support areas formed at edges of the cond...
12/04/2007
7252007Method for the manufacturing of a capacitive pressure sensor, and a capacitive pressure sensor
The invention relates to measuring devices for the measuring of pressure, and more specifically to capacitive pressure sensors. The silicon crystal planes {111} are located at the corners of a wet etched membrane well of a pressure sensor element according to...
08/07/2007
6998059Method for manufacturing a silicon sensor and a silicon sensor
The invention relates to a method for manufacturing a silicon sensor structure and a silicon sensor. According to the method, into a single-crystal silicon wafer (10) is formed by etched opening at least one spring element configuration (7) and at leas...
02/14/2006
6938485Capacitive acceleration sensor
The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electro...
09/06/2005
 
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