Assignee: VAT Holding AG

Location: Haag, CH
No. of patents: 41

Number	Title	Issue Date
8177190	Vacuum valve A vacuum valve including a valve body with a valve orifice, a closure member for closing the valve orifice, a first piston-cylinder unit, a second piston-cylinder unit, a first control element, and a second control element. When opening the vacuum valve, a pressure ...	05/15/2012
8141847	Method for controlling or regulating a vacuum valve A method for controlling or regulating a vacuum valve that includes a valve body (1) with a valve opening (2), a closing member (3), an actuator (5) for moving the closing member (3), and a control device (9) by which the ac...	03/27/2012
8132782	Method for controlling or regulating a vacuum valve A method for controlling or regulating a vacuum valve that includes: a valve body (1) with a valve opening (2); a closing member (3) that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum ...	03/13/2012
8097084	Vacuum chamber system for semiconductor processing A vacuum chamber system for semiconductor processing includes at least two evacuable vacuum chambers for receiving semiconductor elements to be processed, each including a vacuum chamber opening and a vacuum chamber sealing surface, and transfer aspects by which one...	01/17/2012
8002238	Valve having a sealing member A valve has a closure member for closing a valve orifice, particularly so as to be tight against gas, in a closed position of the closure member. The closure member can be moved in a closing process by at least one actuator starting from a first position of maximum ...	08/23/2011
7980529	Vacuum gate valve having a limb element A vacuum gate valve includes a closure disk for gas-tight closing of an opening. A connecting rod with which the closure disk is coupled is linearly adjustable by means of a linear drive unit and the closure disk is thus displaceable between a position uncovering th...	07/19/2011
7959130	Vacuum valve and closure plate for a vacuum valve The invention relates to a vacuum valve for gas-tight sealing of a flow path, comprising at least one thrust rod, which has a cylindrical connecting section, and a closure plate which is removably mounted on the thrust rod and has at least one concave, semicircular ...	06/14/2011
7802772	Pendulum and slide gate vacuum valve The invention relates to a valve, in particular a pendulum or slide gate valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1) having a first wall (2) which has a first opening (3) and a first valve s...	09/28/2010
7762527	Vacuum valve A vacuum valve comprises a valve body with a valve opening, a valve plate which is adjustable from an open position, in which it releases the valve opening, to an intermediate position, in which it covers the valve opening but is lifted from the valve seat, into a c...	07/27/2010
7731156	Vacuum valve A vacuum valve including a valve housing two valve openings, a closure member having two closure plates, a transverse drive unit for adjusting the closure member between an open position and an intermediate position where the closure plates cover the valve openings,...	06/08/2010
7658367	Valve essentially gastight closing of a flow path The invention relates to a valve, in particular a pendulum or slide gate valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1; 1a) having a first wall (2) which has a first opening (3) and a fi...	02/09/2010
7611122	Closure device for the vacuum-tight closing of an opening in a wall A closure device for closing an opening in a wall in a vacuum-tight manner comprises a closure plate, a carrying unit which carries the closure plate and which has at least one longitudinal piston-cylinder unit, and a base unit which carries the carrying unit and ha...	11/03/2009
7481417	Vacuum valve A vacuum valve comprises a conical sealing surface arranged at a valve body, a valve disk at which a conical sealing surface is arranged, and a sealing ring having a first sealing surface and a second sealing surface. The valve disk, the valve body and the sealing r...	01/27/2009
7413162	Vacuum valve A vacuum valve comprises a valve housing which has an inlet opening and an outlet opening, a valve disk which is located in the interior space of the valve housing and which is arranged at a carrying arm that is rigidly connected to a shaft which, for purposes of op...	08/19/2008
7396001	Valve for essentially gastight closing a flow path The invention relates to a valve, in particular a shuffle or sliding valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1;1a) having a first wall (2) which has a first opening (3) and a first valve se...	07/08/2008
7228687	Valve device A valve device, according to the invention, for connecting to a cryopump, wherein the valve device comprises a body with a through-channel and a connection flange at one end of the through-channel for connecting to a backing pump connection flange of the cryopump; a...	06/12/2007
7134642	Vacuum gate valve The invention provides a vacuum gate valve for closing off an opening. The vacuum gate valve can have a valve plate that can be turned so that the alignment of the valve plate will adapt to a valve seat when the valve plate is pressed against the valve seat. ...	11/14/2006
7036794	Method for control of a vacuum valve arranged between two vacuum chambers A method for controlling a vacuum valve arranged between two vacuum chambers comprises a valve body with a valve opening, a closure member which closes the valve opening in a closed state of the vacuum valve and which releases the valve opening in an open state of t...	05/02/2006
7011294	Vacuum valve A vacuum valve comprises a valve housing with a valve opening having a longitudinal axis and a valve seat, a valve plate which is displaceable in a straight line in a displacement direction between an open position in which it releases the valve opening and a closed...	03/14/2006
6994311	Regulating vacuum valve A regulating vacuum valve comprises a valve body with a through-channel a closure member which is adjustable over a control path between a closed position of the regulating vacuum valve in which it contacts a valve seat and closes the through-channel and an open pos...	02/07/2006
6994317	Regulating vacuum valve A regulating vacuum valve comprises a valve housing with a through-channel, first and second valve plates which lie in adjacent and parallel planes and are mounted so as to be adjustable in their planes and can be moved into the through-channel from different sides ...	02/07/2006
6916009	Load-lock device for introducing substrates into a vacuum chamber A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space loc...	07/12/2005
6902145	Regulating slide valve Regulating slide valve comprising a valve body having a valve opening, and a valve plate which has two side surfaces and which is displaceable along a displacement path between an initial position in which it releases the valve opening and an end position in which i...	06/07/2005
6899316	Closure device for vacuum closure of at least one opening in a wall A closure device for a vacuum closure of at least one opening in a wall having a valve place, at least one piston-cylinder unit, at least one carrier unit, at least one cylinder bore hole, at least two sealing rings, and a line. The valve plate is associated with an...	05/31/2005
6698719	Seal arrangement for a vacuum valve A seal arrangement for a vacuum valve with a valve body in which is arranged a valve opening having a longitudinal axis and which has an inner jacket surface surrounding the valve opening and forming a valve seat, and with a valve plate which closes the v...	03/02/2004
6685163	Vacuum valve A vacuum valve comprises a valve body with a valve opening having an axis a closing member which is displaceable between an open position of the valve and a closed position of the valve in a closing direction extending at an angle to the axis of the valve...	02/03/2004
6629682	Vacuum valve A vacuum valve comprises a wall with a valve opening and a valve seat, a valve plate which is pressed against the valve seat in the closed state, an elastic sealing ring which is arranged at the valve plate or at the valve seat and, in the closed state of...	10/07/2003
6543748	Linear motion leadthrough A linear motion leadthrough for a rod which has a first end, a second end and an outer surface and whose first end projects into a vacuum area of a vacuum installation while its second end is located outside of the vacuum area, comprises: a bushing which ...	04/08/2003
6494434	Butterfly valve A butterfly valve comprises a valve housing with a valve opening and a valve seat, this valve housing enclosing a vacuum area of the valve; a valve plate which is mounted at a valve rod guided through the valve housing and which is pressed against the val...	12/17/2002
6485007	Diaphragm bellows device A diaphragm bellows device comprises a diaphragm bellows with a plurality of successive diaphragms which are welded together alternately at the outer and inner edges, wherein the length of the diaphragm bellows can be adjusted between an expanded state an...	11/26/2002
6471181	Suspension of a valve plate of a vacuum valve A suspension of a valve plate of a vacuum valve at a valve rod has a bearing block of rubber-elastic material with first and second side surfaces, one of which side surfaces is fastened to the valve rod or to a plate which is rigidly connected with the la...	10/29/2002
6431518	Vacuum valve A vacuum valve comprises a valve opening which is provided in a valve housing and can be closed by a valve plate arranged at least one valve rod, at least a first piston-cylinder unit by which the valve plate is displaceable from its open position releasi...	08/13/2002
6416037	Vacuum pipe A vacuum pipe for a part which is mounted so as to be movable and projects from outside a vacuum chamber into a vacuum in the vacuum chamber, comprises an opening in a wall of the vacuum chamber limiting the vacuum, with an inner side facing the vacuum an...	07/09/2002
6367770	Vacuum valve for separating two vacuum chambers A vacuum valve for separating two vacuum chambers and including a valve body having an opening and a valve seat having two sealing surfaces encompassing the valve opening, and a valve slide including a closing member displaceable transverse displaceable t...	04/09/2002
6357475	Pneumatic sequential control valve A pneumatic sequential control valve for successive aeration and deaeration of two consumers, wherein for purposes of aeration compressed air is initially applied to the first consumer and only subsequently to the second consumer, and for deaeration the c...	03/19/2002
6056266	Device for closing an opening of a tank or a tubular conduit A device for closing an opening of a tank or a tubular conduit and including a plate for closing the opening and movable substantially perpendicular to a plane of the opening toward the opening to be pressed against a wall in which the opening is formed a...	05/02/2000
5909867	Closing assembly for a chamber having a through-opening A closing assembly for a chamber including, a housing-like member, a closing plate displaceable in the housing-like member for closing the chamber through-opening, and a drive unit for displacing the closing plate, with the housing-like member having two ...	06/08/1999
5873562	Control apparatus for controlling gas flow in a molecular region A control apparatus for controlling gas flow in a molecular region including a housing, having a through-channel, and a control plate displaceable in its plane between an open position, in which the plate is located sidewise of the through-channel, and a ...	02/23/1999
5577707	Slide valve A slide valve including a housing having a flow channel, a slide plate for controlling flow through the channel, and a seal ring surrounding the flow channel and engaging the slide plate in its closed position and disengageable from the slide plate in its...	11/26/1996
5379983	Shut-off valves for pipelines A shut-off slide valve for use in pipelines or for closing a container aperture includes a housing, a shut-off member formed of a sealing plate and a counter element spaced from the sealing plate and displaceable in the housing, and an actuation member fo...	01/10/1995

«First «Previous1 2 Next»Last»

PatentStorm

Quotables

PatentStorm News

Assignee: VAT Holding AG