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Assignee: Unit Instruments, Inc.


Location: YorbaLinda, CA
No. of patents: 16

NumberTitleIssue Date
6539792Method and apparatus for balancing resistance
A sensor that includes a first resistor, a second resistor, a first circuit, and a second circuit. The first and second resistors each has a resistance that varies in response to a change in a physical property. The first circuit is electrically coupled t...
04/01/2003
6474700Gas panel
A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral w...
11/05/2002
6435215Gas panel
A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral w...
08/20/2002
6425281Pressure insensitive gas control system
A pressure insensitive gas process device that includes a gas sensor and restrictions upstream and downstream of the gas sensor. The restrictions result in pressure drops upstream and downstream of the gas sensor which shield the gas sensor from upstream ...
07/30/2002
6394138Manifold system of removable components for distribution of fluids
A manifold system for enabling a distribution of fluids includes a plurality of individual manifold blocks that can be joined together to form a gas stick. Each manifold block will have a fluid passage way with an entrance port and exit port accessing a c...
05/28/2002
6374859Manifold system for enabling a distribution of fluids
A manifold system for incorporation in a gas panel distribution system for semi-conductor manufacturing includes a plurality of individual manifold blocks with each manifold block having a fluid passageway with an entrance and exit port accessing a common...
04/23/2002
6293310Gas panel
A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral w...
09/25/2001
6192938Gas panel
A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral w...
02/27/2001
6189570Gas panel
A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral w...
02/20/2001
6142539Gas panel
A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral w...
11/07/2000
6044701Thermal mass flow controller having orthogonal thermal mass flow sensor
A thermal mass flow controller having a thermal mass flow meter with an orthogonal thermal mass flow sensor includes a base defining a primary fluid flow path therein for carrying a flow of fluid to be metered. A pressure dropping bypass is positioned in ...
04/04/2000
5992463Gas panel
A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral w...
11/30/1999
5925829Method and apparatus for determining a rate of flow of gas by a rate of change of pressure
Method and apparatus for determining a mass rate of flow of gas by a rate of change of pressure includes an inlet for communicating a flow of gas from a source of gas whose mass flow rate is to be measured. A volumetric container is connected to the gas i...
07/20/1999
5803507Apparatus for handling process fluid
Apparatus for handling process fluid, that is a meter includes a mass flow meter block. A deformable metal seal is positioned between the mass flow meter block and a thermal mass flow sensor in deformable engagement with a pair of edges formed thereon to ...
09/08/1998
5730181Mass flow controller with vertical purifier
A mass flow controller and purifier has a canister arranged at right angles to a flow path through the mass flow controller. The canister holds a contaminant scavenging material which a gas stream contacts as it flows to remove a contaminant such as water...
03/24/1998
5303731Liquid flow controller
A liquid flow controller for metering a flow of liquid has an inlet to receive the liquid. The inlet feeds the liquid to a high resistance liquid flow path across which a pressure drop arises. A pressure sensor measures the liquid flow induced pressure dr...
04/19/1994
 
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