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Assignee: Tokyo Seimitsu Co., Ltd.


Location: Mitaka-shi, Tokyo, JP
No. of patents: 6

NumberTitleIssue Date
7870757Liquid discharge method and liquid discharger in temperature controller
There is disclosed a liquid discharge method in a temperature controller having a refrigerant circulation line circulating a refrigerant to a target of temperature control and a heater heating the target, wherein the refrigerant is circulated so as to control the te...
01/18/2011
7434588Spin cleaning and drying apparatus and method of spin cleaning and drying
The present invention provides a spin cleaning and drying apparatus of single-wafer processing type which cleans a substrate with a cleaning liquid from a rinse nozzle while rotating the substrate and dries the substrate after cleaning while rotating the substrate, ...
10/14/2008
7370895Work transfer device and method of transferring work
Provided are a work transfer device and a method of transferring work which are capable of safely transferring work without letting the work to fall even when poor adhesion of a frame occurs due to troubles. By providing an adsorption part which adsorbs a frame, and...
05/13/2008
7370841Rocking fulcrum member
The crisscross fulcrum according to the present invention is formed as a continuous member by fabricating one elastic member in the form of a plate. Therefore, the rocking fulcrum member can be obtained as a precise fulcrum member at a low cost with reduced variatio...
05/13/2008
7354337Pad conditioner, pad conditioning method, and polishing apparatus
The present invention provides: a pad conditioner for dressing a surface of a polishing pad which is used in a polishing apparatus for polishing works, comprising a bending or deflecting or elastic member and a supporting section to support a base end of the bending...
04/08/2008
7239050Uniaxial drive unit and surface shape measuring apparatus using the same
There is provided a uniaxial drive unit using a linear motor having a fixed part which is a rod-shaped magnet fixed to a unit body and formed so that the N poles and the S poles are arranged alternately; and a moving part which is a ring-shaped member having a coil ...
07/03/2007
 
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