Assignee: Spatial Photonics, Inc.

Location: Sunnyvale, CA
No. of patents: 36

Number	Title	Issue Date
8179401	Reducing image artifacts in a color sequential display system Methods, systems, and apparatus, including computer program products, for reducing artifacts in a color sequential display system. A frame of a digital image is displayed by receiving frame data, determining dither patterns, applying the dither patterns to the data,...	05/15/2012
8134770	Reducing speckle pattern in display images A display system includes a coherent light source that can emit a coherent light beam, a de-speckling device configured to distort a wavefront of the coherent light beam to produce a distorted coherent light beam, and a two-dimensional array of light modulators that...	03/13/2012
8087787	Maximizing performance of an electronic device by maintaining constant junction temperature independent of ambient temperature Methods and apparatus are disclosed for maximizing performance of an electronic device, such as a display device. Aspects of the exemplary embodiments include operating the electronic device by adjusting power to the device to maintain a predetermined junction tempe...	01/03/2012
7938547	Coherent light display system A display system includes a coherent light source that can emit a coherent light beam, an optical component that can direct the coherent light beam to a spatial light modulator, a transport mechanism that can move the optical component to produce a movement in the c...	05/10/2011
7903104	Spatial modulator display system using two memories and display time slices having differing times A spatial light modulator having two static random access memory (SRAM) devices, including a display controller configured with a display sequence, the display sequence including a first display slice and a second display slice, the first display slice having a disp...	03/08/2011
7821010	Low temperature fabrication of conductive micro structures A method of fabricating a micro structure includes depositing amorphous silicon over a substrate having an electric circuit at a temperature below 550° C. to form a first structure portion, wherein at least part of the first structure portion is configured to recei...	10/26/2010
7800810	Packaging and testing of multiple MEMS devices on a wafer A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the el...	09/21/2010
7763962	Wafer-level packaging of micro devices An encapsulated device includes a micro device on a substrate, a cover bonded to the substrate thereby forming a chamber to encapsulate the micro device, and a desiccant material on the cover and in the chamber. An anti-stiction material is absorbed in the desiccant...	07/27/2010
7715077	Micro mirrors having a mirror plate with interdigitated arms A micro mirror device includes a first hinge supported by a substrate, a mirror plate tiltable around the first hinge and having a first set of arms facing the substrate, and a second set of arms on the substrate. The first set of arms and the second set of arms can...	05/11/2010
7709940	Micro device encapsulation A packaged die includes a substrate having an upper surface and a micro device on the upper surface and an encapsulation cover comprising one or more grooves on its lower surface. The lower surface of the encapsulation cover and the upper surface of the substrate ar...	05/04/2010
7667885	Spatial light modulator A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate. ...	02/23/2010
7652384	Fabricating tall micro structures A micro structure includes a seed electrode layer on a substrate and a plurality of conductive layers on the seed electrode layer. The combined thickness of the seed electrode layer and the plurality of conductive layers can be more than 0.1 mm and the lateral dimen...	01/26/2010
7618835	Fabricating a spatial light modulator A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate. ...	11/17/2009
7586669	Non-contact micro mirrors A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge is configured to produce an elastic restoring force on the mirror plate when the mirror plate is tilted away from an un-tilted position. The micro...	09/08/2009
7557435	Micro-device encapsulation having light and moisture control An encapsulated micro device includes a micro device on a substrate within a chamber, a transparent encapsulation cover in part defining the chamber, an opaque layered structure on the encapsulation cover and inside the chamber. The layered structure includes an ope...	07/07/2009
7538932	High contrast spatial light modulator A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro mirror array with a high electrostatic efficiency and low surface adhesion control substrate. ...	05/26/2009
7538922	Encapsulated spatial light modulator having improved performance Devices and methods for forming a spatial light modulator with high contrast are described. Light absorbing materials are used within a chamber that houses a spatial light modulator. The light absorbing materials absorb reflected light that is not intended for formi...	05/26/2009
7508569	Low voltage micro mechanical device Methods for driving a plurality of MEMS devices in an apparatus are described. A voltage pulse is applied to an electrode or a structure portion of a MEMS device. The electrode is on the substrate underneath the structure portion. At least two MEMS devices of the pl...	03/24/2009
7483200	Multiple stop micro-mirror array display A micro mirror device is described. The device has a tiltable mirror plate with a reflective surface configured to reflect incident light to form a reflected light beam. A controller is configured to cause the mirror plate to tilt from an un-tilted position to an �...	01/27/2009
7471445	Fast-response micro-mechanical devices A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface, and a substrate portion comprising a cavity having an opening on the lower surface, a substrate comprising an upper surface, a hinge support post in connection ...	12/30/2008
7471440	Fabricating micro devices using sacrificial materials A method of fabricating a tiltable micro mirror plate includes forming a substrate comprising an upper surface and a hinge support post in connection with the upper surface, disposing over the substrate a first sacrificial material selected from the group of amorpho...	12/30/2008
7468830	In SITU application of anti-stiction materials to micro devices A method for applying anti-stiction material to a micro device on a substrate includes introducing anti-stiction material on a surface of an encapsulation device or a surface of the substrate and sealing at least a portion of the encapsulation device to the surface ...	12/23/2008
7453621	Micro mirrors with piezoelectric release mechanism A spatial light modulator includes a substrate; a hinge in connection with the substrate; a mirror plate that is connected with the hinge and is configured to tilt about the hinge; and a piezoelectric device coupled with the substrate. The piezoelectric device is co...	11/18/2008
7443572	Fast-response spatial light modulator A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface, and a cavity having an opening on the lower surface; a substrate comprising an upper surface, a hinge support post in connection with the upper surface, and a h...	10/28/2008
7428092	Fast-response micro-mechanical devices A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface having a conductive surface portion, and a substrate portion having a first cavity having an opening on the lower surface, a second cavity in the substrate porti...	09/23/2008
7423798	Addressing circuit and method for bi-directional micro-mirror array A control substrate of spatial light modulator for a bi-directional micro mirror array includes a plurality of unit cells, each includes a common electrode at a fixed constant potential and an addressing electrode under the mirror plate on opposite sides of a pivot ...	09/09/2008
7416908	Method for fabricating a micro structure A method for fabricating a micro structure includes depositing a first layer of a first material over a substrate; patterning a first hard mask over the first layer; depositing a second layer of a second material over the first layer and the first hard mask; pattern...	08/26/2008
7405862	Spatial light modulator having a cantilever anti-stiction mechanism A spatial light modulator includes a mirror plate comprising a reflective upper surface, a louver surface having a recess in the lower surface, a first cavity having an opening on the lower surface, and a cantilever situated under the recess and connected with the l...	07/29/2008
7394586	Spatial light modulator A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate. ...	07/01/2008
7391556	Ultra-thin display system A display system includes a transparent tapered plate comprising a first face, a second face, and a third face. The first face is substantially smaller than the second face and the third face. The display system also includes a row of tiltable mirror plates each com...	06/24/2008
7391554	High fill-ratio mirror-based spatial light modulator A spatial light modulator includes a two-dimensional array of hexagonal mirror plates disposed in a honeycomb pattern over a substrate. Each of the hexagonal mirror plates is supported by one or more structural members. There is a gap between adjacent hexagonal mirr...	06/24/2008
7388708	Spatial light modulator multi-layer mirror plate A spatial light modulator having a multi-layer mirror is described. ...	06/17/2008
7388707	High-resolution spatial light modulation Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror that includes a...	06/17/2008
7307777	High-resolution spatial light modulation Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror. The micro mirr...	12/11/2007
7245415	High contrast spatial light modulator A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro mirror array with a high electrostatic efficiency and low surface adhesion control substrate. ...	07/17/2007
7167298	High contrast spatial light modulator and method A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate. ...	01/23/2007

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Assignee: Spatial Photonics, Inc.