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Assignee: Silicon Light Machines Corporation


Location: San Jose, CA
No. of patents: 34

NumberTitleIssue Date
7529017Circuit and method for snapdown prevention in voltage controlled MEMS devices
A circuit and method are provided for preventing snapdown in a voltage controlled Micro-Electromechanical System device having a movable actuator with an actuator electrode coupled to a first potential, the actuator suspended over a cavity electrode coupled to a sec...
05/05/2009
7527755Method for increasing bulk conductivity of a ferroelectric material such as lithium tantalate
In one embodiment, a ferroelectric material is processed by placing the material in an environment including metal vapor and heating the material to a temperature below the Curie temperature of the material. This allows the bulk conductivity of the ferroelectric mat...
05/05/2009
7502157Multi-layer spatial light modulator for amplitude and phase control
One embodiment relates to a method of independently controlling amplitude and phase modulation by a spatial light modulator. Light is illuminated onto upper layer deflectable planar areas and lower layer deflectable planar areas over a substrate of the spatial light...
03/10/2009
7466022Wafer-level seal for non-silicon-based devices
One embodiment disclosed relates to a method for sealing an active area of a non-silicon-based device on a wafer. The method includes providing a sacrificial material over at least the active area of the non-silicon-based device, depositing a seal coating over the w...
12/16/2008
7463403High impedance drive circuit for a micro-electromechanical system device
A driver is provided for use with a MEMS device. Generally, the driver includes: (i) a high voltage circuit electrically coupled to a movable actuator of the MEMS to apply a HV pulse thereto; and (ii) a charge control circuit coupled to a base electrode formed in a ...
12/09/2008
7405389Dense multi-axis array for motion sensing
The present disclosure describes an optical displacement sensor having a dense multi-axis array of photosensitive elements. Generally, the sensor includes a two dimensional array of multiple photosensitive elements. In one embodiment, the array includes multiple lin...
07/29/2008
7391973Two-stage gain equalizer
An apparatus for selectively adjusting power levels of component signals of a wavelength division multiplexed signal. The apparatus comprises a first filter and a second filter. The first filter modulates the component signals according to a static attenuation profi...
06/24/2008
7359106Diffractive light modulator having continuously deformable surface
A light modulator and a method of manufacturing the same are provided having a continuously deformable optical surface. Generally, the modulator includes a substrate, a membrane disposed above and spaced apart from an upper surface of the substrate, the membrane hav...
04/15/2008
7330038Interleaved MEMS-based probes for testing integrated circuits
In one embodiment, a probe card includes a substrate and a plurality of probes. Each of the probes may have a supported portion and an unsupported portion that meet at a base. The unsupported portion may have a non-uniform (e.g. triangular) cross-section along a len...
02/12/2008
7310180Dielectric spacer for enhanced squeeze-film damping of movable members of MEMS devices
In one embodiment, a capacitive micro electro-mechanical systems (MEMS) device includes a dielectric spacer between a bottom electrode and a movable member. The movable member may serve as a top electrode. A gap separates the top electrode from the dielectric spacer...
12/18/2007
7297912Circuit and method for reducing power consumption in an optical navigation system having redundant arrays
A circuit and method are provided for reducing power consumption in an optical navigation system for use in an input device to sense displacement of the device relative to a surface. Generally, the system includes: (i) an optical sensor having at least first and sec...
11/20/2007
7298460Method for determining motion using a velocity predictor
A method is provided for determining motion of an optical sensor including a periodic photo-diode array relative to a surface. The method includes steps of (i) generating sets of quasi-sinusoidal signals responsive to motion along first and second directions; (ii) c...
11/20/2007
7288424Integrated driver process flow
An integrated device includes one or more device drivers and a micro-electro-mechanical system (MEMS) structure monolithically coupled to the one or more device drivers. The one or more device drivers are configured to process received control signals and to transmi...
10/30/2007
7286764Reconfigurable modulator-based optical add-and-drop multiplexer
An optical add and drop multiplexer system comprising a first module for providing a first signal; a second module for providing a second signal; and a modulator for receiving a channel of the first signal at a first location, the first location configured to actuat...
10/23/2007
7286155Optical engine using one-dimensional MEMS device
In one embodiment disclosed, an optical engine includes a light modulator coupled to illumination optics and imaging optics. The light modulator may be located at about an object plane. The imaging optics may include a scanner and a spatial filter located at about a...
10/23/2007
7285766Optical positioning device having shaped illumination
One embodiment relates to an optical displacement sensor for sensing relative movement between a data input device and a surface by determining displacement of optical features in a succession of frames. The sensor includes an illuminator and a detector. The illumin...
10/23/2007
7277110Laser-based thermal printer
One embodiment described pertains to a thermal printer is provided having a spatial light modulator (SLM) to modulate light from a laser source to record information on a thermal-sensitive surface of a recording medium, and a heater adjacent to the medium to preheat...
10/02/2007
7268341Optical position sensing device including interlaced groups of photosensitive elements
One embodiment described relates to an optical displacement sensor for sensing movement of a data input device across a surface by detecting displacement of optical features in a succession of images of the surface. The sensor includes a detector having an array inc...
09/11/2007
7250893Signal processing circuit and method for use with an optical navigation system
A signal processing circuit and processing method are provided for measuring an analog signal from a photo-detector. Generally, the method includes steps of: (i) sampling and storing a characteristic of the signal at a first predetermined time following a reset of t...
07/31/2007
7248345Signal processing method for use with an optical navigation system
A signal processor and method are provided for detecting movement of a surface relative to an optical sensor having an array of photosensitive elements. Generally, the method involves: (i) sampling each of a number (M) of phase signals from the photosensitive elemen...
07/24/2007
7248278Apparatus and method for laser printing using a spatial light modulator
The disclosure relates to a printing system having a linear diffractive spatial light modulator (LDSLM) assembly that diffracts light from a laser source according to or under the influence of an applied electric field applied to the LDSLM assembly. In one embodimen...
07/24/2007
7247832Signal processing circuit and method using analog voltage signal to pulse width modulation conversion
A signal processor and processing method are provided for measuring current received from a photo-detector. Generally, the processor includes a transimpedance amplifier (TIA) to integrate a current received from a photo-detector in the optical navigation system to g...
07/24/2007
7244631MEMS surface modification for passive control of charge accumulation
In one embodiment, a method of treating a surface of a Micro-Electromechanical System (MEMS) device reduces or eliminates performance degradation due to charge migration and accumulation. Briefly, the method may include treating a dielectric surface of the MEMS devi...
07/17/2007
7233443Arrangement for WDM multiplexing and demultiplexing
An arrangement for dispersing light comprises a blazed diffraction grating and a mirror. The blazed diffraction grating comprises a grating plane and a multiplicity of blazed facets. Each blazed facet is oriented at a blaze angle to the grating plane. The mirror cou...
06/19/2007
7227687Complex spatial light modulator
One embodiment relates to a spatial light modulator (SLM) for modulating light incident thereon. The SLM includes a plurality of pixels, each pixel including a plurality of phase shift elements. The SLM also includes a transform filter adapted to control the imaging...
06/05/2007
7218336Methods and apparatus for driving illuminators in printing applications
A method of providing drive signals to an illuminator module having a plurality of channels in a printing application. Binary image data including image bits is provided from a data source to the illuminator module. Each image bit is converted to a multi-bit amplitu...
05/15/2007
7215461MEMS devices with increased damping for suspended movable structures
In one embodiment, a light modulator includes a substrate and a number of modulator elements disposed above and spaced apart from the substrate. Each modulator element has an optically active portion adapted to receive light incident thereon, and a support portion o...
05/08/2007
7202988Diffractive light modulator
In one embodiment disclosed, a light modulator can be configured to have a substantially flat optically active modulator element portion while deflected. The modulator can include a plurality of modulator elements arranged substantially in parallel, with each modula...
04/10/2007
7183637Microelectronic mechanical system and methods
The current invention provides for encapsulated release structures, intermediates thereof and methods for their fabrication. The multi-layer structure has a capping layer, that preferably comprises silicon oxide and/or silicon nitride, and which is formed over an et...
02/27/2007
7177081High contrast grating light valve type device
A grating light valve has with a plurality of spaced reflective ribbons are spatially arranged over a substrate with reflective surfaces. The grating light valve is configured to optimized the conditions for constructive and destructive interference with an incident...
02/13/2007
7161518Method and apparatus for driving two-dimensional modulator arrays
In one embodiment, a micro electromechanical system (MEMS) driver circuit receives a pulse-width modulated (PWM) signal and uses it to control a voltage at a MEMS cell. The driver circuit further includes a current source, a capacitor, and a reset circuit that can d...
01/09/2007
7138620Two-dimensional motion sensor
An optical sensor and method of using the same is provided for sensing relative movement between the sensor and a surface by detecting changes in optical features of light reflected from the surface. In one embodiment, the sensor includes a two dimensional array of ...
11/21/2006
7123399Micro-support structures
A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one o...
10/17/2006
7106417Tiling of modulator arrays
In one embodiment, a pixel arrangement may be configured for a maskless lithography application using at least two array tiles, where each array tile includes a two-dimensional array with substantially equally-spaced pixels. A preferred embodiment includes two 500×...
09/12/2006
 
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