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| Number | Title | Issue Date |
| 8156761 | Method for producing quartz glass using a mixed powder A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element sel... | 04/17/2012 |
| 7997956 | Quartz glass tool for heat treatment of silicon wafer and process for producing the same To provide a quartz glass tool, for silicon wafer heat treatment, having a transparent grooving face, which is free from the deposition of particles of a transition metal element foreign material derived from glass dust or diamond blade produced by breakdown of acut... | 08/16/2011 |
| 7993556 | Method for making a silica glass crucible A rotating mold has a plurality of air channels that communicate with a cavity formed in the mold. Silica grain is deposited in the rotating mold and then formed into the shape of a crucible having a lower portion that comprises a substantially uniformly thick wall.... | 08/09/2011 |
| 7841211 | Production process of synthetic quartz glass First of all, there is provided a production process of a synthetic quartz glass which has less impurity, has a high-temperature viscosity characteristic equal to or more than that of a natural quartz glass, and hardly deforms even in a high-temperature environment,... | 11/30/2010 |
| 7790078 | Process for producing silica glass product A process for producing a transparent or opaque silica glass product including mixing a silica fine powder and a cellulose derivative and injection molding the mixture, followed by degreasing treatment and baking treatment, which is characterized in that the cellulo... | 09/07/2010 |
| 7716948 | Crucible having a doped upper wall portion and method for making the same A fused glass crucible includes a collar of doped aluminum silica that defines uppermost and outermost surfaces of the crucible. The melt line that defines the surface of molten silicon in the crucible may be substantially at the lower end of the collar or slightly ... | 05/18/2010 |
| RE41249 | Quartz glass body having improved resistance against plasma corrosion, and method for production thereof An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gas... | 04/20/2010 |
| 7686887 | Quartz glass crucible for pulling up silicon single crystal and method for producing the same An object of the invention is to provide a quartz glass crucible reduced in the generation of vibration occurring on the surface of a silicon melt and free from the generation of rough surface and cristobalite spots, yet capable of pulling up single crystal silicon ... | 03/30/2010 |
| 7661277 | Quartz glass having excellent resistance against plasma corrosion and method for producing the same As a jig material to use under plasma reaction for producing semiconductors, the present invention provides a quartz glass having resistance against plasma corrosion, particularly corrosion resistance against fluorine-based plasma gases, and which is usable without ... | 02/16/2010 |
| 7587912 | Method for producing quartz glass crucible for use in pulling silicon single crystal and quartz glass crucible produced by said method The present invention refers to a method for producing a quartz glass crucible for use in pulling silicon single crystal, said crucible having at least a double-layer structure comprising a pore-free transparent inner layer and an opaque base body or outer layer hav... | 09/15/2009 |
| 7365037 | Quartz glass having excellent resistance against plasma corrosion and method for producing the same As a jig material to use under plasma reaction for producing semiconductors the present invention provides a quartz glass having resistance against plasma corrosion, particularly corrosion resistance against fluorine-based plasma gases, and which is usable without c... | 04/29/2008 |
| 7312170 | Optical synthetic quartz glass and method for producing the same The present invention provides an optical synthetic quartz glass material which substantially does not cause changes in transmitted wave surface (TWS) by solarization, compaction (TWS delayed), rarefaction (TWS progressed) and photorefractive effect when ArF excimer... | 12/25/2007 |
| 7299658 | Quartz glass crucible for the pulling up of silicon single crystal A quartz glass crucible for use in pulling up a silicon single crystal, wherein it has, at least in the curved portion thereof, a three-layer structure comprising a transparent inner layer being composed of a synthetic quartz glass and having a low Al concentration,... | 11/27/2007 |
| 7288775 | Synthetic quartz glass optical material for YAG laser with higher harmonic It is an object of the present invention to provide synthetic quartz glass optical materials suitable for use in YAG of higher order harmonics. The damage threshold value in J/cm2 (energy density at which cracks occur generated by irradiation) is to be co... | 10/30/2007 |
| 7198247 | Mandrel for producing quartz glass and production method for optical fiber mother material, optical fiber and quartz glass body using the same A mandrel for producing a large quartz glass body, comprising at least two columnar or cylindrical, carbon fiber-reinforced carbon composite members and joined in series by screw thread parts, wherein preferably the contact surface of the screw thread parts of the m... | 04/03/2007 |
| 7111477 | Production method of optical synthetic quartz glass, optical synthetic quartz glass, and annealing furnace An object is to provide a method for producing an optical synthetic quartz glass and an optical synthetic glass, having a birefringence of lower than 0.5 nm/cm and having favorable refractive index distribution, yet without lowering the productivity, as well as to p... | 09/26/2006 |
| 7094049 | Quartz glass single hole nozzle for feeding fluid and quartz glass multi-hole burner head for feeding fluid The present invention provides a quartz glass single hole nozzle for feeding fluid capable of performing high-precision control of a flow rate, a burner for heat processing equipped with the quartz glass single hole nozzle, a quartz glass multihole burner head for f... | 08/22/2006 |
| 7093465 | Method for heat treating synthetic quartz glass for optical use An object of the present invention is to overcome the problems of the prior art technique, and to provide a heat treatment method as well as a heat treatment apparatus capable of heat treating, with higher efficiency, a synthetic quartz glass for optical use having ... | 08/22/2006 |
| 7074731 | Method for producing hydrogen-doped silica powder, hydrogen-doped silica powder obtained from that method for use in a quartz glass crucible It is an object of the present invention to provide a hydrogen-doped silica powder that is useful in the formation of a quartz glass crucible that is capable of pulling a silicon single crystal without causing a state having dislocations in the silicon single crysta... | 07/11/2006 |
| 7015163 | Glass member resistant to plasma corrosion It is an object of the present invention to provide a glass member resistant against plasma corrosion suitably used as a jig material in producing semiconductors, which exhibits excellent resistance against plasma corrosion, and which is free from the generation of ... | 03/21/2006 |
| 7007510 | Method of producing an optical member An object of the present invention is to provide an improved blank such that an optical member of a high homogeneity can be obtained therefrom, and to provide a vessel and a heat treatment method for heat-treating a highly uniform synthetic quartz blank. In a first ... | 03/07/2006 |
| 6887576 | Quartz glass body having improved resistance against plasma corrosion, and method for production thereof An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gas... | 05/03/2005 |
| 6869898 | Quartz glass jig for processing apparatus using plasma An object of the present invention is to provide a quartz glass jig, which, when employed in a processing apparatus using plasma, is less in generation of abnormal etching and particles and low in contamination with impurities. This object is obtained by a quartz gl... | 03/22/2005 |
| 6849242 | Porous silica granule, method for producing the same, and method for producing synthetic quartz glass powder using the porous silica granule The granule consists of individual granules approximately spherical in shape, having a pore volume of 0.5 cm3, a mean diameter of pores of 50 nm or less, a specific surface area of 100 m2/g or less, and a bulk density of 0.7 g/cm3 or... | 02/01/2005 |
| 6841210 | Multilayer structured quartz glass crucible and method for producing the same Disclosed is a multilayer structured quartz glass crucible, for pulling up silicon single crystal, whose structure has at least three layers comprising: a translucent outer layer made of naturally occurring quartz glass and having a large number of pores, a transluc... | 01/11/2005 |
| 6810687 | Method for producing synthetic quartz glass members for excimer lasers In the light of the disadvantages of the prior art technology, an object of the present invention is to provide a method for producing a synthetic quartz glass member for excimer lasers, which comprises, while suppressing the generation of reductive defects which im... | 11/02/2004 |
| 6796439 | Vertical type wafer supporting jig In a vertical type wafer supporting jig, a ring-like support plate is fixed to support pillars by a simple structure without conventional welding and without risk of the ring-like support plate falling off. The vertical type wafer supporting jig is configured for mo... | 09/28/2004 |
| 6761951 | Synthetic quartz glass blank A cylindrical, chlorine-free synthetic quartz glass blank of a specific size obtained by homogenizing a synthetic quartz glass ingot having periodic striae along a direction of growth has (a) striae grades in the working and off-axis directions which meet grade A of... | 07/13/2004 |
| 6723386 | Fluororesin-coated quartz glass jig and method for producing the same An object of the present invention is to provide a fluororesin-coated quartz glass jig free from peeling off of fluororesin coating on using hydrofluoric acid or from generating particles due to the etching of quartz glass, while yet preventing the generation of chi... | 04/20/2004 |
| 6689705 | Synthetic quartz glass optical material and optical member An object of the present invention is to provide a synthetic quartz glass optical material having a high optical transmittance for a radiation 157 nm in wavelength emitted from F2 excimer laser and a high resistance against irradiation of a F | 02/10/2004 |
| 6608309 | Method for measuring concentration of trace amount of OH-groups contained in quartz glass A method for measuring trace quantities of OH groups in quartz glass comprises preparing a set of test pieces comprising a reference test piece from a blank of a quartz glass body whose OH group content is known and a sample test piece from a quartz glass... | 08/19/2003 |
| 6595845 | Outer-diameter blade, inner-diameter blade, core drill and processing machines using same ones The present invention relates to an outer-diameter blade, an inner-diameter blade and cutting machines which respectively use the outer-diameter blade and the inner-diameter blade for cutting hard material, such as metal, ceramics, semiconductor single cr... | 07/22/2003 |
| 6595844 | Outer-diameter blade, inner-diameter blade, core drill and processing machines using same ones A core drill having a shank and a cup shaped base metal section constructed of a disk shaped top wall and a cylindrical side wall provided on a fore-end of the shank. A grinding stone portion is mounted on an outer end part of the base metal section, with... | 07/22/2003 |
| 6578382 | Synthetic quartz glass for optical use, heat treatment method and heat treatment apparatus for the same A method for heat treating a synthetic quartz glass for optical use in a heating furnace, that comprises covering the surroundings of a synthetic quartz glass body with a SiO2 powder having a mean dissolved hydrogen molecule concentration of 1Ã... | 06/17/2003 |
| 6514582 | Quartz glass member for use in dry etching and dry etching system equipped with the same A quartz glass member for use in dry etching, wherein at least the inner surface of the member to be brought into contact with plasma is constructed of synthetic quartz glass, and a dry etching system equipped with the same member. A dry etching system eq... | 02/04/2003 |
| 6508084 | Method for producing optical quartz glass for excimer lasers and vertical-type heating furnace A method for producing an optical quartz glass for use in excimer lasers, comprising a step of forming a porous silica preform by depositing silica in a soot-like form formed by flame hydrolysis of a high-purity volatile silicon compound, followed by a st... | 01/21/2003 |
| 6499315 | Production method for making an optical member for excimer laser using synthetic quartz glass The present invention relates to a synthetic quartz glass, which is a material for producing an optical member having an excellent excimer laser resistance, and a production method thereof with a good productivity. That is, the synthetic quartz glass prod... | 12/31/2002 |
| 6484540 | Method for welding a quartz glass tube for use as an optical fiber preform A method for welding a dummy tube to a quartz glass tube for use as an optical fiber preform, comprising chamfering the inner edge portion of the dummy tube and/or the quartz glass tube for use as the optical fiber preform before welding the quartz glass ... | 11/26/2002 |
| 6480518 | Synthetic quartz glass member for use in ArF excimer laser lithography A synthetic glass member for use in excimer laser lithography, having superior homogeneity, high transmittance for ArF excimer laser beams and an excellent resistance against lasers is made from high purity synthetic quartz glass, and it is characterized ... | 11/12/2002 |
| 6451719 | Silica glass optical material for excimer laser and excimer lamp, and method for producing the same A silica glass optical material for transmitting light with a wavelength of from 155 to 195 nm emitted from an excimer laser or an excimer lamp, which comprises silica glass optical material of ultrahigh purity, containing from 1 to 100 wtppm of OH groups... | 09/17/2002 |
