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Assignee: Semitex Co., Ltd.


Location: Tokyo, JP
No. of patents: 4

NumberTitleIssue Date
5451886Method of evaluating lifetime of semiconductor material and apparatus for the same
A method of and apparatus for evaluating the lifetime of a semiconductor material which is capable of measuring, in a non-contact and non-destructive manner, the lifetime of a surface thin-layer portion so as to evaluate the quality of a semiconductor dev...
09/19/1995
5138255Method and apparatus for measuring lifetime of semiconductor material including waveguide tuning means
A method and apparatus measure the lifetime of semiconductor materials having resistivity values within a predetermined measurement range. Carriers are produced within the semiconductor material responsive to incident energy. Microwave energy is radiated ...
08/11/1992
5081414Method for measuring lifetime of semiconductor material and apparatus therefor
A method and apparatus measure the lifetime of a semiconductor material by directing microwave energy into the semiconductor material and by producing carriers within the semiconductor material by impinging light thereon. A non-metal material is interpose...
01/14/1992
5047713Method and apparatus for measuring a deep impurity level of a semiconductor crystal
A semiconductor specimen is held by a stage which is equipped with a heater (and a cooler) to change the temperature of the specimen in a predetermined range. Minority carriers are generated in the specimen by irradiating it with an energy beam such as a ...
09/10/1991
 
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