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| Number | Title | Issue Date |
| 6130464 | Latching microaccelerometer A surface micromachined microaccelerometer includes a substrate which has a surface plane, and a cantilever formed on the substrate with a fixed end and a free end, the fixed end being anchored to the substrate. The cantilever includes a mass fixed along ... | 10/10/2000 |
| 5870007 | Multi-dimensional physical actuation of microstructures A microstructure includes a substrate and a movable platform which is tethered by a first cantilever arm to the substrate. The first cantilever arm is comprised of a sandwich of first and second materials, the first and second materials exhibiting either ... | 02/09/1999 |
| 5796152 | Cantilevered microstructure A cantilever microstructure includes a cantilever arm with a proximal end connected to a substrate and a freely movable distal end. The cantilever arm comprises first and second sections and includes a continuous layer which exhibits a first thermal co-ef... | 08/18/1998 |
| 5475318 | Microprobe A microprobe comprises a base, a microcantilever extending in a plane from the base, and a probe tip projecting from the microcantilever out of the plane. The microcantilever is a bimorph structure comprising first and second layers made from materials ha... | 12/12/1995 |
