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Assignee: Quantum Logic Corporation


Location: Norwalk, CT
No. of patents: 2

NumberTitleIssue Date
5308161Pyrometer apparatus for use in rapid thermal processing of semiconductor wafers
Pyrometer apparatus measures the temperature of a semiconductor wafer which when heated by radiation from a bank of lamps emits thermal radiation which includes radiation contained in a selected spectral band. The apparatus includes a reaction chamber sup...
05/03/1994
5282017Reflectance probe
Apparatus for measuring the value of the directional spectral hemispherical reflectance of the surface of a target when not engaging but being spaced from the target employs a hollow elongated member having a longitudinal axis and first and second opposit...
01/25/1994
 
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