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| Number | Title | Issue Date |
| 6603542 | High sensitivity optical inspection system and method for detecting flaws on a diffractive surface An improved high sensitivity optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: a first and a second illumination means for illuminating predetermined regions on the diffractive surface to generate... | 08/05/2003 |
| 5814829 | Multistation surface inspection system An inspection system and an inspection method, the method including detecting flaws on a surface, determining the size, count, and position of flaws on the surface, providing a representation of the detected flaws by size, count, and position on a display... | 09/29/1998 |
| 5717198 | Pellicle reflectivity monitoring system having means for compensating for portions of light reflected by the pellicle A pellicle reflectivity monitoring system comprising a radiation source for directing radiation through a pellicle to an object to be inspected, a sensor device positioned to receive the portion of the radiation reflected by the pellicle, a processor, res... | 02/10/1998 |
| 5675409 | Plate holder for a surface inspection system A plate holder for a plate surface inspection system, the plate holder including a plate holder body and a calibration plate integral with the plate holder body thereby eliminating the need to load a separate special calibration plate in the plate holder ... | 10/07/1997 |
| 5672885 | Surface displacement detection and adjustment system A surface displacement detection system including a detector for detecting displacement of a surface in a direction normal to the surface as the surface revolves; an encoder which divides the surface into N sectors; a signal processor responsive to the de... | 09/30/1997 |
| 5625193 | Optical inspection system and method for detecting flaws on a diffractive surface An improved optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: an ultraviolet illumination means for illuminating a region on the diffractive surface to generate a scattered intensity distribution ... | 04/29/1997 |
| 5610719 | Displacement detection system A system for detecting displacement of a surface in a direction normal to the surface, the system including a first grating; a second grating; an optical subsystem for projecting an image of the first grating onto the surface and for directing a secondary... | 03/11/1997 |
| 5602401 | Data processing system and method for a surface inspection apparatus A system for processing particle size and position data for a surface under inspection, the system including an air spindle for rotating and a translation stage for translating the surface with respect to a beam of radiation used to detect particles on th... | 02/11/1997 |
| 5389794 | Surface pit and mound detection and discrimination system and method A surface pit and mound detection and discrimination system including a device for scanning a beam of radiation over a surface, and a mechanism for detecting a local slope on the surface for differentiating between whether the beam of radiation is scannin... | 02/14/1995 |
| 4943734 | Inspection apparatus and method for detecting flaws on a diffractive surface An optical inspection system and method for detecting flaws on a diffractive surface such as a reticle or wafer, includes illuminating a surface to be inspected to generate a first scattered energy angular distribution in response to a flaw on the surface... | 07/24/1990 |
| 4794264 | Surface defect detection and confirmation system and method A surface inspection defect detection and confirmation technique in which a beam of radiation is directed at the surface to be inspected; the radiation scattered from the surface is separately sensed in the near-specular region indicative of a pit and in ... | 12/27/1988 |
| 4794265 | Surface pit detection system and method An apparatus and method for uniquely detecting pits on a smooth surface by irradiating an area of the surface; separately sensing radiation scattered from the surface in the near-specular region indicative of a pit and in the far-specular region indicativ... | 12/27/1988 |
| 4772127 | Surface inspection apparatus In the surface inspection apparatus disclosed herein, an elongate array of electro-optical shutters is interposed between a laser beam which scans across the surface to be inspected and a photodetector system which collects light scattered from the surfac... | 09/20/1988 |
