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| Number | Title | Issue Date |
| 5486701 | Method and apparatus for measuring reflectance in two wavelength bands to enable determination of thin film thickness A method and system for performing reflectance measurements of a sample using radiation having UV frequency components (preferably in a broad UV band) and visible frequency components (preferably in a broad band). Preferably, two detectors simultaneously ... | 01/23/1996 |
| 5386317 | Method and apparatus for imaging dense linewidth features using an optical microscope A method and apparatus for imaging a substrate (such as silicon or silicon dioxide) beneath and between a dense array of strips (such as photoresist strips composed of dielectric or other material) using a polarizing optical microscope. In preferred embod... | 01/31/1995 |
| 5260668 | Semiconductor surface resistivity probe with semiconductor temperature control The resistivity of the surface of a semiconductor wafer is measured at different temperatures to determine the resistivity as a function of temperature. The temperature of the semiconductor wafer is varied by a heater in thermal contact with the semicondu... | 11/09/1993 |
| 5226118 | Data analysis system and method for industrial process control systems A data analysis computer system stores measurement data obtained from a multiplicity of distinct predefined processes. The system can store definitions for many data analysis charts, each of which depicts stored measurement data for a specified process. F... | 07/06/1993 |
| 5067805 | Confocal scanning optical microscope An improved real-time confocal scanning microscope, and an improved perforated disk for use in such microscope. A preferred embodiment of the inventive microscope includes a polarizing beamsplitting cube and a rotatable Nipkow disk perforted with a hexago... | 11/26/1991 |
| 4967381 | Process control interface system for managing measurement data A system and method for computer control of machine processes. The system and method provide a set of predefined data management or data analysis tasks which an operator of the system can use when using the system to run a selected process. Measurement da... | 10/30/1990 |
| 4951190 | Multilevel menu and hierarchy for selecting items and performing tasks thereon in a computer system A method of selecting items from a hierarchy of items and then performing a selected task on the selected set of items. An engineering set up control program includes a procedure for denoting processes, groups of processes, and subgroups of processes whic... | 08/21/1990 |
| 4945220 | Autofocusing system for microscope having contrast detection means An autofocusing system for a microscope is disclosed. An autofocus target is placed between a colliminating lens and a relay lens of the microscope. The autofocus target contains a pattern of dark areas which are projected onto a specimen and reflected in... | 07/31/1990 |
| 4907931 | Apparatus for handling semiconductor wafers A semiconductor wafer handling apparatus for automated movement of semiconductor wafers between wafer cassette trays and wafer test systems is provided. The apparatus includes a platform for carrying at least one semiconductor wafer cassette tray, a wafer... | 03/13/1990 |
| 4873623 | Process control interface with simultaneously displayed three level dynamic menu A system and method for computer control of machine processes. The operator of the system selects and specifies process control parameters through the use of a three level dynamic menu. The first level of the menu is used to select a group of process para... | 10/10/1989 |
| 4843538 | Multi-level dynamic menu which suppresses display of items previously designated as non-selectable A process control interface includes a multi-level dynamic menu for selecting processes from a set of processes that are organized into groups and subgroups. An engineering set up control program enables an engineer to denote which of these groups, subgro... | 06/27/1989 |
| 4805089 | Process control interface system for managing measurement data A method of controlling a process using a programmed digital computer with a set of process control programs. An operator control program allows the user to select and run a specified process and to collect measurement data while the selected process is r... | 02/14/1989 |
| 4776695 | High accuracy film thickness measurement system A system for ascertaining the thickness of thin films, especially on semiconductor substrates, comprising a light source, a randomized bifurcated fiber optic bundle, a pentamirror, a rapid scanning monochromator with a rotating grating, a photodetector, a... | 10/11/1988 |
| 4755746 | Apparatus and methods for semiconductor wafer testing An automatic system for performing sheet resistivity testing on surface layers of semiconductor wafers, including a wafer handling stage having a platform for carrying a semiconductor wafer, and an arrangement for mounting the platform for rotation about ... | 07/05/1988 |
| 4703252 | Apparatus and methods for resistivity testing An automatic sheet resistance mapping system for semiconductor wafers which has the capability of taking high accuracy, multiple test readings in both contour scan and diameter scan modes. A rotatable wafer stage carries a semiconductor wafer thereon with... | 10/27/1987 |
| 4679137 | Process control interface system for designer and operator A system and method for computer control of machine processes, including a dynamic menu feature used in the selection of processes and the definition and selection of operating parameters used by a process control program to direct the performance of the ... | 07/07/1987 |
