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Assignee: Pfeiffer Vacuum GmbH


Location: Asslar, DE
No. of patents: 39

NumberTitleIssue Date
8123412Vacuum pump with a bearing cage having a threaded groove
A vacuum pump includes a high-speed rotor, and an anti-friction bearing for rotatably supporting the rotor and including an inner ring, an outer ring, a rolling body, and a cage for the rolling body both the rolling body and the cage being located in an intermediate...
02/28/2012
8070418Vacuum pump
A vacuum pump includes a gas inlet, a quick-rotatable rotor connectable with a flange of a multi-chamber vacuum installation which flange has a plurality of suction openings separated by separation walls, and a gas path separating structure which is located in the g...
12/06/2011
7959423Vacuum pump with a lubricant pump
A vacuum pump includes a quick-rotatable component a bearing for supporting the quick-rotatable component and a lubricant pump for feeding lubricant to the bearing and having a rotor, with the bearing and the lubricant pump forming parts of a closed lubrication circ...
06/14/2011
7854601Lubricant-tight vane rotary vacuum pump
A lubricant-tight vane rotary vacuum pump includes at least one pump stage (17, 18) having a safety valve (3) for controlling gas flow to the pump stage, a lubricant pump, a lubricant reservoir (30) at least partially surrounding the pump stage ...
12/21/2010
7828512Arrangement for supporting a shaft of a vacuum pump and a vacuum pump with such an arrangement
An arrangement for supporting a shaft of a vacuum pump includes a first bearing for supporting the shaft at one of its end, a second bearing for supporting the shaft at another of its ends and formed as a rolling bearing, a holder for receiving the second bearing an...
11/09/2010
7669516Cylinder-piston arrangement
A sealing arrangement which is designed for a cylinder-piston arrangement of a reciprocating piston vacuum pump for sealing a gap between a cylinder wall and a piston displaceable in the cylinder, includes at least one L-shaped annular seal having one of its leg sec...
03/02/2010
7575372Device for contactless measurement of rotor temperatures
A device for contactless measurement of a rotor temperature includes a magnet supported on the rotor, electric coils which are arranged at the stator with which the rotor cooperates, and an electronic unit for measuring a voltage induced in the coil and including a ...
08/18/2009
7500821Vacuum pump
A vacuum pump including a tempering component arrangeable between the suction side flange of the pump and the connection flange of a recipient and having a tempering element. ...
03/10/2009
7378815Speed monitoring device
A device for redundant speed monitoring of a synchronous motor, which is sine-commutated without the use of sensors and which has a permanently magnetically excited rotor, has a first control unit, a drive output stage, a plurality of drive phases, and a second cont...
05/27/2008
7367429Device for feeding oil to a bearing seat of a rotatable shaft
A device for feeding oil to a seat of a bearing (5) that supports a rotatable shaft (3) includes an annular oil reservoir (14) surrounding a seat of the bearing (5), an oil pump (8) having two spindles (10, 11) with opposite...
05/06/2008
7241120Piston machine with ported piston head
A piston machine includes a cylindrical wall (2) defining a swept volume (1) and having a plurality of gas inlet openings (5), and a piston (3) reciprocating in the swept volume (1), and the piston head (12) of which is form...
07/10/2007
7226276Multi-stage reciprocating vacuum pump and method of operating the same
A multi-stage reciprocating vacuum pump includes first (2) and second (4) pump chambers located in the pump housing (1) and in which respective pistons (6, 8) reciprocate, first and second conduits (14, 20) for communicating, respe...
06/05/2007
7192262Twin-shaft vacuum pump and method of forming same
A twin-shaft vacuum pump includes two shafts and two rotors supported on respective shafts and cooperating with each other for producing a pumping effect, with each rotor being formed of a plurality of discoid components. ...
03/20/2007
7059828Gas friction pump
A gas friction pump, comprising stationary pump-active components (14) and rotatable pump-active components (15) secured on a rotatable rotor shaft (4), wherein the rotor shaft is supported with a bearing (5) at the high-vacuum-side end a...
06/13/2006
7036792Valve arrangement for a vacuum pump
A valve arrangement for a vacuum pump includes a valve head displaceable substantially perpendicular to a flow direction of a fluid through the valve arrangement, a valve seat, and a valve spring for biasing the valve head into a flat abutment engagement with the va...
05/02/2006
7033142Vacuum pump system for light gases
A vacuum pump system includes at least one high-vacuum pump, a fore-vacuum pump, and at least one intermediate pump, arranged between the at least one high-vacuum pump and the fore-vacuum pump and having its inlet connected directly and exclusively with the outlet o...
04/25/2006
7015609Machine with a high-speed rotor
A machine, having a high-speed rotor, and stationary components having connection surfaces for connecting the machine with external components and/or the stationary components with each other and provided with outer surface layers having a high friction coefficient....
03/21/2006
6991424Gas friction pump
A gas friction pump includes stationary (6) and rotatable (5) pump-active elements secured on a rotor shaft (4) and forming with the rotor shaft components of the rotor, with the rotor shaft (4) being supported by two, spaced from each ot...
01/31/2006
6824357Turbomolecular pump
A turbomolecular pump including a housing having a suction opening and a gas outlet opening, and a plurality of alternatingly arranged one behind another, stator and stator rings provided, respectively with support rings for supporting each a blade, with a support r...
11/30/2004
6699009Vacuum pump
A vacuum pump including a housing having a suction opening in its high-vacuum region, a gas outlet opening in its high pressure region, pump-active cooperating rotor and stator components arranged in the housing for pumping gases from the suction opening ...
03/02/2004
6676384Gas friction pump
A vacuum pump including two gas friction pumps arranged parallel to each other and having each at least one stage having an inlet communicating with a common suction region and an outlet communicating with a separate discharge region, a multi-stage pump a...
01/13/2004
6658920Leak detector pump
A leak detector pump, including a housing having a gas outlet and a plurality of gas inlet unions, components of a high vacuum pump located in the housing, a gas analyzer associated with the housing, a union for introducing test fluid into the housing, a ...
12/09/2003
6644912Gas friction pump
A gas friction pump, including a housing having a suction opening, a gas outlet opening, and a plurality of rotatable and stationary components arranged in the housing and having a pump-active structure for pumping gases and maintaining a pressure ratio, ...
11/11/2003
6638010Gas friction pump
A gas friction pump including a housing (1) having a suction opening (2) and a gas outlet opening (3), rotor (12) and stator (14) components arranged in the housing (1) for delivery of gases and for obtaining a pressure ratio; and an additional, at least ...
10/28/2003
6561755Turbomolecular pump
A turbomolecular pump including a cylindrical housing, and rotor and stator discs arranged in the housing and cooperating with each other to produce a pumping effect, with the cylindrical housing being formed of at least two housing parts separated along ...
05/13/2003
6540475Gas friction pump
A gas friction pump including a plurality of pumping active rotor and stator components arranged in the pump housing for delivery of gases and for producing a compression ration and having a diameter larger than a diameter of the suction opening formed in...
04/01/2003
6524060Gas friction pump
A gas friction pump including a housing having a suction opening and an exhaust opening, main rotor and stator components arranged in the housing and cooperating with each other for delivering gases and for producing a pressure difference, and an auxiliar...
02/25/2003
6464451Vacuum pump
A vacuum pump, including a housing having inlet and outlet; a shaft arranged in the housing and supported bearing provided in the housing, drive for rotating the shaft; and a plurality of pumping units arranged in the housing and formed each of rotational...
10/15/2002
6461123Turbomolecular pump
A turbomolecular pump including a plurality of separate one-piece stator elements, with each stator element including a respective housing part of a cylindrical housing of the pump, a stator disc, and a spacer disc that determines spacing between adjacent...
10/08/2002
6454525Turbomolecular pump
A turbomolecular pump including a plurality of rotor and stator discs alternatingly arranged with each other, a plurality of spacer rings for spacing the stator discs from each other, and at least one elastically deformable metallic member arranged betwee...
09/24/2002
6446651Multi-chamber vacuum system and a method of operating the same
A vacuum system including first and second vacuum chambers, a high-vacuum pump having its inlet connected with the first vacuum chamber, a dischargeable into atmosphere, vacuum pump for evacuating both first and second vacuum chambers; a first valve for c...
09/10/2002
6409477Vacuum pump
A vacuum pump including suction and discharge regions, two gas friction pumps arranged on opposite side of the suction region and parallel to each other and each having at least one stage and a discharge region channels connecting the discharge regions an...
06/25/2002
6368082Vacuum pump with rotor supporting gas bearings
A vacuum pump including a housing having a suction flange and an outlet opening, a plurality of stationary and rotatable pump-active elements arranged in the housing, a rotor shaft for supporting the rotatable elements, a system of gas bearings for suppor...
04/09/2002
6241490Multirotor vacuum pump
A multirotor vacuum pump including a housing, at least two rotors located in the housing and cooperating with each other so that as a result of a contactless movement of the at least two rotors relative to each other, working chambers, into which a to-be-...
06/05/2001
6071085Gas ballast system for a multi-stage positive displacement pump
A gas ballast system for a multi-stage positive displacement pump in which a first stage includes at least one positive displacement pump stage, is equipped with an inlet valve and an outlet valve, and is connected with the following stage by an intermedi...
06/06/2000
6030181Vacuum apparatus and a method of controlling a suction speed thereof
A vacuum apparatus including at least one vacuum pump having at least one stage and high-vacuum and fore vacuum connections, and a connection line communicating a point located between the high vacuum and fore vacuum connections with the high vacuum conne...
02/29/2000
5927940Double-flow gas friction pump
A double-flow gas friction pump including a shaft supported in the pump housing and extending at a right angle to an axis of the suction port, a rotor fixedly secured on the shaft for joint rotation therewith, a stator fixedly secured in the housing and c...
07/27/1999
5910695Damping device for a magnetically supported rotor
A damping device for a rotor supported by an arrangement of magnetic bearings including at least one radial bearing formed of a stator magnet and a rotor magnet, with the damping device, including an intermediate member fixedly connected with the rotor by...
06/08/1999
5893702Gas friction pump
A gas friction pump including a rotor located in the pump housing and formed of a plurality of coaxial first cylindrical elements, and a stator located in the housing and formed of a plurality of second cylindrical elements coaxial with the first cylindri...
04/13/1999
 
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