Assignee: Particle Measuring Systems, Inc.

Location: Boulder, CO
No. of patents: 43

Number	Title	Issue Date
8174697	Non-orthogonal particle detection systems and methods Described herein is a particle detection system capable of spatially resolving the interaction of particles with a beam of electromagnetic radiation. Using a specific electromagnetic beam cross sectional shape and orientation, the detection sensitivity of a particle...	05/08/2012
8154724	Two-dimensional optical imaging methods and systems for particle detection The present invention provides methods and systems for particle detection and analysis using two-dimensional optical imaging to access enhanced detection sensitivity and expanded sensing functionality relative to conventional point and array detection-based optical ...	04/10/2012
8027035	Non-orthogonal particle detection systems and methods Described herein is a particle detection system capable of spatially resolving the interaction of particles with a beam of electromagnetic radiation. Using a specific electromagnetic beam cross sectional shape and orientation, the detection sensitivity of a particle...	09/27/2011
7985949	Detection of analytes using ion mobility spectrometry Methods and systems are provided for detecting analytes in a gas phase sample. An ion mobility spectrometer is provided for detecting analytes having an excess amount of dopant in its separation region. In an embodiment, the dopant is added directly to the separatio...	07/26/2011
7973929	System and method for calibration verification of an optical particle counter Described herein is a portable, low power consuming optical particle counter calibration verification system and reliable and sensitive methods for verifying the calibration status of a gas or liquid particle counter. The calibration verification systems described h...	07/05/2011
7916293	Non-orthogonal particle detection systems and methods Described herein is a particle detection system capable of spatially resolving the interaction of particles with a beam of electromagnetic radiation. Using a specific electromagnetic beam cross sectional shape and orientation, the detection sensitivity of a particle...	03/29/2011
7796255	Optical particle sensor with exhaust-cooled optical source The invention relates to particle sensors that are capable of passively cooling high-powered optical sources within the sensor, thereby extending the optical source lifetime without requiring additional power. The sensor detects particles within a sample fluid by op...	09/14/2010
7667839	Aerosol particle sensor with axial fan A particle sensor for optically detecting an unconstrained particle suspended in a flowing gas includes a sample chamber having a gas inlet and a gas outlet; a gas flow system for flowing said gas from said gas inlet through said sample chamber to said gas outlet, a...	02/23/2010
7576857	Particle counter with laser diode A liquid particle counter for optically detecting an unconstrained particle suspended in a flowing liquid includes a sample chamber having a liquid inlet and a liquid outlet; a laser diode module producing a symmetrically collimated laser beam; a beam shaping optica...	08/18/2009
7456960	Particle counter with improved image sensor array A particle counter for optically detecting an unconstrained particle of less than one micron in size suspended in a flowing liquid includes a sample chamber having a fluid inlet and a fluid outlet; a laser module producing a laser beam; a beam shaping optical system...	11/25/2008
RE39783	Chemical mechanical planarization (CMP) slurry quality control process and particle size distribution measuring systems A sensitive particle distribution probe uses special processing including a modified Twomey/Chahine iterative convergence technique and a specially constructed sample cell to obtain particle size distribution measurements from optically dense slurries, such as the s...	08/21/2007
7235214	System and method for measuring molecular analytes in a measurement fluid A molecular contamination monitoring system includes a piezoelectric measurement sensor exposed to a molecular constituent to be measured; a piezoelectric reference sensor; and a filter for filtering said molecular constituent, the filter located between the referen...	06/26/2007
7208123	Molecular contamination monitoring system and method A flow-through monitor for detecting molecular contamination (MC) within a fluid flow. The monitor has a diffusion chamber having an inlet port and an outlet port, and a structure for supporting a fluid flow from the inlet port to the outlet port. The structure incl...	04/24/2007
7088447	Particle counter with self-concealing aperture assembly A particle measurement system using a single component light collecting system with an aperture having a portion within direct view of the light detector. An aperture assembly extending into a sample may be self-concealing by having an extended portion to block ligh...	08/08/2006
7088446	Optical measurement of the chemical constituents of an opaque slurry An opaque slurry chemical constituent measurement system includes a cross-flow or membrane filter having a porous filter element connected between a global slurry loop and a spectrometer. The opaque slurry particles cannot pass through the filter element but pass th...	08/08/2006
7030980	Diode pumped intracavity laser particle counter with improved reliability and reduced noise A fluid particle counter comprising an intracavity diode pumped solid state laser having a solid state lasing material having a non-reflective coating and a concave mirror having a reflective coating, with the coatings isolated from the sample flow by Brewster windo...	04/18/2006
6945090	Method and apparatus for monitoring molecular contamination of critical surfaces using coated SAWS A molecular contamination monitor for monitoring molecular contamination on a surface of a subject surface susceptible to degradation by a molecular contaminant. The monitor includes a surface acoustic wave (SAW) device having a SAW measurement surface coated with a...	09/20/2005
6903818	Low noise intracavity laser particle counter An optical particle counter has a gain-apertured laser cavity producing laser light, an inlet jet providing fluid flow into a particle detecting region within the laser cavity, the inlet jet having an inlet jet orifice; a detection optics assembly located to collect...	06/07/2005
6859277	Particle counter with strip laser diode A fluid particle counter comprising an inlet jet tip producing an air flow, a strip laser diode producing a laser beam, and a beam shaping system that includes an aspheric collimating lens, an achromatic spherical lens, a cylinder lens, and a series of cascading ape...	02/22/2005
6709311	Spectroscopic measurement of the chemical constituents of a CMP slurry An apparatus and method for determining the chemical content of a chemical mechanical planarization (CMP) slurry. A CMP sample cell has windows for passing electromagnetic radiation. Three wavelengths of electromagnetic radiation, one of which is strongly absorbed b...	03/23/2004
6615679	Ensemble manifold, system and method for monitoring particles in clean environments A system for detecting particles in a clean environment includes and ensemble manifold having a plurality of sample ports, a delivery port, and flow junction having no open-close valves or other flow selectors connecting all of said sample ports to said d...	09/09/2003
6275290	Chemical mechanical planarization (CMP) slurry quality control process and particle size distribution measuring systems A sensitive particle distribution probe uses special processing including a modified Twomey/Chahine iterative convergence technique and a specially constructed sample cell to obtain particle size distribution measurements from optically dense slurries, su...	08/14/2001
6246474	Method and apparatus for measurement of particle size distribution in substantially opaque slurries A very sensitive particle distribution probe uses special processing including a modified Twomey/Chahine iterative convergence technique and a specially constructed sample cell to obtain particle size distribution measurements from optically dense slurrie...	06/12/2001
6167107	Air pump for particle sensing using regenerative fan, and associated methods The invention includes a particle sensor with a particle counter. A regenerative blower pulls ambient air into a flow within the particle counter, and a laser illuminates the flow to generate laser radiation indicative of particles within the flow. A dete...	12/26/2000
5903338	Condensation nucleus counter using mixing and cooling A modified mixing-type condensation nuclei counter for measuring the size and number of small particles is presented. A gas stream is saturated with respect to a working fluid. The saturated gas at a first temperature is mixed in a growth chamber with a s...	05/11/1999
5861950	Particle detection system utilizing an inviscid flow-producing nozzle A particle detection system in which a beam of light is incident upon an inviscid jet of fluid. A sample fluid containing particles is passed through an inviscid flow producing nozzle. An inviscid flow jet is output from the nozzle. The entire inviscid fl...	01/19/1999
5805281	Noise reduction utilizing signal multiplication Noise reduction is effected by multiplying together electrical signals that include pulses embedded in noise, with the pulses being indicative of the same event, such as light scattered by particles, occurring at a viewing area, and with the signals being...	09/08/1998
5751422	In-situ particle detection utilizing optical coupling A resonant optical cavity having a laser medium therein is positioned within a specific environment, such as a process and/or harsh environment, and a sensing region, also within the resonant optical cavity, receives light whereby particles at the sensing...	05/12/1998
5671046	Device and method for optically detecting particles in a free liquid stream Device and method are disclosed for optically detecting particles in a free (i.e., unenclosed) stream of liquid. The free liquid stream is produced by ejecting liquid under pressure from a nozzle so that the stream has a smooth round surface. A laser beam...	09/23/1997
5493123	Surface defect inspection system and method System and method are disclosed for inspecting objects, such as sheets of flat panel glass, to detect flaws or contamination at a surface. The surface to be inspected is illuminated with 253.7 nm ultraviolet (UV) radiation to assure detection of defects o...	02/20/1996
5459569	Nonintrusive modular particle detecting device A modular particle detecting device is disclosed for nonintrusive in-situ detection of particles passing through a sensing region. The device is particularly useful for microcontamination control in semiconductor processing environments, and includes, as ...	10/17/1995
5282151	Submicron diameter particle detection utilizing high density array Submicron diameter particle detection utilizing a high density array is disclosed. The high density array, such as a charge coupled device, is utilized to detect light scattered at a sensing region by particles illuminated by a light source, such as a las...	01/25/1994
4893928	Highly sensitive particle size detection device having noise cancellation A detection device is disclosed for determining particle size from particle effected light scattering in a sensing region illuminated by a laser beam and receiving the particles in a medium, such as air. Background light from molecular scattering is reduc...	01/16/1990
4893932	Surface analysis system and method A surface analysis system and method are disclosed for determining particle contamination and/or defects on or below a surface of material. Laser beams having different polarizations are directed to the surface to be analyzed and light scattered from part...	01/16/1990
4798465	Particle size detection device having high sensitivity in high molecular scattering environment A detection device is disclosed for determining particle size from particle effected light scattering in a sensing region receiving the particles in a gas carrier, such as air, and a laser beam to illuminate the sensing region. Background light from molec...	01/17/1989
4740988	Laser device having mirror heating A laser device is disclosed having mirror heating to enhance performance of the device by minimizing induced light absorption to thereby improve mirror quality. The mirrors of a laser device are commonly made of a substrate having a coating thereon formed...	04/26/1988
4728190	Device and method for optically detecting particles in a fluid A device and method are disclosed for optically detecting particles in a fluid. A fluid passage with transparent walls defining a monitoring volume, or region, is provided, and particles in the fluid are optically detected by directing a laser beam throug...	03/01/1988
4636075	Particle measurement utilizing orthogonally polarized components of a laser beam Particle measurement is disclosed utilizing orthogonally polarized components of a laser beam. A laser beam is split into orthogonally polarized components and at least one of the components is thereafter beam shaped to have a modified dimension. The comp...	01/13/1987
4594715	Laser with stabilized external passive cavity A laser having a stabilized external passive cavity is disclosed, with stabilization being effected by modulation of an external mirror positioned along the laser axis. The laser system includes first, second and third spaced mirrors with the second mirro...	06/10/1986
4571079	Aerosol sampling device and method with improved sample flow characteristics An aerosol sampling device and method are disclosed having improved sample flow characteristics. Sample flowing through an inlet nozzle is heated prior to discharge from the nozzle toward a measurement area to maintain sample flow more nearly laminar by c...	02/18/1986

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Assignee: Particle Measuring Systems, Inc.