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| Number | Title | Issue Date |
| 8168949 | Method for stem sample inspection in a charged particle beam instrument A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where ... | 05/01/2012 |
| 8054558 | Multiple magnification optical system with single objective lens A multiple magnification optical system has a single objective focused upon a specimen at a given working distance. A graded-index lens receives light passing through the objective from the specimen. A beam splitter splits the light exiting the gradient-index lens i... | 11/08/2011 |
| 7834315 | Method for STEM sample inspection in a charged particle beam instrument A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where ... | 11/16/2010 |
| 7755372 | Method for automated stress testing of flip-chip packages Methods for testing flip-chip packages includes aligning a microscope and a test engine. The package under test is placed between the microscope and the test engine, and an acoustic transducer is attached to the package under test. The test engine delivers an impact... | 07/13/2010 |
| 7644637 | Method and apparatus for transfer of samples in a controlled environment An apparatus for the transfer of samples from an analytical instrument has a sealable transfer capsule and a means for connecting the transfer capsule to a vacuum instrument, such as a FIB, through an interface connected to the instrument. The capsule has a door tha... | 01/12/2010 |
| 7446542 | Apparatus and method for automated stress testing of flip-chip packages An apparatus for testing flip-chip packages has a programmed computer, a test-engine stage for applying an impact to at least one package under test, and a monitoring stage. The test-engine stage causes an impact on the package on the side opposite its ball-grid arr... | 11/04/2008 |
| 7414252 | Method and apparatus for the automated process of in-situ lift-out An apparatus for performing automated in-situ lift-out of a sample from a specimen includes a computer having a memory with computer-readable instructions, a stage for a specimen and a nano-manipulator. The stage and the nano-manipulator are controlled by motion con... | 08/19/2008 |
| 7395727 | Strain detection for automated nano-manipulation A strain detector for in-situ lift-out, comprises a nano-manipulator probe shaft; a strain gauge mounted on the probe shaft; and a first cut-out on the probe shaft. The first cut-out has a rectangular cross-section. There is a second cut-out on the probe shaft; the ... | 07/08/2008 |
| 7381971 | Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and coaxial with the tube; and at least one elastic ring adjacent to the comp... | 06/03/2008 |
| 7315023 | Method of preparing a sample for examination in a TEM A method of preparing a sample for examination in a TEM, where the sample is attached to a probe tip point, uses a TEM sample holder form embodied in a TEM sample holder coupon. The probe-tip points and the TEM sample holder coupon are oriented with each other so th... | 01/01/2008 |
| 7208724 | Apparatus and method of detecting probe tip contact with a surface We disclose an apparatus and method for detecting probe-tip contact with a surface, generally inside a focused ion-beam instrument, where the probe tip is attached to a capsule, and the capsule is movably secured in a probe shaft. There is a fiber-optic cable having... | 04/24/2007 |
| 7126133 | Kit for preparing a tem sample holder A kit for preparing TEM sample holders includes at least one TEM coupon made of a sheet of material and having one or more paths from its edge to a TEM sample holder form embodied in the TEM coupon. There is at least one hole in the coupon defining the outer boundar... | 10/24/2006 |
| 7126132 | Apparatus for preparing a TEM sample holder The preferred embodiment further includes a press for cutting a TEM sample holder from a TEM coupon and joining a probe-tip point with an attached sample to the TEM sample holder. The press includes: an outer die; an inner die situated inside the outer die; a former... | 10/24/2006 |
| 7115882 | TEM sample holder A TEM sample holder is formed by cutting the TEM sample holder form from a coupon in a press. The cutting at the same time joins the tip point of a nano-manipulator probe tip with the formed TEM sample holder. The tip point of the probe has a sample attached for ins... | 10/03/2006 |
| 7053383 | Method and apparatus for rapid sample preparation in a focused ion beam microscope A coupon for preparing a TEM sample holder comprises a sheet of material that includes a TEM sample holder form. There is at least one section of the sheet connecting the TEM sample holder form to other portions of the sheet. A TEM sample holder is formed by cutting... | 05/30/2006 |
| 6777674 | Method for manipulating microscopic particles and analyzing We disclose a method for analyzing the composition of a microscopic particle resting on a first sample surface. The method comprises positioning a micro-manipulator probe near the particle; attaching the particle to the probe; moving the probe and the attached parti... | 08/17/2004 |
| 6570170 | Total release method for sample extraction from a charged-particle instrument A sample (180) is separated from an integrated circuit chip or a semiconductor wafer (100) for examination so that the resulting sample (180) can be moved to a location for examination by TEM, SEM or other means. A sample (180) portion of the chip or wafe... | 05/27/2003 |
| 6420722 | Method for sample separation and lift-out with one cut When a desired portion is separated from an integrated circuit chip or a semiconductor wafer, the portion is separated so that the resulting sample can be moved to a location for examination by TEM, SEM or other means. A sample portion of the chip or wafe... | 07/16/2002 |
