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| Number | Title | Issue Date |
| 7766341 | Seal structure, fluid device, integrated valve, and sealing member A seal structure in which a sealing member 510 fitted in the seal holding part 120 is elastically deformed to hermetically seal a flow passage joining portion. The seal holding part 120 opening on a flow passage side and including a first retain... | 08/03/2010 |
| 7383732 | Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due ... | 06/10/2008 |
| 6870174 | Electron beam tube and window for electron beam extraction An object of the present invention is to provide to an electron beam tube and electron beam extraction window capable of generating high output electron beam by effectively releasing heat generated when an electron beam passes through a window whereby temperature ri... | 03/22/2005 |
