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| Number | Title | Issue Date |
| 7784426 | Plasma reactor for the treatment of large size substrates A radiofrequency plasma reactor with first and second spaced electrodes has a concave surface facing a substrate supporting surface. A process area between the electrodes has a gas inlet for a process gas. A radiofrequency generator for frequencies greater than 13.5... | 08/31/2010 |
| 7760436 | Method for combination of light of different wavelengths A method for dividing substantially nonpolarized white light into three substantially nonpolarized fractions includes splitting the substantially nonpolarized white light into a first fraction and a second fraction, the first fraction being substantially nonpolarize... | 07/20/2010 |
| 7736462 | Installation for processing a substrate The invention relates to an installation, in particular a vacuum processing installation for processing a substrate (130), in particular a semiconductor wafer, comprising a processing station. Said installation comprises a frame (110), to which is clam... | 06/15/2010 |
| 7718042 | Method for manufacturing sputter-coated substrates, magnetron source and sputtering chamber with such source A magnetron source, a magnetron treatment chamber, and a method of manufacturing substrates with a vacuum plasma treated surface, generate and exploit on asymmetrically unbalanced long-range magnetron magnetic field pattern which is swept along the substrate surface... | 05/18/2010 |
| 7706908 | Method for positioning a wafer The invention relates to a method for positioning a wafer (3) with a reference mark (6) in a vacuum processing unit with a transport chamber containing a transport device (2, 20, 21) for moving the wafers (3) in a plane to a process chamb... | 04/27/2010 |
| 7678240 | Method for controlling plasma density or the distribution thereof Magnetron source has a target configuration with a sputter surface, a magnet configuration generating above the sputter surface a magnetic field which forms, in top view onto the sputter surface, at least one magnet field loop. Viewed in a cross-sectional direction ... | 03/16/2010 |
| 7595096 | Method of manufacturing vacuum plasma treated workpieces A method of manufacturing vacuum plasma treated workpieces includes the steps of introducing at least one workpiece to be treated into a vacuum chamber; treating the workpiece in the vacuum chamber, thereby establishing a plasma discharge in the vacuum chamber by a ... | 09/29/2009 |
| 7492091 | Diffusion barrier layer and method for manufacturing a diffusion barrier layer A diffusion barrier system for a display device comprising a layer system with at least two layers of dielectric material, wherein at least two adjacent layers of that layer system comprise the same material. A respective method for manufacturing such a diffusion ba... | 02/17/2009 |
| 7449220 | Method for manufacturing a plate-shaped workpiece A method for producing a disk shaped workpiece with a dielectric substrate includes treatment in a plasma process volume between two electrode faces bounding a high-frequency plasma discharge. One electrode face is of dielectric material and is at a high-frequency p... | 11/11/2008 |
| 7429543 | Method for the production of a substrate Method for producing a substrate includes establishing a plasma discharge with a locally inhomogeneous density distribution and exposing the substrate to the inhomogeneously density-distributed plasma discharge. The distribution is established by establishing a spec... | 09/30/2008 |
| 7420449 | Mirror actuating device for projection systems A magnetic actuator utilizes a single magnet and two voice coils to rotate a mirror between two angular positions with respect to a rest state. A magnetic field assembly applies magnetic flux across the voice coils. An upper plate and a lower plate are held together... | 09/02/2008 |
| 7420740 | Device for combination of light of different wavelengths The present invention relates to a method for combining or for splitting the beam paths of substantially nonpolarized light of at least three different wavelength intervals. The splitting or the combining of the beam path of light of those wavelength intervals locat... | 09/02/2008 |
| 7413310 | Spectral light division and recombination configuration as well as process for the spectrally selective modulation of light A system and method for separating and combining three spectrums of light has a polarizing beamsplitter, an input retarder or polarizer located adjacent a first side of the polarizing beamsplitter, a spacer that can also be a splitter located adjacent a second side ... | 08/19/2008 |
| 7405095 | Method for producing color-wheel segments A method for producing from a plate-shaped substrate circular sections for use for instance in a color wheel encompasses inter alia such steps as positioning predefined edge break lines in such fashion that the circular sections to be separated at a subsequent point... | 07/29/2008 |
| 7405819 | Optical substrate for enhanced detectability of fluorescence A sample substrate adapted for use with fluorescence excitation light with a first wavelength. A reflector is disposed on a base. The reflector includes a reflecting multilayer interference coating with at least two layers. Not all of the layers L fulfill a quarterw... | 07/29/2008 |
| 7381661 | Method for the production of a substrate with a magnetron sputter coating and unit for the same According to the invention, the distribution of material amounts deposited on the substrate may be optimized for magnetron sputter coating in which a magnetron magnetic field pattern (9) is cyclically (My) moved along the sputtering surface (7 | 06/03/2008 |
| 7371329 | Method for filtering particles from a fluid Methods for filtering particles from a fluid are disclosed, wherein an array of microstructures defining respective microchannels having respective minimum widths are used to separate the fluid from particles to be filtered. The fluid flows through the minimum width... | 05/13/2008 |
| 7368041 | Method for controlling plasma density or the distribution thereof Method for manufacturing magnetron sputter-coated workpieces includes placing a substrate adjacent a magnetron source having a target cathode, generating above the target cathode, at least one plasma loop by an electron trap established by generating a magnetic fiel... | 05/06/2008 |
| 7357544 | Night vision system for motor vehicles An infrared lighting device for motor vehicles, for example a headlight, has a radiation source and a filter, whereby the device emits white and infrared radiation at a certain intensity in a wavelength range between 800 and 1200 nm on one axis, and the filter at a ... | 04/15/2008 |
| RE40191 | Vacuum process apparatus The invention proceeds from a vacuum process apparatus for an article which is processed or treated, resp. at two stations, whereby each station has a charging and/or removing opening for the article. A transporting device is supported for rotation and includes a su... | 04/01/2008 |
| RE40192 | Vacuum process apparatus The invention proceeds from a vacuum process apparatus for an article which is processed or treated, resp. at two stations, whereby each station has a charging and/or removing opening for the article. A transporting device is supported for rotation and includes a su... | 04/01/2008 |
| 7348074 | Multilayer hard coating for tools A multilayer hard coating for tools for machining applications with a multilayer structure for improving the wear resistance of workpieces includes at least one (AlyCr1-y) X layer (0.2≦y≦0.7), wherein X is one of the following elements N, C... | 03/25/2008 |
| 7344909 | Method for producing semi-conducting devices and devices obtained with this method A semi-conducting device has at least one layer doped with a doping agent and a layer of another type deposited on the doped layer in a single reaction chamber. An operation for avoiding the contamination of the other layer by the doping agent separates the steps of... | 03/18/2008 |
| 7335521 | Method for the production of multilayer discs A Method for manufacturing an optical disc substrate comprises a first substrate with at least one structured surface, on which an anti-adhesive layer, preferably carbon, is deposited and first layer on top of said anti-adhesive layer. On a second substrate with a s... | 02/26/2008 |
| 7311795 | Method for the bonding of disk-shaped substrates and apparatus for carrying out the method A first substrate (11a) is positioned on a support surface (7) in a vacuum chamber with an upward-facing first bonding surface (12a) spin-coated with adhesive while a second substrate (11b) is held with downward-facin... | 12/25/2007 |
| 7295392 | Color wheel with aligned segments A color wheel for use in projector systems comprises a disc shaped hub, rotatable around a central axis and color filter segments arranged radially to said central axis and affixed to said hub. This color ring is arranged concentrically with respect to said axis and... | 11/13/2007 |
| 7285789 | Optical device for surface-generated fluorescence A sample substrate adapted for use with electromagnetic excitation light includes a base and a layer system. The layer system includes a multilayer interference coating with at least two layers wherein the thicknesses of the layers ensure that light emitted by a flu... | 10/23/2007 |
| 7244086 | Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates A vacuum transport chamber has a transport robot arrangement. A processing arrangement has at least one processing station communicating by at least one workpiece pass-through opening with the vacuum transport chamber. A loadlock arrangement communicates by at least... | 07/17/2007 |
| 7227633 | Optical substrate for enhanced detectability of fluorescence A sample substrate adapted for use with fluorescence excitation light with a first wavelength. A reflector is disposed on a base. The reflector includes a reflecting multilayer interference coating with at least two layers. Not all of the layers L fulfill a quarterw... | 06/05/2007 |
| 7226670 | Work piece with a hard film of AlCr-containing material, and process for its production A work piece or structural component is coated with a system of film layers at least one of which is composed of (AlyCr1-y) X, where X=N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO or CBNO and 0.2≦y | 06/05/2007 |
| 7215850 | Waveguide plate and process for its production and microtitre plate A waveguide plate and a process for making the waveguide plate with a plate-like glass substrate (1), carrying a waveguiding layer (2), with at least one coupling grating on the surface carrying said waveguiding layer (2), which coupling grating... | 05/08/2007 |
| 7179352 | Vacuum treatment system and process for manufacturing workpieces A process is disclosed for manufacturing coated substantially plane workpieces, in which the workpieces are guided to a vacuum treatment area guided by a control. The treatment atmosphere is modulated in the treatment area as a function of workpiece position with th... | 02/20/2007 |
| 7169252 | Method for the assembly of light integrators A method of assembling a light handling device that includes a plurality of separate walls for reflecting and that is tolerant of elevated heat and heating cycles. The method provides a fast-set adhesive to portions of the walls that are to be secured together. The ... | 01/30/2007 |
| 7153363 | Atomic layer deposition Substrates are charged with a material by introducing the substrates into an evacuated vacuum container and exposing the surface of the substrates to a reactive gas which is adsorbed on the surface. The exposure is then terminated and the reactive gas adsorbed on th... | 12/26/2006 |
| 7148610 | Surface acoustic wave device having improved performance and method of making the device A surface acoustic wave device includes a transducer electrode formed on a substrate. In one aspect, the electrode has a plurality of layers. At least one of the layers is metal and another of the layers is a material for providing a hardening effect to the metal la... | 12/12/2006 |
| 7138343 | Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber In order to produce substrate surfaces with a given two-dimensional surface distribution arising from a treatment using a vacuum treatment process, an inhomogeneous plasma (5) with a density distribution is generated and moved relative to the substrate (9 | 11/21/2006 |
| 7105080 | Vacuum treatment system and method of manufacturing same Method for manufacturing a workpiece by a vacuum treatment process includes providing a vacuum treatment system with first second parts in a vacuum chamber. Either a sensor or an adjusting element with first signal connection is mounted on the second part. An electr... | 09/12/2006 |
