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| Number | Title | Issue Date |
| 5385689 | Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom Scavenger compositions useful for purifying process gas streams, such as process gas streams, such as hydrogen, nitrogen, noble gases, diborane, and hydride gases from Groups IVA-VIA of the Periodic Table, such as arsine, phosphine, silane, germane, hydro... | 01/31/1995 |
| 5325705 | In-line detector system for real-time determination of impurity concentration in a flowing gas stream An in-line detector system for real-time detection of impurity concentration in a flowing gas stream. In a specific aspect, the system may comprise a purifier unit for selective purification of gas from the gas stream, and an impurity addition unit for im... | 07/05/1994 |
| 5320817 | Process for sorption of hazardous waste products from exhaust gas streams A method for cleaning an exhaust gas containing ammonia and at least one silicon-containing compound selected from the group consisting of silane and chlorosilanes, which comprises contacting the exhaust gas with a scavenger comprising a metal salt which ... | 06/14/1994 |
| 5260585 | Endpoint and/or back diffusion gas impurity detector, and method of using the same An endpoint detector for gas purifiers which contains a detection element comprising a small amount of a highly reactive metal coated on an insulator and exposed to the gas stream being purified. This metal does not react with the gas being purified, but ... | 11/09/1993 |
| 5151395 | Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor A sorbent composition comprising a first sorbent bed of hygroscopic aluminosilicate sorbent and a second sorbent bed comprising an aluminosilicate sorbent impregnated with an aqueous base solution, whereby the hygroscopic aluminosilicate sorbent provides ... | 09/29/1992 |
| 5138869 | In-line detector system for real-time determination of impurity concentration in a flowing gas stream An in-line detector system for real-time detection of impurity concentration in a flowing gas stream in which purified and unpurified volumes of gas from the flowing gas stream are subjected to concentration sensing, to determine a corrected impurity conc... | 08/18/1992 |
| 5094830 | Process for removal of water and silicon mu-oxides from chlorosilanes A scavenger composition having utility for removal of water and silicon mu-oxide impurities from chlorosilanes, such scavenger composition comprising: (a) a support; and (b) associated with the support, one or more compound(s) selected from the group cons... | 03/10/1992 |
| 5057242 | Composition, process, and apparatus, for removal of water and silicon mu-oxides from chlorosilanes A scavenger composition having utility for removal of water and silicon mu-oxide impurities from chlorosilanes, such scavenger composition comprising: (a) a support; and (b) associated with the support, one or more compound(s) selected from the group cons... | 10/15/1991 |
