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Assignee: Nippon Tylan Corporation


Location: Tokyo, JP
No. of patents: 1

NumberTitleIssue Date
5099881Flow dividing structure of mass flow controller
A flow dividing structure for a mass flow controller includes a base having a main passage which includes an upsream circular passage, a downstream circular passage, and a tapering circular passage which connects the upstream and downstream circular passa...
03/31/1992
 
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