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| Number | Title | Issue Date |
| 7101416 | Method for purification of lens gases used in photolithography and metrology A method and composition for the removal of contaminants in a gas stream used in the contamination sensitive processes of photolithography and metrology are described. The synergistic effect of a combination of an electropositive metal component, a high silica zeoli... | 09/05/2006 |
| 7094469 | Porous or non-porous substrate coated with an immobilized polymeric composition having sulfonyl groups and hydrophilic functional groups and process A porous or non-porous polymeric substrate having its surface modified with an immobilized fluorocarbon such as perfluorocarbon, polymeric composition is provided. The immobilized fluorocarbon is formed from a monomer having formula: [T—SO2Y—SO2 | 08/22/2006 |
| 7052809 | Membrane and reticle-pellicle apparatus with purged pellicle-to-reticle gap using same A gas porous media which comprises a material having a low coefficient of thermal expansion that is capable of retaining 99.99% or more of particles of a size of about 0.003 microns and larger at 0.2 slpm/cm2 while demonstrating a permeability of 3.5×10 | 05/30/2006 |
| 7043994 | Variable capacitance measuring device A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may... | 05/16/2006 |
| 7037424 | Connector apparatus and system including connector apparatus A connector apparatus is provided which is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as ... | 05/02/2006 |
| 7029238 | Pump controller for precision pumping apparatus A pump controller and pump controlling method for dispensing a precise amount of low viscosity fluid are provided in which the problems of double dispenses and stuttered dispenses are avoided. In particular, the timing of the valves and motors in the pumping apparat... | 04/18/2006 |
| 7022164 | Filters employing porous strongly acidic polymers A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having s... | 04/04/2006 |
| 7021667 | Connector apparatus and system including connector apparatus A connector apparatus is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation mod... | 04/04/2006 |
| 7014693 | Filters employing both acidic polymers and physical-adsorption media A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in... | 03/21/2006 |
| 7014679 | Process for degassing an aqueous plating solution A process for removing oxygen from a copper plating solution is provided. The solution is passed through a degasser comprising a shell and hollow hydrophobic fiber porous membranes wherein the shell while a vacuum is drawn on the surfaces of the fibers opposite the ... | 03/21/2006 |
| 7010983 | Method for digitally controlling a sensor system Systems and methods for digitally controlling sensors. In one embodiment, a digital controller for a capacitance diaphragm gauge is embedded in a digital signal processor (DSP). The controller receives digitized input from a sensor AFE via a variable gain module, a ... | 03/14/2006 |
| 7004453 | Pendulum valve with a full range of position control Embodiments of the present invention provide a pendulum valve with a full range of normal position control. The pendulum valve can include a valve housing having a flow channel, and a valve body that is movable within the valve housing between a fully open position ... | 02/28/2006 |
| 7000482 | Variable capacitance measuring device A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may... | 02/21/2006 |
| 6982041 | Liquid filtration device The present invention provides a liquid filtration device with internal flow paths that facilitate the purging of air bubbles from the device. The device includes internal channels that collect bubbles from fluid entering the filtration device and more efficiently d... | 01/03/2006 |
| D513304 | Combination optimizer filter and manifold | 12/27/2005 |
| 6977043 | Skinned hollow fiber membrane and method of manufacture Hollow fiber membranes having a skinned surface on one diameter, and a porous surface on the opposite diameter are produced from perfluorinated thermoplastic polymers by extruding a heated solution of the polymer having a low critical solution temperature directly i... | 12/20/2005 |
| 6973375 | System and method for flow monitoring and control One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid... | 12/06/2005 |
| 6964693 | Method for forming chromium anisotropic metal particles A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material... | 11/15/2005 |
| 6964187 | Vacuum sensor An apparatus and method for measuring the vapor or gas content of a vacuum chamber (1) by a vapor sensor (21) located in the fore-line of a vacuum system is provide. The gas or vapor content is determined by first providing a zero condition for the sen... | 11/15/2005 |
| 6942779 | Method and system for regenerating of plating baths The present invention provides a system and method for selectively removing one or more organic and inorganic and also preferably one or more inorganic contaminants from plating baths. More particularly, the invented method relates to the use of a source of energy i... | 09/13/2005 |
| 6921482 | Skinned hollow fiber membrane and method of manufacture Hollow fiber membranes having a skinned surface on one diameter, and a porous surface on the opposite diameter arm produced from perfluorinated thermoplastic polymers by extruding a heated solution of the polymer having a lower critical solution temperature directly... | 07/26/2005 |
| 6913654 | Method for the removal of airborne molecular contaminants using water gas mixtures The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the interior of the device, contacting at least a portion of the interior surf... | 07/05/2005 |
| 6910381 | System and method of operation of an embedded system for a digital capacitance diaphragm gauge Systems and methods for digitally controlling sensors. In one embodiment, a digital controller for a capacitance diaphragm gauge is embedded in a digital signal processor (DSP). The controller receives digitized input from a sensor AFE via a variable gain module, a ... | 06/28/2005 |
| 6869463 | Method for rapid activation or preconditioning of porous gas purification substrates A method is described for rapid and economical activation and/or preconditioning of gas purification substrates by providing forced convection of the preconditioning or activating gas through the pores of the substrate. The gas is pumped into the substrate-containin... | 03/22/2005 |
| 6865520 | System and method for filtering output in mass flow controllers and mass flow meters Embodiments of the present invention provide a method for filtering an indicated flow. One embodiment of the present invention can include the steps of (i) determining if the indicated flow is within an allowable deviation of a baseline, (ii) if the indicated flow i... | 03/08/2005 |
| 6846409 | Liquid filtration device The present invention provides a liquid filtration device with internal flow paths that facilitate the purging of air bubbles from the device. The device includes internal channels that collect bubbles from fluid entering the filtration device and more efficiently d... | 01/25/2005 |
| 6837111 | Variable capacitance measuring device A variable capacitance measuring device can comprise a glass-ceramic insulator having a coefficient of thermal expansion that closely matches the coefficient of thermal expansion of a metallic materials used within the device. The glass-ceramic material may chemical... | 01/04/2005 |
| 6832626 | Modular two way check valve construction A check valve construction is provided which includes a housing having a first flow path and a second flow path. Liquid flow is controlled within the first and second flow path by movable plungers (22, 24) having a sealing surface and a plurality of prongs th... | 12/21/2004 |
| 6805731 | Hollow fiber membrane contactor A fully perfluorinated thermoplastic hollow fiber membrane fluid-fluid contactor and a process for manufacturing the contactor is described. The contactor has a unitary end structure produced by a single step potting and bonding process. The contactor can be operate... | 10/19/2004 |
| 6802973 | Microporous hollow fiber membranes from perfluorinated thermoplastic polymers High flux porous hollow fiber membranes are produced from perfluorinated thermoplastic polymers by extruding heated solution of the polymer having a lower critical solution temperature directly into a cooling bath to form the porous membrane by liquid-liquid phase s... | 10/12/2004 |
| 6802972 | Microporous hollow fiber membranes from perfluorinated thermoplastic polymers High flux porous hollow fiber membranes are produced from perfluorinated thermoplastic polymers by extruding a heated solution of the polymer having a lower critical solution temperature directly into a cooling bath to form the porous membrane by liquid-liquid phase... | 10/12/2004 |
| 6770113 | Method for forming anisotrophic metal particles A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material... | 08/03/2004 |
| 6734659 | Electronic interface for use with dual electrode capacitance diaphragm gauges Systems and methods for determining differential currents in a pair of circuits. In a preferred embodiment, an excitation voltage and a tightly coupled differencing current transformer are coupled to a differential capacitance manometer to generate a differential cu... | 05/11/2004 |
| 6714878 | System and method for a digital mass flow controller A method for controlling the gas flow within a digital mass flow controller. The method calculates a digitally enhanced flow rate signal that more accurately represents an actual flow rate through the digital mass flow controller. The digitally enhanced flow rate is... | 03/30/2004 |
| 6701790 | Temperature regulator for use with a pressure sensing device A system and method for regulating the temperature of a sensor to reduce temperature gradients that form within the sensor. In one embodiment, the temperature gradients are reduced utilizing a temperature regulator with two controlled zones that surround ... | 03/09/2004 |
| 6681787 | System and method of operation of a digital mass flow controller The mass flow controller of the present invention includes a sensor. This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output to an electronic control system coupled to the sensor. The electronic control sy... | 01/27/2004 |
| 6663745 | Method for manufacturing hollow fiber membranes A method for producing a filter element of a plurality of hollow fiber membranes made of perfluorinated thermoplastic polymer with a pot or seal made of perfluorinated thermoplastic polymer. A bundle of hollow fiber membranes is prepared with the fibers s... | 12/16/2003 |
| 6649064 | Filtration and purification method for aqueous acids The invention pertains to a method for removing metallic ions and/or particulate material from an aqueous acid solution using particle removing membranes (e.g., ultra high molecular weight polyethylene) having immobilized ligand groups (e.g., macrocycle o... | 11/18/2003 |
| 6640822 | System and method of operation of a digital mass flow controller The mass flow controller of the present invention includes a sensor. This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output to an electronic control system coupled to the sensor. The electronic control sy... | 11/04/2003 |
| 6635183 | Apparatus and methods for pumping high viscosity fluids A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet through fluid dispense. Substantially all wetted surfaces are Teflon.RTM. or some similar non-contaminating fluid, for ap... | 10/21/2003 |
