Celebrity Inventors
Glam girl Heddy Lamar may have used her good looks to good effect on the silver screen, but she put her smarts to better use as an inventor. During World War II, she co-patented a frequency-switching system for torpedo guidance that was considered years ahead of its time.
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| Number | Title | Issue Date |
| 8022520 | System for hermetically sealing packages for optics A system for hermetically sealing devices. The system includes a substrate, which includes a plurality of individual chips. Each of the chips includes a plurality of devices and each of the chips are arranged in a spatial manner as a first array. The system also inc... | 09/20/2011 |
| 7923789 | Method of fabricating reflective spatial light modulator having high contrast ratio The contrast offered by a spatial light modulator device may be enhanced by positioning nonreflective elements such as supporting posts and moveable hinges, behind the reflecting surface of the pixel. In accordance with one embodiment, the reflecting surface is susp... | 04/12/2011 |
| 7585747 | Low temperature hermetic bonding at water level and method of bonding for micro display application A spatial light modulator is fabricated by bonding a capping layer over a wafer bearing active reflecting surfaces utilizing a low temperature bonding agent capable of providing a hermetic seal, such as a glass frit. The low temperature bonding agent may be B-stage ... | 09/08/2009 |
| 7570416 | Method and apparatus for a reflective spatial light modulator with a flexible pedestal An electromechanical system comprising a substrate including a surface region and a flexible member coupled at a first end to the surface region. The system further comprises a base region and a tip region. The system also comprises a reflective member coupled to th... | 08/04/2009 |
| 7542195 | Triple alignment substrate method and structure for packaging devices A method for aligning multiple substrates. The method includes providing a handle substrate, providing a spacer substrate, and forming a plurality of first alignment marks on a first surface of the handle substrate. The method also includes forming a plurality of se... | 06/02/2009 |
| 7522330 | High fill ratio silicon spatial light modulator An optical deflection device for a display application. The optical deflection device includes a semiconductor substrate including an upper surface region and one or more electrode devices provided overlying the upper surface region. The optical deflection device al... | 04/21/2009 |
| 7505195 | Reflective spatial light modulator with high stiffness torsion spring hinge A spatial light modulator for use in display applications. The spatial light modulator includes a support substrate and a flexible member coupled to the support substrate. The spatial light modulator also includes a mirror plate coupled to the flexible member and ch... | 03/17/2009 |
| 7502158 | Method and structure for high fill factor spatial light modulator with integrated spacer layer A high fill factor spatial light modulator. The spatial light modulator includes a device layer coupled to a support base. The device layer includes a mirror plate and a coplanar flexible member. The spatial light modulator also includes a patterned spacer layer cou... | 03/10/2009 |
| 7477440 | Reflective spatial light modulator having dual layer electrodes and method of fabricating same A reflective spatial light modulator device features two pairs of electrodes formed on different metallization layers. Elevation of the upper electrode pair reduces its distance from the overlying reflecting surface, thereby requiring a smaller applied voltage to ge... | 01/13/2009 |
| 7463404 | Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. Embodiments o... | 12/09/2008 |
| 7453624 | Projection display system including a high fill ratio silicon spatial light modulator A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. Th... | 11/18/2008 |
| 7449284 | Method and structure for fabricating mechanical mirror structures using backside alignment techniques A method for fabricating mechanical structures from bonding substrates. The method includes providing a bonded substrate structure, which includes a first substrate having a first thickness of silicon material and a first face. The bonded substrate also includes a s... | 11/11/2008 |
| 7443716 | Spatial light modulator with four transistor electrode driver A memory cell for driving a complementary pair of electrodes associated with a micro-mirror of a spatial light modulator. The memory cell includes a first PMOS transistor, wherein a source of the first PMOS transistor is coupled to a first supply voltage. The memory... | 10/28/2008 |
| 7443568 | Method and system for resonant operation of a reflective spatial light modulator A method of activating a micro-mirror includes applying a first electrode voltage to one or more electrodes associated with the micro-mirror. The micro-mirror is positioned at a first positive deflection angle during a portion of the application of the first electro... | 10/28/2008 |
| 7430359 | Micromechanical system containing a microfluidic lubricant channel Embodiments of the present invention generally relate to a electromechanical device that has an improved usable lifetime due to the presence of one or more channels that contain and deliver a lubricant material that can reduce the likelihood of stiction occurring be... | 09/30/2008 |
| 7428094 | Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge A method of fabricating a spatial light modulator. The method includes forming cavities in a first substrate and fabricating electrodes on a second substrate. The method also includes bonding the first substrate to the second substrate and forming a mirror plate fro... | 09/23/2008 |
| 7382519 | Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate A method of fabricating a spatial light modulator. The method includes providing a first substrate having a mirror layer, the mirror layer having an upper surface and a lower surface. The method also includes forming a standoff structure from the first substrate, th... | 06/03/2008 |
| 7382513 | Spatial light modulator with multi-layer landing structures A method of fabricating a spatial light modulator. The method includes providing a first substrate including a first bonding surface, forming a first layer coupled to the bonding surface, wherein the first layer is characterized by a first set of material parameters... | 06/03/2008 |
| 7374962 | Method of fabricating reflective spatial light modulator having high contrast ratio The contrast offered by a spatial light modulator device may be enhanced by positioning nonreflective elements such as supporting posts and moveable hinges, behind the reflecting surface of the pixel. In accordance with one embodiment, the reflecting surface is susp... | 05/20/2008 |
| 7372615 | Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed ... | 05/13/2008 |
| 7369297 | Mirror structure with single crystal silicon cross-member Hydrogen cleave silicon process for light modulating mirror structure using single crystal silicon as the base cross-member. Existing processes use two critical alignment steps that can contribute to higher actuation voltages and result in lower manufacturing yields... | 05/06/2008 |
| 7349140 | Triple alignment substrate method and structure for packaging devices A method for aligning multiple substrates. The method includes providing a handle substrate, providing a spacer substrate, and forming a plurality of first alignment marks on a first surface of the handle substrate. The method also includes forming a plurality of se... | 03/25/2008 |
| 7344956 | Method and device for wafer scale packaging of optical devices using a scribe and break process A multilayered integrated optical and circuit device. The device has a first substrate comprising at least one integrated circuit chip thereon, which has a cell region and a peripheral region. Preferably, the peripheral region has a bonding pad region, which has one... | 03/18/2008 |
| 7303645 | Method and system for hermetically sealing packages for optics A method for hermetically sealing devices. The method includes providing a substrate which includes a plurality of individual chips. Each of the chips includes a plurality of devices and each of the chips are arranged in a spatial manner as a first array. The method... | 12/04/2007 |
| 7298539 | Co-planar surface and torsion device mirror structure and method of manufacture for optical displays A spatial light modulator is provided. The spatial light modulator includes a first substrate comprising a plurality of electrically activated electrodes and a bias grid and a standoff structure coupled to the first substrate. The standoff structure includes a centr... | 11/20/2007 |
| 7285478 | Method for micro-electromechanical system package A method of manufacturing a multi-substrate semiconductor package. The method includes providing a first substrate with a plurality of first dies present thereon and forming a plurality of electrical contacts on an upper surface of a lateral extension portion of at ... | 10/23/2007 |
| 7280263 | Reflective spatial light modulator A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirr... | 10/09/2007 |
| 7265027 | Bond method and structure using selective application of spin on glass A method for bonding substrate structures. The method includes providing a transparent substrate structure, the transparent substrate structure comprising a face region and an incident light region, providing a spacer structure, the spacer structure comprising a sel... | 09/04/2007 |
| 7233428 | Method and apparatus for a reflective spatial light modulator with a flexible pedestal An electro-mechanical system comprising a substrate including a surface region and a flexible member coupled at a first end to the surface region. The system further comprises a base region and a tip region. The system also comprises a reflective member coupled to t... | 06/19/2007 |
| 7202989 | Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate A method of fabricating a spatial light modulator. The method includes providing a first substrate having a mirror layer, the mirror layer having an upper surface and a lower surface. The method also includes forming a standoff structure from the first substrate, th... | 04/10/2007 |
| 7199918 | Electrical contact method and structure for deflection devices formed in an array configuration A method of fabricating an electrical connection for a spatial light modulator includes providing a first substrate including a plurality of bias electrodes and a plurality of dielectric bond pads. The method also includes providing a second substrate of a predeterm... | 04/03/2007 |
| 7190508 | Method and structure of patterning landing pad structures for spatial light modulators A spatial light modulator. The spatial light modulator includes a first substrate and a standoff structure coupled to the first substrate. The spatial light modulator also includes a mirror structure coupled to the standoff structure. The mirror structure includes a... | 03/13/2007 |
| 7184195 | Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator A method of fabricating an integrated spatial light modulator with contact structures. The method includes providing a first substrate having a bonding surface, providing a device substrate having a device surface, and depositing a first layer on the device surface,... | 02/27/2007 |
| 7172921 | Method and structure for forming an integrated spatial light modulator A method of fabricating an integrated spatial light modulator. The method includes providing a first substrate including a bonding surface, processing a device substrate to form at least an electrode layer, the electrode layer including a plurality of electrodes, an... | 02/06/2007 |
| 7160791 | Batch process and device for forming spacer structures for packaging optical reflection devices A method for forming a standoff structure for packaging devices, e.g., optical devices, integrated circuit devices. The method includes providing a substrate, e.g., silicon wafer. The substrate includes a first surface region, a second surface region, and a thicknes... | 01/09/2007 |
| 7142349 | Method and structure for reducing parasitic influences of deflection devices on spatial light modulators A spatial light modulator is provided. The spatial light modulator includes a first substrate, the first substrate comprising a plurality of electrodes adapted to receive control signals, and a bias grid coupled to the first substrate and electrically isolated from ... | 11/28/2006 |
| 7141870 | Apparatus for micro-electro mechanical system package A method of manufacturing a multi-substrate semiconductor package. The method includes providing a first substrate with a plurality of first dies present thereon and forming a plurality of electrical contacts on an upper surface of a lateral extension portion of at ... | 11/28/2006 |
| 7118234 | Reflective spatial light modulator A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirr... | 10/10/2006 |
| 7109120 | Profiled standoff structure and method for optical display package A method for forming a standoff structure for devices, e.g., optical devices, integrated circuit devices, micro-electrical mechanical systems (i.e., MEMS). The method includes providing a substrate (e.g., silicon wafer), which has a first surface region characterize... | 09/19/2006 |
| 7109066 | Method and device for forming spacer structures for packaging optical reflection devices A method for forming a patterned silicon bearing material, e.g., silicon substrate. The method includes providing a silicon substrate, which has a surface region and a backside region. The method includes forming a plurality of recessed regions on the surface region... | 09/19/2006 |
