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Assignee: Microfabrica Inc.


Location: Van Nuys, CA
No. of patents: 47

1    
NumberTitleIssue Date
8070931Electrochemical fabrication method including elastic joining of structures
Embodiments are directed to methods for forming multi-layer three-dimensional structures involving the joining of at least two structural elements, at least one of which is formed as a multi-layer three-dimensional structure, wherein the joining occurs via one of: (...
12/06/2011
7878385Probe arrays and method for making
Embodiments of invention are directed to the formation of microprobes (i.e. compliant electrical or electronic contact elements) on a temporary substrate, dicing individual probe arrays, and then transferring the arrays to space transformers or other permanent subst...
02/01/2011
7830228Miniature RF and microwave components and methods for fabricating such components
RF and microwave radiation directing or controlling components are provided that may be monolithic, that may be formed from a plurality of electrodeposition operations and/or from a plurality of deposited layers of material, that may include switches, inductors, ant...
11/09/2010
7828952Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
Multi-layer structures are electrochemically fabricated by depositing a first material, selectively etching the first material (e.g. via a mask), depositing a second material to fill in the voids created by the etching, and then planarizing the depositions so as to ...
11/09/2010
7811427Monolithic structures including alignment and/or retention fixtures for accepting components
Permanent or temporary alignment and/or retention structures for receiving multiple components are provided. The structures are preferably formed monolithically via a plurality of deposition operations (e.g. electrodeposition operations). The structures typically in...
10/12/2010
7686770Discrete or continuous tissue capture device and method for making
Some embodiments of the invention provide an instrument for mechanically removing segments of tissue from a patient during a minimally invasive surgical procedure. An exemplary instrument provides an inlet for receiving tissue a mechanism for cutting away received t...
03/30/2010
7679388Cantilever microprobes for contacting electronic components and methods for making such probes
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments ...
03/16/2010
7674361Micro-turbines, roller bearings, bushings, and design of hollow closed structures and fabrication methods for creating such structures
Multi-layer fabrication methods (e.g. electrochemical fabrication methods) for forming microscale and mesoscale devices or structures (e.g. turbines) provide bushings or roller bearing that allow rotational or linear motion which is constrained by multiple structura...
03/09/2010
7640651Fabrication process for co-fabricating multilayer probe array and a space transformer
Embodiments of the invention provide fabrication processes for the co-fabrication of microprobe arrays along with one or more space transformers wherein the fabrication processes include the forming and adhering of a plurality of layers to previously formed layers a...
01/05/2010
7611616Mesoscale and microscale device fabrication methods using split structures and alignment elements
Various embodiments of the invention are directed to formation of mesoscale or microscale devices using electrochemical fabrication techniques where structures are formed from a plurality of layers as opened structures which can be folded over or other otherwise com...
11/03/2009
7588674Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
Some embodiments of the present invention provide processes and apparatus for electrochemically fabricating multilayer structures (e.g. mesoscale or microscale structures) with improved endpoint detection and parallelism maintenance for materials (e.g. layers) that ...
09/15/2009
7567089Two-part microprobes for contacting electronic components and methods for making such probes
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of two-part probe elements, socket-able probes and the...
07/28/2009
7557595Cantilever microprobes for contacting electronic components and methods for making such probes
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments ...
07/07/2009
7531077Electrochemical fabrication process for forming multilayer multimaterial microprobe structures
Some embodiments of the invention are directed to the electrochemical fabrication of microprobes which are formed from a core material and a material that partially coats the surface of the probe. Other embodiments are directed to the electrochemical fabrication of ...
05/12/2009
7527721Electrochemical fabrication method for producing multi-layer three-dimensional structures on a porous dielectric
Multi-layer structures are electrochemically formed on porous dielectric substrates. In some embodiments, the substrates have at least one surface which is infiltrated with a sacrificial conductive material, all pores (e.g. openings in between dielectric regions of ...
05/05/2009
7524427Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
Some embodiments of the present invention are directed to techniques for building up single layer or multi-layer structures on dielectric or partially dielectric substrates. Certain embodiments deposit seed layer material directly onto substrate materials while othe...
04/28/2009
7517462Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
Some embodiments of the present invention are directed to techniques for building up single layer or multi-layer structures on dielectric or partially dielectric substrates. Certain embodiments deposit seed layer material directly onto substrate materials while othe...
04/14/2009
7511523Cantilever microprobes for contacting electronic components and methods for making such probes
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments ...
03/31/2009
7504840Electrochemically fabricated microprobes
Multilayer test probe structures are electrochemically fabricated via depositions of one or more materials in a plurality of overlaying and adhered layers. In some embodiments each probe structure may include a plurality of contact arms or contact tips that are used...
03/17/2009
7501328Methods for electrochemically fabricating structures using adhered masks, incorporating dielectric sheets, and/or seed layers that are partially removed via planarization
Embodiments of the present invention provide mesoscale or microscale three-dimensional structures (e.g. components, device, and the like). Embodiments relate to one or more of (1) the formation of such structures which incorporate sheets of dielectric material and/o...
03/10/2009
7498714Multi-layer three-dimensional structures having features smaller than a minimum feature size associated with the formation of individual layers
Embodiments of multi-layer three-dimensional structures and formation methods provide structures with effective feature (e.g. opening) sizes (e.g. virtual gaps) that are smaller than a minimum feature size (MFS) that exists on each layer as a result of the formation...
03/03/2009
7488686Electrochemical fabrication methods including use of surface treatments to reduce overplating and/or planarization during formation of multi-layer three-dimensional structures
A method of fabricating three-dimensional structures from a plurality of adhered layers of at least a first and a second material wherein the first material is a conductive material and wherein each of a plurality of layers includes treating a surface of a first mat...
02/10/2009
7412767Microprobe tips and methods for making
Embodiments of the present invention are directed to the formation of microprobe tips elements having a variety of configurations. In some embodiments tips are formed from the same building material as the probes themselves, while in other embodiments the tips may b...
08/19/2008
7384530Methods for electrochemically fabricating multi-layer structures including regions incorporating maskless, patterned, multiple layer thickness depositions of selected materials
The invention includes methods of fabrication and apparatuses. In at least some embodiments of the applicants' invention, the methods include processes of: maskless selective deposition of non-layered structures, selective etching and/or deposition without use of a ...
06/10/2008
7372616Complex microdevices and apparatus and methods for fabricating such devices
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFABâ„¢). ...
05/13/2008
7368044Non-conformable masks and methods and apparatus for forming three-dimensional structures
Electrochemical Fabrication techniques are used to modify substrates or to form multilayer structures (e.g. components or devices) from a plurality of overlaying and adhered layers. Masks are used to selectively etch or deposit material. Some masks may be of the con...
05/06/2008
7363705Method of making a contact
Embodiments of the present invention are directed to the formation of microprobe tips elements having a variety of configurations. In some embodiments tips are formed from the same building material as the probes themselves, while in other embodiments the tips may b...
04/29/2008
7351321Method for electrochemical fabrication
An electroplating method that includes: a) contacting a first substrate with a first article, which includes a substrate and a conformable mask disposed in a pattern on the substrate; b) electroplating a first metal from a source of metal ions onto the first substra...
04/01/2008
7303663Multistep release method for electrochemically fabricated structures
Multilayer structures are electrochemically fabricated from at least one structural material (e.g. nickel), that is configured to define a desired structure and which may be attached to a substrate, and from at least one sacrificial material (e.g. copper) that surro...
12/04/2007
7291254Method for electrochemically forming structures including non-parallel mating of contact masks and substrates
Treatment of substrates, formation of structures, and formation of multilayer structures using contact masks are disclosed where a non-parallel or non-simultaneous mating of various mask contact surfaces to a substrate surface occurs. Some embodiments involve bringi...
11/06/2007
7288178Methods of and apparatus for making high aspect ratio microelectromechanical structures
Various embodiments of the invention provide techniques for forming structures (e.g. HARMS-type structures) via an electrochemical extrusion process. Preferred embodiments perform the extrusion processes via depositions through anodeless conformable contact masks th...
10/30/2007
7273812Microprobe tips and methods for making
Embodiments of the present invention are directed to the formation of microprobe tips elements having a variety of configurations. In some embodiments tips are formed from the same building material as the probes themselves, while in other embodiments the tips may b...
09/25/2007
7271888Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
Some embodiments of the present invention provide processes and apparatus for electrochemically fabricating multilayer structures (e.g. mesoscale or microscale structures) with improved endpoint detection and parallelism maintenance for materials (e.g. layers) that ...
09/18/2007
7265562Cantilever microprobes for contacting electronic components and methods for making such probes
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments ...
09/04/2007
7265565Cantilever microprobes for contacting electronic components and methods for making such probes
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments ...
09/04/2007
7252861Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
Multi-layer structures are electrochemically fabricated by depositing a first material, selectively etching the first material (e.g. via a mask), depositing a second material to fill in the voids created by the etching, and then planarizing the depositions so as to ...
08/07/2007
7250101Electrochemically fabricated structures having dielectric or active bases and methods of and apparatus for producing such structures
Multilayer structures are electrochemically fabricated on a temporary (e.g. conductive) substrate and are thereafter bonded to a permanent (e.g. dielectric, patterned, multi-material, or otherwise functional) substrate and removed from the temporary substrate. In so...
07/31/2007
7241689Microprobe tips and methods for making
Embodiments of the present invention are directed to the formation of microprobe tips elements having a variety of configurations. In some embodiments tips are formed from the same building material as the probes themselves, while in other embodiments the tips may b...
07/10/2007
7239219Miniature RF and microwave components and methods for fabricating such components
RF and microwave radiation directing or controlling components are provided that may be monolithic, that may be formed from a plurality of electrodeposition operations and/or from a plurality of deposited layers of material, that may include switches, inductors, ant...
07/03/2007
7235166Multi-cell masks and methods and apparatus for using such masks to form three-dimensional structures
Multilayer structures are electrochemically fabricated via depositions of one or more materials in a plurality of overlaying and adhered layers. Selectivity of deposition is obtained via a multi-cell controllable mask. Alternatively, net selective deposition is obta...
06/26/2007
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