Did You Know...
...that after Parker Brothers executives turned down the game of Monopoly because it had "52 fundamental errors" (including taking too long to play), a copy of the game wound up in the home of the company president who stayed up until 1 a.m. to finish playing it? He was so impressed by the game that the next day he wrote to inventor Charles Darrow and offered to buy it!
PatentStorm News
Make the Most of Our Site
See this month's Top Inventors and Most Cited Patents.
Stay on top of the latest innovations by subscribing to an RSS feed.
Registered users: Manage your profile.
| Number | Title | Issue Date |
| 7684037 | Spectrometer with collimated input light An optical spectroscopy tool is provided. In one embodiment a highly efficient means by which moderate resolution spectroscopy may be performed in the vacuum ultraviolet (VUV) is described. In one embodiment the techniques can be used as a high throughput spectromet... | 03/23/2010 |
| 7663747 | Contamination monitoring and control techniques for use with an optical metrology instrument A technique is provided for monitoring and controlling surface contaminants on optical elements contained within the optical path (or sub-path) of an optical metrology instrument. The technique may be utilized in one embodiment in such a manner as to not require tha... | 02/16/2010 |
| 7663097 | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement A reflectometer calibration technique is provided that may include the use of two calibration samples in the calibration process. Further, the technique allows for calibration even in the presence of variations between the actual and assumed properties of at least o... | 02/16/2010 |
| 7622310 | Contamination monitoring and control techniques for use with an optical metrology instrument A technique is provided for generating and subsequently monitoring the controlled environment(s) within an optical metrology instrument in such a manner as to minimize absorbing species within the light path of the metrology instrument and to minimize the build-up o... | 11/24/2009 |
| 7579601 | Spectrometer with moveable detector element An optical spectroscopy tool is provided. In one embodiment a highly efficient means by which moderate resolution spectroscopy may be performed in the vacuum ultraviolet (VUV) is described. In one embodiment the techniques can be used as a high throughput spectromet... | 08/25/2009 |
| 7511265 | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement A reflectometer calibration technique is provided that may include the use of two calibration samples in the calibration process. Further, the technique allows for calibration even in the presence of variations between the actual and assumed properties of at least o... | 03/31/2009 |
| 7485869 | Prism spectrometer An optical spectroscopy tool is provided. In one embodiment a highly efficient means by which moderate resolution spectroscopy may be performed in the vacuum ultraviolet (VUV) is described. In one embodiment the techniques can be used as a high throughput spectromet... | 02/03/2009 |
| 7446876 | Vacuum ultra-violet reflectometer with stray light correction A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in th... | 11/04/2008 |
| 7399975 | Method and apparatus for performing highly accurate thin film measurements A reflectometer data reduction technique is provided that utilizes a ratio of an expected reflectance spectrum of the sample being measured to the actual reflectance spectrum of the sample being measured. The technique is particularly useful in spectral regions that... | 07/15/2008 |
| 7394551 | Vacuum ultraviolet referencing reflectometer A spectroscopy system is provided which operates in the vacuum ultraviolet spectrum. More particularly, a system utilizing reflectometry techniques in the vacuum ultraviolet spectrum is provided for use in metrology applications. To ensure accurate and repeatable me... | 07/01/2008 |
| 7391030 | Broad band referencing reflectometer A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in th... | 06/24/2008 |
| 7342235 | Contamination monitoring and control techniques for use with an optical metrology instrument A technique is provided monitoring and removing contaminants from the surface of a sample that is being measured with an optical metrology tool. The monitoring and removing contaminants from the surface of a sample may occur prior to recording an optical response fr... | 03/11/2008 |
| 7282703 | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement A reflectometer calibration technique is provided that may include the use of two calibration samples in the calibration process. Further, the technique allows for calibration even in the presence of variations between the actual and assumed properties of at least o... | 10/16/2007 |
| 7271394 | Vacuum ultraviolet reflectometer having collimated beam A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. The system further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limi... | 09/18/2007 |
| 7189973 | Vacuum ultraviolet reflectometer integrated with processing system A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in th... | 03/13/2007 |
| 7067818 | Vacuum ultraviolet reflectometer system and method A spectroscopy system is provided which operates in the vacuum ultra-violet spectrum. More particularly, a system utilizing reflectometry techniques in the vacuum ultraviolet spectrum is provided for use in metrology applications. The system may further include the ... | 06/27/2006 |
