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Assignee: Matheson Tri-Gas, Inc,


Location: Longmont, CO
No. of patents: 8

NumberTitleIssue Date
7371313On-site generation, purification, and distribution of ultra-pure anhydrous ammonia
A system and method for generating, purifying, and using ultra-pure ammonia on-site, such as at a semiconductor manufacturing facility. The system includes an ammonia generation system configured to generate ammonia including carbon dioxide, water, and other impurit...
05/13/2008
7314506Fluid purification system with low temperature purifier
A system and method for processing a matrix fluid to remove one or more impurities (such as moisture from a process gas). The purifier includes a pre-cooler that receives the matrix fluid and cools the matrix fluid to a second, lower temperature. A container is prov...
01/01/2008
6824589Materials and methods for the purification of inert, nonreactive, and reactive gases
Regenerable gas purifier materials are provided capable of reducing the level of contaminants such as oxygen and water in an inert, nonreactive or reactive gas stream to parts-per-billion levels or sub-parts-per-billion levels. The purifier materials of this inventi...
11/30/2004
6733734Materials and methods for the purification of hydride gases
Regenerable gas purifier materials are provided capable of reducing the level of contaminants such as oxygen and moisture in a hydride gas stream to parts-per-billion levels or sub-parts-per-billion levels. The purifier materials of this invention comprise a thin la...
05/11/2004
6710012Method for producing an ultra-low emission carbon material
Trace impurities such as organic compounds and carbon monoxide are reduced to sub-ppb levels in gases such as nitrogen, helium and argon, by gas purifying systems that contain an ultra-low emission (ULE) carbon material. Ultra-low emission (ULE) carbon materials is ...
03/23/2004
6637212Method and apparatus for the delivery of liquefied gases having constant impurity levels
A method and an apparatus are provided for the delivery of a vapor phase product having a substantially constant impurity level from a liquefied source of said gas to an endpoint. The delivery method includes withdrawing a liquefied gas having a level of ...
10/28/2003
6547861Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material
Trace impurities such as organic compounds and carbon monoxide in reactive fluids such as ammonia, hydrogen chloride, hydrogen bromide, and chlorine are reduced to sub-ppb levels using gas purifying systems that contain a preconditioned ultra-low emission...
04/15/2003
6461411Method and materials for purifying hydride gases, inert gases, and non-reactive gases
The invention provides an efficient process by which trace impurities are removed from matrix hydride, inert gases and non-reactive gases, thus decreasing the concentration of the trace gases by a factor of 100-to-10,000, and more specifically to part-per...
10/08/2002
 
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