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Patent No. 5787895

Kissing Shield

A kissing shield comprised of a thin, flexible membrane and a frame or holder.

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Assignee: MKS Instruments, Inc.


Location: Wilmington, MA
No. of patents: 90

    3  
NumberTitleIssue Date
6781119Ion storage system
An ion storage system is described that includes an ion trap that defines a volume for storing a plurality of ions. A radio frequency (RF) generator is electromagnetically coupled to the volume defined by the ion trap. The RF generator generates an RF electrical fie...
08/24/2004
6776394Pendulum valve assembly
A valve assembly including a housing having an opening defined by a valve seat, a valve body movable within the housing between a completely opened position disengaged from the valve seat and a completely closed position engaging the valve seat, and a sleeve movable...
08/17/2004
6772640Multi-temperature heater for use with pressure transducers
A heater is disclosed for use with pressure transducers. The disclosed heater includes a first heating element and a second heating element. The first heating element is characterized by a first electrical resistance. The second heating element is characterized by a...
08/10/2004
6766260Mass flow ratio system and method
A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a d...
07/20/2004
4571801Method of manufacturing a cartridge unit for establishing controlled laminar-flow conditions
In a compact thermal flowmeter unit of the type wherein a portion of the fluid in a main flow path is shunted through a laminar-flow sensor passageway, that section of the main flow path which the sensor bypasses is occupied by an appropriate range-govern...
02/25/1986
4522058Laminar-flow channeling in thermal flowmeters and the like
In a compact thermal flowmeter unit of the type wherein a portion of the fluid in a main flow path is shunted through a laminar-flow sensor passageway, that section of the main flow path which the sensor bypasses is occupied by an appropriate range-govern...
06/11/1985
4464932Thermal mass flowmetering
Metering and related control of fluid flow are achieved both accurately and at high response speed by way of a unique sequencing of thermal exchanges with the fluid under closely-regulated and inter-dependent thermal conditions. The flowing fluid is first...
08/14/1984
4327894Linearized controlled valves
Servo control of a butterfly valve or the like, in which fluid flow is inherently non-linearly related to angular orientations of a vane or plug member, is effected through a function-generator mechanism interposed to render the system transfer function s...
05/04/1982
4277747Wide range digital meter
In the ion gauge system disclosed herein, the ion current obtained from an ion gauge tube is directly converted to a signal having a frequency proportional to the ion current so that a digital measurement of vacuum may be obtained. The ion current charges...
07/07/1981
4008619Vacuum monitoring
Monitoring of gas contamination and of related deviations in pressures within a sealed cavity is effected by way of electrical-network responses to conduction characteristics of a thin-film deposit of getter material within the cavity, the getter film bei...
02/22/1977
    3  
 
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