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| Number | Title | Issue Date |
| 7643909 | Highly responsive master-slave valve positioning A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicate... | 01/05/2010 |
| 7628861 | Pulsed mass flow delivery system and method A system for delivering pulses of a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber. A controller is programmed to receive the desired mass for each pulse through an input ... | 12/08/2009 |
| 7628860 | Pulsed mass flow delivery system and method A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to b... | 12/08/2009 |
| 7615120 | Pulsed mass flow delivery system and method A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to b... | 11/10/2009 |
| 7546208 | Method and apparatus of signal processing for use in spectrometry using an improved apodization function A method and apparatus is disclosed for signal spectrometry using an improved apodization function. Such method and apparatus involve (i) obtaining sample and reference time domain waveforms; (ii) applying sample and reference apodization waveforms to the sample and... | 06/09/2009 |
| 7502114 | Ozone concentration sensor An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially... | 03/10/2009 |
| 7477996 | Integrated absolute and differential pressure transducer A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential... | 01/13/2009 |
| 7477711 | Synchronous undersampling for high-frequency voltage and current measurements A power source may generate signals (RF or microwave), when driven by a drive signal from a controller. A sensor may measure the voltage and current of the signals generated by the power source, and may generate sensor signals representative of the measured voltage ... | 01/13/2009 |
| 7474968 | Critical flow based mass flow verifier A flow verifier for verifying measurement by a fluid delivery device under test (DUT) includes a chamber configured to receive a flow of the fluid from the DUT, at least one temperature sensor to provide gas temperature in the chamber, at least one pressure transduc... | 01/06/2009 |
| 7461549 | Mass flow verifiers capable of providing different volumes, and related methods Embodiments of the present disclosure are directed to systems, methods, and apparatus, including software implementation, useful for high-precision measurement of mass flow rate over a large range of flows by using multiple volumes, each having a different and selec... | 12/09/2008 |
| 7455720 | Method and apparatus for preventing products of TiCLand NHor other feed gas reactions from damaging vacuum pumps in TiN or other deposition systems In a deposition system, such as a TiN deposition system where TiCl4 and NH3 are reacted in a process chamber to produce TiN thin film coatings, a second reactor is included between the process chamber and the vacuum pump to react enough of the ... | 11/25/2008 |
| 7424346 | Apparatus and method for pressure fluctuation insensitive mass flow control A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals t... | 09/09/2008 |
| 7397676 | Class E amplifier with inductive clamp A power supply including an inverter receiving a DC input signal from a DC input source (11). The inverter is implemented as a single-ended inverter. Each inverter is driven by a signal source (13A, 13B), which outputs an AC signal. The output f... | 07/08/2008 |
| 7387135 | Valve assembly having rigid seating surfaces A valve assembly including a valve body having a bore and a port extending to the bore, an orifice member received in the bore and having an end wall and a side wall, and wherein the end wall defines an orifice providing fluid communication with the port of the body... | 06/17/2008 |
| 7353771 | Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator According to a first aspect, a power supply and a method of providing power for igniting a plasma in a reactive gas generator is provided that includes (i) coupling a series resonant circuit that comprises a resonant inductor and a resonant capacitor between a switc... | 04/08/2008 |
| 7336511 | Power supply control loop with multiple leveling modes A method and apparatus for controlling a power supply. The system includes a power supply and a controller for outputting a command signal to regulate the operation of the power supply. The controller determines the command signal based on at least one error signal ... | 02/26/2008 |
| 7313454 | Method and apparatus for classifying manufacturing outputs A method for process monitoring involves acquiring data samples associated with a plurality of manufacturing related variables for a plurality of outputs of a manufacturing process. The distance of each data sample relative to every other data sample is then calcula... | 12/25/2007 |
| 7304438 | Method and apparatus for preventing instabilities in radio-frequency plasma processing A method and apparatus for controlling a power supply to prevent instabilities due to dynamic loads in RF plasma processing systems, operating at frequencies of from 1 MHz and up, uses a feedforward type of control loop to tightly regulate the power supplied to the ... | 12/04/2007 |
| 7296465 | Vertical mount mass flow sensor A thermal mass flow meter for measuring flow rate of a fluid includes a conduit that is configured to receive the fluid and that defines a primary flow path between an inlet and an outlet of the conduit. The conduit is bound at least in part by a sensor receiving su... | 11/20/2007 |
| 7278444 | Valve assembly having improved pump-down performance A valve assembly including a housing having a flow path extending to an outlet and a valve seat in the flow path and around the outlet, a slide plate located in the housing and movable transversely to a longitudinal axis of the flow path between a closed position, i... | 10/09/2007 |
| 7264006 | Ozonated water flow and concentration control apparatus and method The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a s... | 09/04/2007 |
| 7261797 | Passive bipolar arc control system and method A method and system for controlling arcs in a DC sputtering system with a passive circuit is presented. The arc control system includes a sputtering chamber that houses an anode and a sputtering target formed from a target material and serving as a cathode. A DC pow... | 08/28/2007 |
| 7248113 | Methods and systems for stabilizing an amplifier The invention generally relates to stabilizing an amplifier. In one aspect, a stabilization module that is in electrical communication with the amplifier is provided. The stabilization module includes both an open loop control system and a closed loop control system... | 07/24/2007 |
| 7238266 | Method and apparatus for fluorine generation and recirculation The invention relates to apparatus and methods for generating and recycling fluorine. The applicants recognized that a fluorine separator, used either alone or in combination with a plasma generator can produce sufficient quantities of fluorine at its point of use f... | 07/03/2007 |
| 7209518 | Higher PWM resolution for switchmode power supply control A pulse width modulation controlling circuit for a power supply and method for controlling a switchmode power supply is disclosed. The present invention accomplishes control over the switching of the power supply by coarsely and then finely adjusting a time-length s... | 04/24/2007 |
| 7204150 | Turbo sump for use with capacitive pressure sensor The disclosed pressure sensor includes a body, a diaphragm, and a flow defining structure. The body defines an interior volume. The diaphragm divides the interior volume into a first portion and a second portion. At least a first part of the diaphragm moves in a fir... | 04/17/2007 |
| 7206210 | Power supply control loop with multiple leveling modes A method and apparatus for controlling a power supply. The system includes a power supply and a controller for outputting a command signal to regulate the operation of the power supply. The controller determines the command signal based on at least one error signal ... | 04/17/2007 |
| 7180758 | Class E amplifier with inductive clamp A power supply including an inverter receiving a DC input signal from a DC input source (11). The inverter is implemented as a single-ended inverter. Each inverter is driven by a signal source (13A, 13B), which outputs an AC signal. The output f... | 02/20/2007 |
| 7174263 | External volume insensitive flow verification A flow verifier for in-situ verification of a device under test (DUT), including an inlet connectable to a DUT, an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier, a vessel having a predetermined volume, diffusive media conn... | 02/06/2007 |
| 7166816 | Inductively-coupled torodial plasma source Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surround... | 01/23/2007 |
| RE39466 | Flow rate sensor implementing a plurality of inner tubes located within a sensor tube There is provided a flow rate sensor comprising: a pair of heating resistors operable to heat a sensor tube; a temperature sensor operable to control respective temperatures of the heating resistors; and a case operable to hold the heating resistors and the temperat... | 01/16/2007 |
| 7161112 | Toroidal low-field reactive gas source An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switc... | 01/09/2007 |
| 7157807 | Three phase rectifier circuit with virtual neutral A rectifier circuit powers three power conversion modules using a three phase AC input without a neutral connection. The rectifier circuit includes a first bridge rectifier that is connected to a first phase of the three phase AC input and that produces a first rect... | 01/02/2007 |
| 7155363 | Thermal imaging for semiconductor process monitoring The method measures the temperature, emissivity, and other properties of relatively smooth surfaces radiating thermal energy, and is especially adapted for monitoring semiconductor fabrication processes. Temperature is determined by relating measured radiance to the... | 12/26/2006 |
| 7151976 | Multivariate control of semiconductor processes A method for detecting a fault condition of a manufacturing process involving acquiring data and developing a model based on a plurality of manufacturing related variables for a plurality of outputs of a manufacturing process. The method also involves identifying wh... | 12/19/2006 |
| 7141447 | Method of forming a seal between a housing and a diaphragm of a capacitance sensor The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the capacitance pressure transducer. The present invention utilizes spacer ele... | 11/28/2006 |
| 7136767 | Apparatus and method for calibration of mass flow controller A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a rece... | 11/14/2006 |
| 7133921 | Portable devices for different control interfaces A communications interface system and method for a plasma generator is provided. The communications interface system includes a power delivery system component that has a standard POD interface for communicating information that complies with a first protocol. A por... | 11/07/2006 |
| 7124640 | Thermal mounting plate for heated pressure transducer A transducer assembly including a sensor housing, a heater shell located in the sensor housing, a heater operatively coupled to the heater shell, a sensor received in the heater shell, and an electronics assembly positioned within the sensor housing, outside of the ... | 10/24/2006 |
| 7122965 | Methods and apparatus for calibration and metrology for an integrated RF generator system The invention features RF plasma generation systems, methods for operating the systems, methods for calibrating the systems, and calibration apparatus. One RF plasma generation system includes an impedance matching network having an input port to receive an RF signa... | 10/17/2006 |