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Assignee: MKS Instruments Inc.


Location: Andover, MA
No. of patents: 16

NumberTitleIssue Date
7463991Mass flow verifier with flow restrictor
A flow verifier for verifying measurement of a flow rate of a fluid by a device includes a flow restrictor that renders the flow rate verification substantially insensitive to elements upstream of the flow restrictor. The flow verifier includes a vessel that receive...
12/09/2008
7451654Constant power dissipation in capacitance pressure transducers
A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector detects a shorting of the diaphragm onto one or more reference elect...
11/18/2008
7437204Method and apparatus for monitoring host to tool communications
An aspect of the present invention includes a method and device for listening to communications between processes and tools, recording report and report trigger definitions, matching reports from tools with the recorded definitions, and translating messages into a c...
10/14/2008
7436234Signal oversampling for improved S:N in reflector movement system
Eight or more transition points are generated during a given period, and are used in tracking movement of an interferometer reflector. Duty cycles of generated square waves are used to establish precise intervals between the transition points, and precise wave-phase...
10/14/2008
7428913Valve assembly having articulating rigid seating surface
A valve assembly including a valve body having an orifice, and a valve member received in the valve body and movable along an axis with respect to the orifice. The valve member includes a cup in an end of the valve member and the cup has an end wall facing the orifi...
09/30/2008
7372573Multigas monitoring and detection system
A spectroscopic detection system is described for monitoring ambient air for toxic chemical substances. The system can be a compact, portable multiple gas analyzer capable of detecting and discriminating a broad range of chemical constituents including various nerve...
05/13/2008
7369920Pressure control system with optimized performance
A pressure control system for controlling pressure of a fluid in a chamber includes a pressure sensor configured to measure the pressure of the fluid in the chamber, and a valve configured to control the pressure of the fluid in the chamber by regulating flow of the...
05/06/2008
7284439Method for producing a pressure sensor for detecting small pressure differences and low pressures
A process for producing a plate for a capacitive sensor element. In one embodiment of the present invention, a method includes forming a plate from a substantially pure aluminum oxide slurry, heating the plate a first time in an oven to sinter the plate, cooling the...
10/23/2007
7252011Surface area deposition trap
The disclosed pressure transducer assembly includes a housing, a pressure sensor disposed within the housing, a coupling establishing a sealed pathway between the housing and an external source of gas or fluid, and a deposition trap disposed in the pathway. The depo...
08/07/2007
7219255Failsafe switching of intelligent controller method and device
The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or dist...
05/15/2007
7201057High-temperature reduced size manometer
A pressure-sensing device and method for making and using such device having a temperature differential between two portions of the device is disclosed. A solid-state heat pump, such as a thermo-electric cooler (TEC), is used to pump heat from a cold portion to a ho...
04/10/2007
7200671Method and apparatus for monitoring host to tool communications
An aspect of the present invention includes a method and device for listening to communications between processes and tools, recording report and report trigger definitions, matching reports from tools with the recorded definitions, and translating messages into a c...
04/03/2007
7155803Method of manufacturing a sensor element having integrated reference pressure
A pressure sensor includes a pressure sensor house assembly which contains a reference cavity, in which a vacuum exists, and a getter capable of being thermally activated. The getter is activated by directly contacting the getter with an exterior heated body, conduc...
01/02/2007
6735845Method of producing an integrated reference pressure sensor element
A method of manufacturing a pressure sensor house assembly which contains a reference cavity, in which a vacuum exists, and a getter capable of being thermally activated. The getter is activated by directly contacting the getter with an exterior heated body, conduct...
05/18/2004
6239429Quadrupole mass spectrometer assembly
A small, high performance quadrupole mass analyzer (QMA) that is simple to manufacture and assemble with high precision due to the design of key components using high precision circular geometries that are easily machined. The QMA has a single, cylindrica...
05/29/2001
4785851Vacuum security valve having a buffer volume
A vacuum security valve includes a buffer volume in a movable piston. The movable piston has two orifices communicating with the buffer volume, the first orifice communicating with a clearance volume above the piston. A flexible diaphragm is connected to ...
11/22/1988
 
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